AVS2004 Plasma Science and Technology Sessions

Click a Session Code to view its Abstracts
Session Code Start Session Name
PS1-MoM Monday, November 15, 2004 8:20 AM Low-k Dielectric Etching
PS2-MoM Monday, November 15, 2004 8:20 AM Silicon Etching
PS1-MoA Monday, November 15, 2004 2:00 PM Plasma Surface Interactions in Etching
PS2-MoA Monday, November 15, 2004 2:00 PM Emerging Plasma Applications
PS-MoP Monday, November 15, 2004 5:00 PM Poster Session
PS1-TuM Tuesday, November 16, 2004 8:20 AM Dielectric Etching
PS2-TuM Tuesday, November 16, 2004 8:20 AM New Gate Conductor Etching
PS+MS-TuA Tuesday, November 16, 2004 1:20 PM 45nm Node with Panel Discussion
PS2-TuA Tuesday, November 16, 2004 1:20 PM Plasma and Polymers
PS-TuP Tuesday, November 16, 2004 4:00 PM Poster Session
PS1-WeM Wednesday, November 17, 2004 8:40 AM Plasma in Nanoscale Applications
PS2-WeM Wednesday, November 17, 2004 8:20 AM Plasma Sources
PS-WeA Wednesday, November 17, 2004 2:00 PM Plasma Diagnostics
PS-ThM Thursday, November 18, 2004 8:20 AM Atmospheric and Microdischarges
PS-ThA Thursday, November 18, 2004 2:00 PM Plasma-Surface Interaction
PS+BI-FrM Friday, November 19, 2004 8:20 AM Plasmas in Bioscience
PS1+DI-FrM Friday, November 19, 2004 8:20 AM High K and Difficult Materials Etch
Topics | Time Periods | Schedule Overview