AVS2016 Plasma Science and Technology Sessions
Click a Session Code to view its Abstracts
Topics | Time Periods | Schedule Overview
| Session Code | Start | Session Name |
|---|---|---|
| PS+SE-MoM | Monday, November 7, 2016 9:00 AM | Atmospheric Pressure Plasma Processing |
| PS-MoM | Monday, November 7, 2016 8:20 AM | Advanced FEOL/Gate Etching |
| PS+AS+SS-MoA | Monday, November 7, 2016 1:40 PM | Plasma Surface Interactions |
| PS-MoA | Monday, November 7, 2016 1:40 PM | Advanced BEOL/Interconnect Etching |
| PS-TuM | Tuesday, November 8, 2016 8:00 AM | Plasma Diagnostics, Sensors and Control |
| PS+2D-TuA | Tuesday, November 8, 2016 2:20 PM | Plasma Processing for Nanomaterials and 2D Materials |
| PS+TF-WeM | Wednesday, November 9, 2016 8:00 AM | Atomic Layer Etching |
| PS-WeM | Wednesday, November 9, 2016 8:00 AM | Plasma Sources and Novel Mechanisms for Generating Plasmas |
| PS+TF-WeA | Wednesday, November 9, 2016 2:20 PM | Plasma Deposition and Plasma Assisted ALD |
| PS-WeA | Wednesday, November 9, 2016 2:20 PM | Atomic Layer Etching and Low Damage Processing |
| PS1-ThM | Thursday, November 10, 2016 8:00 AM | Modeling of Plasmas and Plasma-Surface Interactions |
| PS2-ThM | Thursday, November 10, 2016 8:00 AM | Plasma Processing of Challenging Materials |
| PS-ThA | Thursday, November 10, 2016 2:20 PM | Plasma Chemistry and Plasma Surface Interactions |
| PS-ThP | Thursday, November 10, 2016 6:00 PM | Plasma Science and Technology Division Poster Session |