AVS2009 Plasma Science and Technology Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| PS1-MoM | Monday, November 9, 2009 8:20 AM | Advanced Interconnect Etch |
| PS2+PV-MoM | Monday, November 9, 2009 8:40 AM | Plasma Processing for Photovoltaics |
| PS+MS-MoA | Monday, November 9, 2009 2:00 PM | Plasma Challenges at the 22nm Node and Beyond |
| PS1-TuM | Tuesday, November 10, 2009 8:00 AM | Advanced FEOL and BEOL Etch |
| PS2-TuM | Tuesday, November 10, 2009 8:00 AM | Atmospheric Plasma Processing and Microplasmas |
| PS-TuA | Tuesday, November 10, 2009 2:00 PM | Fundamentals of Plasma-Surface Interactions I |
| PS-TuP | Tuesday, November 10, 2009 6:00 PM | Plasma Science and Technology Poster Session |
| PS1-WeM | Wednesday, November 11, 2009 8:00 AM | Plasma Diagnostics, Sensors, and Control I |
| PS2+TF-WeM | Wednesday, November 11, 2009 8:00 AM | Plasma Deposition and Plasma-assisted ALD |
| PS1-WeA | Wednesday, November 11, 2009 2:00 PM | Plasma Modeling |
| PS2+MN-WeA | Wednesday, November 11, 2009 2:00 PM | High Aspect Ratio and Deep Etching for 3D Integration and Memory |
| PS1-ThM | Thursday, November 12, 2009 8:00 AM | Applications of Plasma-Surface Interactions |
| PS2-ThM | Thursday, November 12, 2009 8:00 AM | Plasma Sources |
| PS1-ThA | Thursday, November 12, 2009 2:00 PM | Fundamentals of Plasma-Surface Interactions II |
| PS2-ThA | Thursday, November 12, 2009 2:00 PM | Plasma Diagnostics, Sensors, and Control II |
| PS-ThP | Thursday, November 12, 2009 6:00 PM | Plasma Science Poster Session |
| PS-FrM | Friday, November 13, 2009 8:20 AM | Plasma Science for Medical and Biological Applications |