AVS2008 Plasma Science and Technology Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| PS-MoM | Monday, October 20, 2008 8:20 AM | Plasma Etching for Advanced Interconnects |
| PS-MoA | Monday, October 20, 2008 2:00 PM | Invited Highlights on Plasma-Surface Interactions - Honoring the Distinguished Career of Herbert H. Sawin |
| PS-TuM | Tuesday, October 21, 2008 8:00 AM | Advanced Gate Etching |
| PS-TuA | Tuesday, October 21, 2008 1:40 PM | Fundamentals of Plasma-Surface Interactions I |
| PS-TuP | Tuesday, October 21, 2008 6:30 PM | Plasma Science Poster Session |
| PS1-WeM | Wednesday, October 22, 2008 8:00 AM | Plasma-Surface Interactions in Materials Processing I |
| PS2-WeM | Wednesday, October 22, 2008 8:00 AM | Plasma Sources |
| PS1-WeA | Wednesday, October 22, 2008 1:40 PM | Fundamentals of Plasma-Surface Interactions II |
| PS2-WeA | Wednesday, October 22, 2008 1:40 PM | Plasma Diagnostics, Sensors, and Control I |
| PS1-ThM | Thursday, October 23, 2008 8:00 AM | Atmospheric Plasma Processing and Micro Plasmas |
| PS2-ThM | Thursday, October 23, 2008 8:00 AM | Plasma Modeling |
| PS1-ThA | Thursday, October 23, 2008 2:00 PM | Plasma Diagnostics, Sensors, and Control II |
| PS2-ThA | Thursday, October 23, 2008 2:00 PM | Plasma Deposition and Plasma Enhanced Atomic Layer Deposition and Etching |
| PS-ThP | Thursday, October 23, 2008 6:00 PM | Plasma Science Poster Session |
| PS1-FrM | Friday, October 24, 2008 8:20 AM | Plasma-Surface Interactions in Materials Processing II |
| PS2-FrM | Friday, October 24, 2008 8:20 AM | Plasma Processing for 3-D Integration, Photonics, Optoelectronics, and Memory Devices |