AVS2003 Plasma Science and Technology Sessions

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Topics | Time Periods | Schedule Overview

Session Code Start Session Name
PS-MoM Monday, November 3, 2003 8:20 AM Critical Dimension Etching
PS+MM-MoA Monday, November 3, 2003 2:00 PM MEMS Etching
PS-MoA Monday, November 3, 2003 2:00 PM Plasma Sources
PS+TF-TuM Tuesday, November 4, 2003 8:20 AM Plasma Enchanced Chemical Vapor Deposition
PS-TuM Tuesday, November 4, 2003 8:20 AM Plasma Diagnostics: Processing
PS-TuA Tuesday, November 4, 2003 2:00 PM Dielectric Etch
PS-TuP Tuesday, November 4, 2003 5:30 PM Poster Session
PS1-WeM Wednesday, November 5, 2003 8:20 AM Plasma Processing of Nanostructures and Nanomaterials
PS2-WeM Wednesday, November 5, 2003 8:20 AM Etching Difficult Materials
PS-WeP Wednesday, November 5, 2003 11:00 AM Poster Session
PS1-WeA Wednesday, November 5, 2003 2:00 PM Mechanisms in Plasma-Surface Interactions
PS2-WeA Wednesday, November 5, 2003 2:00 PM Atmospheric Plasmas & Micro Discharges
PS1-ThM Thursday, November 6, 2003 8:20 AM Plasma-Surface Interactions: Deposition
PS2-ThM Thursday, November 6, 2003 8:20 AM Low k Dielectric Etch
PS-ThA Thursday, November 6, 2003 2:00 PM Plasma Diagnostics: Mechanisms
PS-FrM Friday, November 7, 2003 8:20 AM Plasma-Surface Interactions: Etching
Topics | Time Periods | Schedule Overview