AVS2001 Tuesday Afternoon

Sessions | Time Periods | Topics | Schedule Overview

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Session Tuesday, October 30, 2001
2:00 PM 3:00 PM 4:00 PM 5:00 PM
AS-TuA
Sputtering-induced Effects in Ultra Shallow Depth Profiling
Low Energy Ion-surface Interactions in Ultrashallow Profiling Investigated with In-situ Medium Energy Ion Scattering Spectroscopy
Low Energy Dual Beam Depth-Profiling: Influence of Sputter- and Analysis-Beam Parameters on Profile Performance using TOF-SIMS
Reference Materials for SIMS: Philosophy, Development, and Results
AT-TuA
Sustainable Semiconductor Manufacturing: Methods and Applications to Reduce the Environmental Impact of Chip Making
Reducing PFC Emissions from a Semiconductor Wafer Fab: Optimization of Chamber Clean Processes for the CVD Tool Set
AMD's Global Climate Protection Plan
BI-TuA
Surface Forces and Coating Properties Involved in Protein Repellency
Water-Uptake of Poly(ethylene glycol)-terminated Self-Assembled Monolayers during Film Formation
Novel PEO-containing Copolymers as Protein Repellent Additives In Polyurethanes: Evaluation of Protein Interactions by Radiolabelling, XPS and MALDI
Surface Modification of Poly(Vinyl Chloride) Intubation Tubes to Control Bacterial Adhesion
XPS-Mediated Robust Design Used to Optimize Hyaluronic Acid Surface Immobilization
Theoretical Prediction of the Enthalpic and Entropic Contributions of the Change in Gibbs Free Energy for Peptide Residue Adsorption onto Functionalized SAM Surfaces
DI-TuA
Post-deposition Densification of Yttrium Oxide High Dielectric Constant Insulators Deposited by Oxygen Plasma Assisted Chemical Vapor Deposition
Substitutional Effects of the Dielectric Constant in Ta2O5
Ta d-state Derived Electron Traps in non-Crystalline Al2O3-Ta2O5 Alloys Prepared by Remote PECVD
Angle-Resolved XPS and Auger Analysis of Ultra-Thin Al2O3 Films Deposited by Atomic Layer Deposition
In-situ, Real Time Studies of Interface Formation of BST Thin Films on Si Substrates
Direct Observation of Atomic Disordering at the SrTiO3/Si Interface Due to Oxygen Diffusion
Core-level Photoemission of High-K Dielectrics on Si Substrates
Quadrupole Mass Spectrometer Studies of a High Temperature Etch Process
Spectroscopic Ellipsometry Characterization of High-k Dielectric Thin Films
MI+
III-V Based Epitaxial Magnetic Heterostructures: Large Tunneling Magneto-Resistance
Spin Filtering and Tunneling Magnetoresistance in Double Barrier Magnetic Heterostructures
Magnetotransport in Digital Ferromagnetic Heterostructures
Theoretical Band Offsets in Magnetic Semiconductor Heterostructures: CdCr2Se4 on Si and GaAs
Effects of Interface Structure and Chemistry on Spin Injection Efficiency in Spin-LEDs
Recent Developments in Spin Electronics
Structural and Optical Characterization during Growth of Co on Ga1-xInxAs(001)
Structural and Magnetic Characterization of the FexCo1-x / GaAs(100) Interface
MS-TuA
Plasma Etch Endpoint and Diagnostic Fault Detection Using Evolving Window Factor Analysis
Characterization of Pattern Transfer from Litho to Etch Using Scatterometry
Chamber Wall Monitoring and Control for Plasma Etching Reproducibility
Integrated RF Sensor for Accurate Control and Monitoring of on Wafer Process Performance
Fault Identification and Classification using a Plasma Impedance Monitor
Real-Time CVD Wafer State Metrology using a Downstream Acoustic Sensor
Thickness Metrology and Real-Time End Point Control in W CVD using in-situ Mass Spectrometry1
In-situ FTIR Spectroscopy for Metrology of a Tungsten CVD Process
New Mass Spectrometer without Fragment Ions for CVD In-situ Monitoring
NS-TuA
Nano-scale Science by Means of UHV Electron Microscopy
Tunneling Spectroscopy of Superconducting Quasiparticles by Scanning Tunneling Microscope with a Bulk NbN Tip
Demonstration of a Tunable Bistable Tunnel Device with a Low Temperature STM and a Self-organized Ga Array on Si(111)1
Theory and Perspective of the Spin-Polarized STM
Charge Imaging of Electrons and Holes Trapped in Gate Oxides and at the Oxide-silicon Interface
'Artifact-free' Electrostatic Force Measurement using Noncontact Atomic Force Microscopy
Scanning Impedance Microscopy: From Impedance Spectra to Impedance Images
PS1-TuA
Gas Phase and Surface Diagnostic Measurements of High-density Plasma-based Etching Processes for Dielectrics Based on C4F8 Gas Mixtures with Ar, O2 and N2
A 0.09µm-capable Plasma Etching of Dielectrics and its Reaction Mechanism
Plasma Etching Chemistry and Kinetics for Silicon Oxide Thin Films
Oxide Etch Behavior in an Inductively Coupled C4F8 Discharge Characterized by Diode Laser Spectroscopy
Characterization of Hydrofluorocarbon Reactants for Selective Silicon Nitride Plasma Etch Applications
Modeling of SiO2 Feature Etching in Fluorocarbon Plasmas: The Effect of Gas Phase Composition on Aspect Ratio Dependent Phenomena
Inductively Coupled Plasma Etching for Arrayed Waveguide Grating Fabrication in Silica on Silicon Technology
PS2+
