AVS2001 Plasma Science Sessions

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Session Code Start Session Name
PS1+MM-MoM Monday, October 29, 2001 9:40 AM Science & Technology of Microplasmas and MEMS Processing
PS2-MoM Monday, October 29, 2001 9:40 AM Diagnostics I
PS1-MoA Monday, October 29, 2001 2:20 PM Plasma-Surface Interactions I
PS2-MoA Monday, October 29, 2001 2:00 PM Plasma Modification of Organics
PS-MoP Monday, October 29, 2001 5:30 PM Plasma Diagnostics and Plasma-Surface Interactions Poster Session
PS1-TuM Tuesday, October 30, 2001 8:20 AM Diagnostics II
PS2-TuM Tuesday, October 30, 2001 8:20 AM Emerging Applications of Plasmas
PS1-TuA Tuesday, October 30, 2001 2:00 PM Dielectric Etch I
PS2+TF+SE-TuA Tuesday, October 30, 2001 2:00 PM PECVD/IPVD
PS-TuP Tuesday, October 30, 2001 5:30 PM Plasma Deposition, Modeling, and Emerging Applications Poster Session
PS1-WeM Wednesday, October 31, 2001 8:20 AM Dielectric Etch II
PS2-WeM Wednesday, October 31, 2001 8:20 AM Modeling
PS-WeA Wednesday, October 31, 2001 2:00 PM Plasma Surface Interactions II
PS+MS-ThM Thursday, November 1, 2001 8:20 AM Conductor Etch and Damage
PS-ThA Thursday, November 1, 2001 2:00 PM Feature Profile Evolution
PS-ThP Thursday, November 1, 2001 5:30 PM Plasma Etching Poster Session
PS-FrM Friday, November 2, 2001 8:20 AM Diagnostics III
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