AVS1998 Tuesday Morning
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
| Session | Tuesday, November 3, 1998 | ||||||||||
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| 8:20 AM | 9:20 AM | 10:20 AM | 11:20 AM | ||||||||
| AS-TuM |
Using a Focused Beam XPS System for Analysis of Oxides, Insulators and Beam Sensitive Materials1
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Implementation and Application of a Ag Lalpha Monochromatic Source on a Magnetic Lens Based Spectrometer
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The Good and the Bad About XPS Peak Fitting
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Auger Depth Profiling at Extreme Low Ion Energy
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Sample Preparation and Practical Surface (and Interface) AnalysisTricks of the Trade
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Physical Influences on Chemical Identification using TOF-SIMS
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SEM Sample Preparation Using Ion Sputtering
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The Correlation Between Ion Beam/Material Interactions and Practical FIB Specimen Preparation
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Use of Micro-Craters and Extended Rotational Profiling for Auger Analysis of Difficult Samples
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Two-Dimensional Surface Roughness Measurements of Sidewalls of High Aspect Ratio Patterns Using the Atomic Force Microscope
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| BI-TuM |
Gated Ion Channel Devices within Synthetic Tethered Membranes
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Interaction of Lipid Vesicles and Cell Membranes with Alkylthiol Monolayers
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Stabilizing Supported Lipid Bilayers for Biomaterial Applications
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Patterning Multiple Antibodies onto a Surface
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Biological Applications of Colloidal Au-Amplified Surface Plasmon Resonance
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Structure of Single- and Double-Stranded DNA Monolayers on Gold from Neutron Reflectivity
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XPS Analysis of Oligonucleotides for DNA Microarrays
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Multifunctional Molecular Multilayer Assemblies for Reagentless, Fluorescence-Based Biosensing
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| EM+ |
Gallium Nitride Structures for High Power Microwave Amplification
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HfN Films Grown on GaN by Reactive MBE using Ammonia1
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Investigation of Metal / GaN Interface Properties using Photoemission Spectroscopy and I-V Measurements
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Mg Doping Studies of ECR-MBE GaN Thin Films
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Deposition of AlN Gate Dielectrics
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Progress in SiC: From Material Growth to Commercial Device Development
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Critical Development Issues for Deep (10 to 100 µm) Etching of SiC
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Thermochemical Stability of Plasma-Deposited Silicon Oxycarbide Thin Films Subjected to Post-Deposition Rapid Thermal Annealing
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| MM+ |
Making a Bridge to the Nanoworld
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Nanotribology of Vapor-Phase Lubricants and Their Potential Applications to MEMS1
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Vacuum Deposited Fluorinated Alkyl Siloxane Films for Adhesion Control in MEMS Devices
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Adhesion Hysteresis of Polysilicon Beams in Controlled Humidity Ambients
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| MS-TuM |
Reaction/Annealing Pathways for Forming Ultrathin Silicon Nitride Films for Composite Oxide-Nitride Gate Dielectrics with Nitrided Crystalline Silicon-Dielectric Interfaces for Application in Advanced CMOS Devices
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Process Mixing in Cluster Tools
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Process Integration Overview: Development and High Volume Manufacturing of Microprocessor Products
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Value Chain Integration
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Factory Integration in the NTRS: Future Factory Level Issues and Needs
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| NS-TuM |
Quantum-Dot Cellular Automata
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A Proposal of Atom/Molecule Switching Devices
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Self-Assembled Single Electron Tunneling Devices
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Quantum Transport in Metallic Nanowires Fabricated by Electrochemical Deposition/Dissolution
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Conductance of Molecular Junctions
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Carbon Nanotubes: Manipulation, Properties and Functional Electronic Devices
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Simultaneous Study of the Formation and Conductance of Single Wall Carbon Nanotube at STM Tunnelling Gap by Transmission Electron Microscopy
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| OE+ |
UV Photoemission Study of Interfacial Electronic Structures of Organic Materials
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Electronic Structure of Molecular Organic Semiconductor Metal Interfaces
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Interface Dipoles and Band Bending in Organic Semiconductor Interfaces
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Molecular Level Offsets at Organic Semiconductor Heterojunctions
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Interface Analysis of Naththyl-substituted Benzidine Derivative and tris-8(hydroxyquinoline) Aluminum Using Ultraviolet and X-Ray Photoemission Spectroscopy
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Vapor Deposition Polymerization of 4-fluorostyrene and Pentafluorostyrene
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Growth and Characterization of Polyaniline Thin Films on Metal Substrates
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Tapping Mode Near-Field Scanning Optical Microscopy of Molecular Crystals and Thin Films
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Morphology and Relaxation Dynamics in Thin Organic Films Probed by Femtosecond Time-Resolved Photoemission Spectroscopy
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XPS and ISS Studies of Cu Deposited onto Acid-terminated Self-Assembled Monolayers
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| PS1-TuM |
Simulation of a Pulsed-Power Inductively Coupled Chlorine Plasma
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Fluorocarbon Film Composition and Reactor Effluent from Pulsed PECVD of Difluoromethane, 1,1,2,2-Tetrafluoroethane, and Hexafluoropropylene Oxide
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Surface Composition and Reactivities of Fluorocarbon Radicals from Pulsed Fluorocarbon Plasmas
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Pitting-Free Gate Etching by Lowering Bias Frequency in Pulsed ECR Plasma with a Divergent Magnetic Field
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Pulse-Power Hollow Cathode
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Diagnostics of Pulsed Plasmas, and the Use of Pulsed Plasmas as a Diagnostic Tool
