AVS2012 Plasma Science and Technology Sessions

Click a Session Code to view its Abstracts

Topics | Time Periods | Schedule Overview

Session Code Start Session Name
PS+EM-MoM Monday, October 29, 2012 8:20 AM Atmospheric Plasma Processing and Micro Plasmas
PS-MoM Monday, October 29, 2012 8:20 AM Advanced FEOL/Gate Etching 1
PS+BI-MoA Monday, October 29, 2012 2:00 PM Applications of (Multiphase) Atmospheric Plasmas (including Medicine and Biological Applications)
PS2-MoA Monday, October 29, 2012 2:00 PM Plasma Modeling
PS1-TuM Tuesday, October 30, 2012 8:00 AM Plasma Diagnostics, Sensors and Control 1
PS2-TuM Tuesday, October 30, 2012 8:00 AM Advanced FEOL/Gate Etching 2
PS1-TuA Tuesday, October 30, 2012 2:00 PM Plasma Deposition and Plasma Enhanced ALD
PS2-TuA Tuesday, October 30, 2012 2:00 PM Plasma Surface Interaction during Plasma Etching
PS+TC-WeM Wednesday, October 31, 2012 8:00 AM Atmospheric Plasma Processing for PV, Flexible Electronics (incl. R2R)
PS-WeM Wednesday, October 31, 2012 8:00 AM Advanced BEOL/Interconnect Etching
PS1-WeA Wednesday, October 31, 2012 2:00 PM Plasma Diagnostics, Sensors and Control 2
PS2-WeA Wednesday, October 31, 2012 2:00 PM Plasma Surface Interactions during PECVD and Plasma Surface Modification
PS1-ThM Thursday, November 1, 2012 8:20 AM Plasma Processing for Disruptive Technologies (NVM, TSV, etc.)
PS2-ThM Thursday, November 1, 2012 8:00 AM Low Damage Processing
PS-ThA Thursday, November 1, 2012 2:00 PM Plasma Sources
PS-ThP Thursday, November 1, 2012 6:00 PM Plasma Science and Technology Poster Session
Topics | Time Periods | Schedule Overview