AVS2011 Plasma Science and Technology Division Sessions

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Session Code Start Session Name
PS-MoM Monday, October 31, 2011 8:20 AM Advanced FEOL / Gate Etching I
PS+BI-MoA Monday, October 31, 2011 2:00 PM Multiphase (Liquid, Solid, Gas) and Biological Related Plasmas
PS+SE-MoA Monday, October 31, 2011 2:00 PM Advanced FEOL / Gate Etching II
PS+MN+TF-TuM Tuesday, November 1, 2011 8:00 AM Plasma Processing for Disruptive Technologies
PS-TuM Tuesday, November 1, 2011 8:00 AM Advanced BEOL / Interconnect Etching I
PS1-TuA Tuesday, November 1, 2011 2:00 PM Advanced BEOL / Interconnect Etching II
PS2-TuA Tuesday, November 1, 2011 2:00 PM Plasma Diagnostics, Sensors and Control I
PS+SE-WeM Wednesday, November 2, 2011 8:00 AM Atmospheric Plasma Processing and Micro Plasmas
PS+SS-WeM Wednesday, November 2, 2011 8:00 AM Plasma Surface Interactions (Fundamentals & Applications) I
PS+EM-WeA Wednesday, November 2, 2011 2:00 PM Low-K Materials & Integration
PS-WeA Wednesday, November 2, 2011 2:00 PM Plasma Sources
PS+TF-ThM Thursday, November 3, 2011 8:00 AM Plasma Deposition and Plasma Enhanced ALD
PS-ThM Thursday, November 3, 2011 8:00 AM Neutral Beam and Low Damage Processing
PS+SS-ThA Thursday, November 3, 2011 2:00 PM Plasma Surface Interactions (Fundamentals & Applications) II
PS-ThA Thursday, November 3, 2011 2:00 PM Plasma Diagnostics, Sensors and Control II
PS-ThP Thursday, November 3, 2011 6:00 PM Plasma Science and Technology Poster Session
PS-FrM Friday, November 4, 2011 8:20 AM Plasma Modeling
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