AVS2015 Plasma Science and Technology Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| PS+SE-MoM | Monday, October 19, 2015 9:00 AM | Atmospheric Pressure Plasma Processing I |
| PS-MoM | Monday, October 19, 2015 8:20 AM | Advanced FEOL/Gate Etching |
| PS+EM-MoA | Monday, October 19, 2015 2:20 PM | Directed Self Assembly and Plasma Synthesis of Novel Materials |
| PS-MoA | Monday, October 19, 2015 2:20 PM | Plasma Diagnostics, Sensors and Control I |
| PS+BI+SM-TuM | Tuesday, October 20, 2015 8:00 AM | Plasmas for Medicine and Biological Applications |
| PS-TuM | Tuesday, October 20, 2015 8:00 AM | Advanced BEOL/Interconnect Etching |
| PS1-TuA | Tuesday, October 20, 2015 2:20 PM | Novel Materials and Etch Chemistry |
| PS2-TuA | Tuesday, October 20, 2015 2:20 PM | Plasma Modeling |
| PS+2D+SE-WeM | Wednesday, October 21, 2015 8:20 AM | Plasma Diagnostics, Sensors and Control II |
| PS+SS+TF-WeM | Wednesday, October 21, 2015 8:00 AM | Atomic Layer Etching (ALE) and Low-Damage Processes I |
| PS+AS+SS-WeA | Wednesday, October 21, 2015 2:20 PM | Plasma Surface Interactions |
| PS+TF-WeA | Wednesday, October 21, 2015 2:20 PM | Plasma Deposition and Plasma Assisted ALD |
| PS+2D-ThM | Thursday, October 22, 2015 8:00 AM | Plasma Processing for 2D Materials |
| PS+AP+SE-ThA | Thursday, October 22, 2015 2:20 PM | Advanced Ion Implantation and Plasma Doping |
| PS-ThA | Thursday, October 22, 2015 2:20 PM | Plasma Sources |
| PS-ThP | Thursday, October 22, 2015 6:00 PM | Plasma Science and Technology Poster Session |
| PS+SE-FrM | Friday, October 23, 2015 9:00 AM | Atmospheric Pressure Plasma Processing II |
| PS+SS+TF-FrM | Friday, October 23, 2015 8:20 AM | Atomic Layer Etching (ALE) and Low-Damage Processes II |