AVS2007 Plasma Science and Technology Sessions

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Topics | Time Periods | Schedule Overview

Session Code Start Session Name
PS1-MoM Monday, October 15, 2007 8:00 AM Plasma Modeling
PS2+MS-MoM Monday, October 15, 2007 8:00 AM Plasma Etching for Advanced Interconnects I
PS-MoA Monday, October 15, 2007 2:00 PM Plasma Processing for High k, III-V and Smart Materials
PS1+TF-TuM Tuesday, October 16, 2007 8:00 AM Plasma Enhanced Atomic Layer Deposition and Plasma Deposition
PS2-TuM Tuesday, October 16, 2007 8:00 AM Advanced Gate Etch
PS1-TuA Tuesday, October 16, 2007 1:40 PM Plasma Etching for Advanced Interconnects II
PS2-TuA Tuesday, October 16, 2007 1:40 PM Plasma Sources
PS-TuP Tuesday, October 16, 2007 6:00 PM Plasma Science and Technology Poster Session
PS1+NS-WeM Wednesday, October 17, 2007 8:00 AM Plasmas in Nanotechnology
PS2-WeM Wednesday, October 17, 2007 8:00 AM Plasma-Surface Interactions I
PS1-WeA Wednesday, October 17, 2007 1:40 PM Plasma-Wall Interactions
PS2-WeA Wednesday, October 17, 2007 1:40 PM Plasmas and Polymers
PS1-ThM Thursday, October 18, 2007 8:00 AM Plasma-Surface Interactions II
PS2-ThM Thursday, October 18, 2007 8:00 AM Plasma Diagnostics I
PS1-ThA Thursday, October 18, 2007 2:00 PM Plasma Diagnostics II
PS2+BI-ThA Thursday, October 18, 2007 2:00 PM Plasmas in Bioscience
PS-ThP Thursday, October 18, 2007 5:30 PM Plasma Science and Technology Poster Session
PS-FrM Friday, October 19, 2007 8:20 AM Plasma-Surface Interactions III
Topics | Time Periods | Schedule Overview