Mechanisms Involved in the PECVD of Thin Films in Low Pressure Organosilicon Plasmas
Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition (ECR-PECVD) of ZrO2 on Silicon
Deposition of a-C:H Films: Plasma Chemistry and Material Properties
Study of SiOxNy Films Deposited by Radio-Frequency Plasma Assisted Electron Cyclotron Resonance
An In Situ Study of the Interactions of Atomic Deuterium with Hydrogenated Amorphous Silicon Thin Films Using Multiple Total Reflection Fourier Transform Infrared Spectroscopy
A New and Fast In-situ Spectroscopic Infrared Absorption Measurement Technique for Submonolayer Detection at High Growth Rate
Reaction Mechanism of PECVD to Produce Low Dielectric Constant Thin Films
SC-TuA
Characterization of SiGe/Si Heterostructures with Abrupt Interfaces
Indium Segregation and its Effect on Interfacial Bonding at the GaSb-on-InAs Heterojunction: A Cross-Sectional Scanning Tunneling Microscopy Study1
Dislocations and Microstructure Evolution in Semiconductor Thin Films
The Strain Relaxation Mechanism of SiGe Growth with a Low Temperature Si Buffer Layer by Molecular-beam Epitaxy
Heteroepitaxy of Highly Mismatched Systems and the Role of Coincidence Lattice
Nanoscale Dislocation Patterning in PbTe/PbSe (001) Lattice-mismatched Heteroepitaxy
STM-Controlled Epitaxy of Cobalt-Semiconductor Compounds
Electron-beam Patterning of Cobalt Fluoride on 10-nm Length Scale
SC+
Nanoparticles for Fabrication of Zero- and One-dimensional Quantum Objects
Growth of Ag Nanowires on Atomically Flat Ag films Formed on GaAs(110) Surfaces
Ge Nanoclusters Prepared from Solution with Chemically Tailored Surfaces
X-Ray Absorption and Emission Studies of Diamond Nanoclusters
AFM Tip-mediated Nucleation and Growth of Passivated Au Nanocrystal Islands
Chemically Enhanced Electron Beam Induced Micromachining of SiO2
Surface Passivation Effects of Deposited Ge-Nanocrystal Films Probed with Synchrotron Radiation
Surface Nanostructuring by Ion Sputtering: The Early Stages
SE-TuA
Microstructure and Mechanical Properties of Zr-Si-N Films Prepared by r.f.- Reactive Sputtering
Characterization of CrBN Films Deposited by Ion Beam Assisted Deposition
Thin Film Growth by Physical Vapor Deposition in the Presence of Residual Gas
Boron and Boron-Based Coatings as Produced by Vacuum Arc Technology
Ion-bombardment Induced Phase Transformation of Cubic Boron Nitride Studied by Reflection Electron Energy Loss Spectroscopy
Cubic Boron Nitride Thin Films Deposited on Steel Substrates With Different Interlayers
Industrial Laser-Arc Coater for the Deposition of Superhard Amorphous Carbon Films (Diamor)
Deposition of Diamondlike Carbon by Magnetic Pole Enhanced Inductively Coupled Plasma
SS-TuA
Scanning Tunneling Microscopy Study of the Reduced Fe3O4(111) Terminated Selvedge on a Natural Single Crystal α-Fe2O3(0001) Surface: Termination and Surface Reaction with Carbon Tetrachloride
Photo-catalytic Reactions of Organic Molecules Over TiO2(001) Single Crystal - Effect of Surface Structure
Semiconductor Photocatalysis over Titanium Dioxide
Valence Band Photoemission from Pure and Sr Diffused Single Crystal Anatase TiO2(001) Surfaces
Surface Investigations of TiO2 Anatase (101)
Characterization of Surface Defects on Flat and Porous MgO Surfaces
A Study of the Surface Reconstruction of Fe3O4 (100) Using Antiferromagnetic Tips
Characterization of Copper Oxides Formed by Thermal and Plasma Oxidation Using Linear Sweep Voltammetry, Galvanostatic Reduction and XPS
The Surface Kinetics of the Initial Stages of Metal Oxidation Visualized by In situ UHV-TEM
SS+
Self-Assembling Monolayers and Thin-Film Templates - Driven Assembly of Functional Organic Structures
Adsorption and Photoinitiated Chemistry on Organic-functionalized Semiconductor Surfaces
Photoinduced Processes in Self-Assembled Monolayers on Semiconductor Surfaces
Organic Monolayers on Silicon and Silica Surfaces Via Covalent Linkages
Study of Alkylsilane Monolayers Islands on Mica in the Presence of Water
"Interphase" Liquid Structure and Interfacial Forces
Alkanethiols on Copper Single Crystal Surfaces
Electro-Rheology of Liquid Hexadecane Near a Au Surface
TF-TuA
Mechanical Properties and Stresses in Ion-Assisted Thin Films
Growth of Highly-Oriented CeO2 Layers on Glass Substrates for High-Quality Poly-Si Overlayer Formation
Thin Film Growth of Reactive Sputter Deposited Tungsten-Carbon Thin Films
Reactive Sputter Deposition of Tungsten Nitride Thin Films
The Impact of Residual By-Products from Tungsten Film Deposition on Process Integration due to Non-Uniformity of the Tungsten Film
Thermal Stability of Arc Evaporated Ti1-xAlxN Thin Films
Evolution of Ti-3Al Film Structures and its Effect on Film Properties
Surface Structural Anisotropy in Sputter and Electrolytic Deposited Tantalum Films
VST-TuA
Calculated Energy Transfer in an Accommodation Pump
Rapid Modelling of Molecular Flow in Steady-State Arbitrary Geometries
Edison's Vacuum Technology Patents
Sessions | Time Periods | Topics | Schedule Overview