ALD/ALE 2024 TuM Sessions , Tuesday, August 6, 2024 8:00 AM
Tuesday Morning
Abstract Timeline | Time Periods | Topics | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Topic | Session Name |
|---|---|---|
| AA1-TuM | AA | Applications in ULSI BEOL: Interconnects, Diffusion Barriers, & DRAM |
| AA2-TuM | AA | Energy: Solar Energy Materials I |
| AF1-TuM | AF | Precursors and Chemistry: Precursor Design, New Precursors, Process Development II |
| AF2-TuM | AF | Growth and Characterization: Plasma Enhanced ALD I |
| ALE1-TuM | ALE | ALE Applications and Methodologies |
| ALE2-TuM | ALE | Thermal Gas-phase ALE |
| AM-TuM | AM | Equipment Design, Precursor Delivery, and Spatial/R2R/Fast ALD |
| AS-TuM | AS | Selective ALD |