AVS2015 Plasma Science and Technology Sessions

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Session Code Start Session Name
PS+SE-MoM Monday, October 19, 2015 9:00 AM Atmospheric Pressure Plasma Processing I
PS-MoM Monday, October 19, 2015 8:20 AM Advanced FEOL/Gate Etching
PS+EM-MoA Monday, October 19, 2015 2:20 PM Directed Self Assembly and Plasma Synthesis of Novel Materials
PS-MoA Monday, October 19, 2015 2:20 PM Plasma Diagnostics, Sensors and Control I
PS+BI+SM-TuM Tuesday, October 20, 2015 8:00 AM Plasmas for Medicine and Biological Applications
PS-TuM Tuesday, October 20, 2015 8:00 AM Advanced BEOL/Interconnect Etching
PS1-TuA Tuesday, October 20, 2015 2:20 PM Novel Materials and Etch Chemistry
PS2-TuA Tuesday, October 20, 2015 2:20 PM Plasma Modeling
PS+2D+SE-WeM Wednesday, October 21, 2015 8:20 AM Plasma Diagnostics, Sensors and Control II
PS+SS+TF-WeM Wednesday, October 21, 2015 8:00 AM Atomic Layer Etching (ALE) and Low-Damage Processes I
PS+AS+SS-WeA Wednesday, October 21, 2015 2:20 PM Plasma Surface Interactions
PS+TF-WeA Wednesday, October 21, 2015 2:20 PM Plasma Deposition and Plasma Assisted ALD
PS+2D-ThM Thursday, October 22, 2015 8:00 AM Plasma Processing for 2D Materials
PS+AP+SE-ThA Thursday, October 22, 2015 2:20 PM Advanced Ion Implantation and Plasma Doping
PS-ThA Thursday, October 22, 2015 2:20 PM Plasma Sources
PS-ThP Thursday, October 22, 2015 6:00 PM Plasma Science and Technology Poster Session
PS+SE-FrM Friday, October 23, 2015 9:00 AM Atmospheric Pressure Plasma Processing II
PS+SS+TF-FrM Friday, October 23, 2015 8:20 AM Atomic Layer Etching (ALE) and Low-Damage Processes II
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