ALD/ALE 2022 Atomic Layer Etching Sessions
Click a Session Code to view its Abstracts
Topic Abstract Book
(492KB, May 7, 2022)
Topics
| Time Periods
| Schedule Overview
| Session Code | Start | Session Name |
|---|---|---|
| ALE-SuP | Sunday, June 26, 2022 6:00 PM | Atomic Layer Etching Poster Session |
| ALE-MoM2 | Monday, June 27, 2022 10:45 AM | Thermal and/or Isotropic ALE I |
| ALE1-MoA | Monday, June 27, 2022 1:30 PM | Thermal and/or Isotropic ALE II |
| ALE2-MoA | Monday, June 27, 2022 3:30 PM | Plasma and/or Anisotropic ALE I |
| ALE-TuM2 | Tuesday, June 28, 2022 10:45 AM | Atomic Layer Cleaning (ALC), ALE Integrated with ALD, and Alternative ALE Approaches |
| ALE1-TuA | Tuesday, June 28, 2022 1:30 PM | In situ Studies, Mechanisms and Modeling of ALE |
| ALE2-TuA | Tuesday, June 28, 2022 3:30 PM | Plasma and/or Anisotropic ALE II |