ALD/ALE 2025 TuM Sessions , Tuesday, June 24, 2025 8:00 AM
Tuesday Morning
Abstract Timeline | Time Periods | Topics | Schedule Overview
Click a Session Code to view its Abstracts
Session Code | Topic | Session Name | Room |
---|---|---|---|
AA1-TuM | AA | Memory Applications II | Tamna Hall A |
AA2-TuM | AA | EUV and Patterning Applications | Tamna Hall A |
AF2-TuM | AF | Mechanism and Theory II | Halla Hall AB |
AF3-TuM | AF | Precursor Chemistry II | Tamna Hall B |
AF1-TuM | AF | Mechanism and Theory I | Halla Hall AB |
ALE1-TuM | ALE | Thermal Gas Phase ALE | Samda Hall AB |
ALE2-TuM | ALE | ALE Applications I | Samda Hall AB |
EM-TuM | EM | Molecular Layer Deposition & Hybrid Materials I | Tamna Hall B |