AVS2001 Plasma Science Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| PS1+MM-MoM | Monday, October 29, 2001 9:40 AM | Science & Technology of Microplasmas and MEMS Processing |
| PS2-MoM | Monday, October 29, 2001 9:40 AM | Diagnostics I |
| PS1-MoA | Monday, October 29, 2001 2:20 PM | Plasma-Surface Interactions I |
| PS2-MoA | Monday, October 29, 2001 2:00 PM | Plasma Modification of Organics |
| PS-MoP | Monday, October 29, 2001 5:30 PM | Plasma Diagnostics and Plasma-Surface Interactions Poster Session |
| PS1-TuM | Tuesday, October 30, 2001 8:20 AM | Diagnostics II |
| PS2-TuM | Tuesday, October 30, 2001 8:20 AM | Emerging Applications of Plasmas |
| PS1-TuA | Tuesday, October 30, 2001 2:00 PM | Dielectric Etch I |
| PS2+TF+SE-TuA | Tuesday, October 30, 2001 2:00 PM | PECVD/IPVD |
| PS-TuP | Tuesday, October 30, 2001 5:30 PM | Plasma Deposition, Modeling, and Emerging Applications Poster Session |
| PS1-WeM | Wednesday, October 31, 2001 8:20 AM | Dielectric Etch II |
| PS2-WeM | Wednesday, October 31, 2001 8:20 AM | Modeling |
| PS-WeA | Wednesday, October 31, 2001 2:00 PM | Plasma Surface Interactions II |
| PS+MS-ThM | Thursday, November 1, 2001 8:20 AM | Conductor Etch and Damage |
| PS-ThA | Thursday, November 1, 2001 2:00 PM | Feature Profile Evolution |
| PS-ThP | Thursday, November 1, 2001 5:30 PM | Plasma Etching Poster Session |
| PS-FrM | Friday, November 2, 2001 8:20 AM | Diagnostics III |