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Pulsed Plasma Processing with Helicons
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Very High Density Helicon Mode Operation in WOMBAT
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An Overview of Ion-Ion Plasmas for Semiconductor Processing1
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| PS2-TuM |
Very Uniform and High Aspect Ratio Anisotropy SiO2 Etching Process in Magnetic Neutral Loop Discharge Plasma
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Microloading Effect in Ultra-Fine SiO2 Hole/Trench Etching
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Selective Oxide Etching in a High-Density Plasma Reactor: Gas Phase Chemistry
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Analysis of C4F8/Ar/O2 Plasma for High-aspect Contact Hole Etching using Narrow-gap RIE
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Plasma Kinetics of Silicon Dioxide Etching with Fluorocarbon
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Effect of Ion Bombarding Energies in Silicon Dioxide Etching
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Studies of High Density Oxide Etch Mechanisms with a Physically-based Profile Simulator
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The Challenge of Predictive Profile Simulators for Dielectric Etch
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Control of Profile in High Aspect Ratio Contact and Via Etch
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| SS1-TuM |
Effect of Tensile Strain on B-type Step Energy on Si(001)-(2x1) Surfaces Determined by Switch-Kink Counting
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Geometry, Energetics, and Electronic Structure of the Dimer Reconstruction on the Carbon, Silicon and Germanium (100) Surfaces
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An Atom-Resolved Dynamical Study of Hydrogen Diffusion on the Si(100) Surface
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Ultra-high B and As Doping during Si(001) Gas-Source Molecular Beam Epitaxy: Growth Kinetics, Dopant-Incorporation, and Electrical Activation
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Scanning Tunneling Microscopy of B/Si(001)
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Halogens Adsorbed on the Ga-rich c(8x2) GaAs(001) Surface: Adsorbtion Sites, Mobility and Overlayer Structure
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The Role of Dimer-Stacking-Fault Structures in Si(111) Etching
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The Structure of Ge Surfaces from (001) to (111)
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Structure of Arsenic-Passivated Germanium (100)
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STM of Tl Overlayers on Si(111): Structures of a "New" Group III Element
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| SS2-TuM |
Microfabrication and Evaluation of Supported Model Catalysts
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Chemisorption and Kinetic Studies of Model Low-Temperature CO Oxidation Catalysts: Au/TiO2(110)
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Monte Carlo Simulations of Catalytic Reactions on Nanometer-sized Particles
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Ab Initio Density-Functional Theory Study of CO Oxidation Over Ru(0001)
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The Effect of Strain on the Reactivity of Metal Surfaces
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In-situ Investigation of the Catalytic Reaction 2 H2 + O 2 ≥ 2 H2O on Pt(111) with Second Harmonic Generation
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Suppression of Water Formation by Adsorbed Gold on Pt(335)
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Isothermal Kinetic Study of the Catalytic Reduction of Nitric Oxide over Rh(111) Surfaces
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Surface Species and Desorption Products from NO Exposure on Clean and (Rh,Pt) Loaded Surfaces of Highly Oriented CeO2 Characterized by SXPS and TPD
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An Investigation of the NOx Storage Mechanism
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| TF-TuM |
Thin Film Media Requirements in Ultrahigh Density Magnetic Recording
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Molecular Dynamics Analysis of Energy Modulated Deposition of Model GMR Materials
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Obtaining Optical Constants of Thin GexSbyTez Films from Measurements of Reflectance and Transmittance
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Process Monitoring of Hemispherical-Grained Polysilicon Thin Films for DRAM Applications
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Atomistic Scale Modeling of Ion Assisted Deposition of GMR Multilayers
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Thin Film Gas Sensors Based on Metal Oxides
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A Study of Thermally-Defined Gas Sensing Films on Micromachined Arrays
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Germanium Films and Their Application in Cryogenic Temperature Sensors
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Characterization of Sol-Gel Prepared WO3 Thin Films as a Gas Sensor
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| VM+ |
Deposition, Structure, and Properties of Superlattice Thin Films
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In-situ and Ex-situ Ellipsometric Analysis of Cr, CrN, Cr2N Thin Films
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AlN/cBN Magnetron Sputtering: Effects on Adhesion and Phase Stabilization
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Energetics of Cubic Boron Nitride Deposition
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Deposition and Characterization of Ultra Thin CNx Films as a Thin-Film Disk Overcoat
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Carbon and Carbon Nitride Films Prepared by Low-Energy, Isotopically-Mass-Separated, Negative C2- and CN- Ions
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Investigation on Multilayered Chemical Vapor Deposited Ti/TiN Films
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Chemical Vapor Deposition of Metal (Ti) and Ceramic (TiO2, TiN) Thin Films via Gas-Phase Reaction of Titanium Tetrachloride and Sodium Metal Vapor
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Low Energy Ion Beam Deposition of Oriented Diamond Microcrystallites
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| VT-TuM |
Performance of Molecular Drag Pumping Stages in Hybrid Turbopumps
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Turbodrag Pump Technologies
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Pumping Mechanism of Helical Grooved Molecular Drag Pumps
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Measurements Illustrating the Importance of Desorption and Molecular Residence Times on the Molecular Drag Process
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Improved Design of a Multi-Groove Vacuum Pump Compressing Directly to the Air
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Matching of Turbine Stages to a Drag Stage under Viscous Flow Conditions
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Flow Investigation of Siegbahn Pump by CFD Methodology
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Performance of a Peripheral Drag Pump
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Development of New Generation Turbo Molecular Pump
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Power Dissipation in Turbomoleculars Pumps at High Pressure
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