AVS1996 Plasma Science and Technology Division Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| PS1-MoM | Monday, October 14, 1996 8:20 AM | High Density Plasmas I |
| PS2-MoM | Monday, October 14, 1996 8:20 AM | Deposition I - PECVD |
| PS-MoA | Monday, October 14, 1996 1:30 PM | Oxide Etch I - Mechanisms |
| PS-MoP | Monday, October 14, 1996 5:30 PM | High Density Plasmas & Etching Poster Session |
| PS1-TuM | Tuesday, October 15, 1996 8:20 AM | Etch I |
| PS2-TuM | Tuesday, October 15, 1996 8:40 AM | Etching of III-V Materials |
| PS-TuA | Tuesday, October 15, 1996 2:00 PM | Pulsed Plasma Processing |
| PS-TuP | Tuesday, October 15, 1996 6:30 PM | Deposition and Plasma Ion Implantation Poster Session |
| PS+FP-WeM | Wednesday, October 16, 1996 8:20 AM | Plasma Processing Issues of Flat Panel Displays |
| PS1-WeA | Wednesday, October 16, 1996 2:00 PM | Oxide Etch II - Etch Stop |
| PS2-WeA | Wednesday, October 16, 1996 2:00 PM | High Density Plasmas II |
| PS-WeP | Wednesday, October 16, 1996 5:00 PM | Diagnostics, Fundamentals, Modeling, and ICF Poster Session |
| PS+BI-ThM | Thursday, October 17, 1996 8:20 AM | Deposition II - Biomaterials and Organics |
| PS-ThM | Thursday, October 17, 1996 8:20 AM | Etch II |
| PS1-ThA | Thursday, October 17, 1996 1:30 PM | Etch III |
| PS2-ThA | Thursday, October 17, 1996 1:30 PM | Deposition III - Metals and Sputtering |