AVS2014 Plasma Science and Technology Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| PS-MoM | Monday, November 10, 2014 8:20 AM | Current Challenges of Plasma Etching Technologies |
| PS-MoA | Monday, November 10, 2014 2:00 PM | Advanced FEOL/Gate Etching |
| PS-TuM | Tuesday, November 11, 2014 8:00 AM | Plasma Surface Interactions I |
| PS-TuA | Tuesday, November 11, 2014 2:20 PM | Advanced BEOL/Interconnect Etching |
| PS-TuP | Tuesday, November 11, 2014 6:30 PM | Plasma Science and Technology Poster Session |
| PS1-WeM | Wednesday, November 12, 2014 8:00 AM | Plasma Based Ion Implantation and Ion-Surface Interactions |
| PS2-WeM | Wednesday, November 12, 2014 8:00 AM | Plasma Modeling |
| PS+2D-WeA | Wednesday, November 12, 2014 2:20 PM | Plasma Processing for 2D Materials, Coating, and Surface Modification |
| PS-WeA | Wednesday, November 12, 2014 2:20 PM | Plasma Diagnostics, Sensors, and Control |
| PS1+TF-ThM | Thursday, November 13, 2014 8:00 AM | Plasma Deposition and Plasma Assisted ALD |
| PS2+TF-ThM | Thursday, November 13, 2014 8:00 AM | Atomic Layer Etching (ALE) and Low-Damage Processing |
| PS+SE-ThA | Thursday, November 13, 2014 2:20 PM | Atmospheric Pressure Plasma Processing; Fundamental and Applications |
| PS-ThA | Thursday, November 13, 2014 2:20 PM | Plasma Processing of Nanoparticles and Nanomaterials |
| PS1-FrM | Friday, November 14, 2014 8:20 AM | Plasma Sources |
| PS2-FrM | Friday, November 14, 2014 8:20 AM | Plasma Surface Interactions II |