AVS 68 Atomic Scale Processing Focus Topic Sessions

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Topic Abstract Book
(704KB, Nov 18, 2022)
Topics | Time Periods | Schedule Overview

Session Code Start Session Name
AP+2D+AS+EM+PS+SS+TF-MoM Monday, November 7, 2022 8:20 AM Area Selective Processing and Patterning
AP+AS+EL+MS+SS-MoA Monday, November 7, 2022 1:40 PM Advancing Metrology and Characterization to Enable Atomic Scale Processing
AP+AS+EM+HI+PS+SS+TF-TuM Tuesday, November 8, 2022 8:00 AM Area Selective Processing and Patterning II
AP+PS+TF-TuA Tuesday, November 8, 2022 2:20 PM Thermal Atomic Layer Etching
AP-TuP Tuesday, November 8, 2022 6:30 PM Atomic Scale Processing Poster Session
Topic Abstract Book
(704KB, Nov 18, 2022)
Topics | Time Periods | Schedule Overview