AVS 69 Monday Afternoon

Chemical Contrast by Nitridation for Improving Atomic Layer Etching Selectivity in Interconnect and EUV Absorber Applications

Anisotropic and Selective Atomic Layer Etching of Ruthenium

Mechanisms and Benefits of Cryogenic Processes in Silicon Based Material Atomic Layer Etching

Damage Formation Analyses of Steady Plasma-Enhanced Atomic Layer Etching for Silicon Nitride with Molecular Dynamics Simulations

Orientation Dependent Etching of Silicon: A Computational Chemistry Study

Process Drift of SiO₂ Atomic Layer Etching in HFC and FC/Ar Chemistries by Optical Spectroscopy and Surface Chemistry Analysis

Atomic Layer Etching of Superconducting Titanium Nitride Thin Films Using Molecular Oxygen and H₂/SF₆ Plasma

Quasi-Atomic Layer Etching of X-Cut MgO-Doped Lithium Niobate Using Sequential Exposures of H₂ and SF₆ Plasma

Mixing Things Up to Reduce Mix Ups in Lipid and Fatty Acid Analysis

Native State Physicochemical Characterisation of Drug Delivery Hydrogels using Cryo-OrbiSIMS and SEM

Molecular Characterization of Cells and Bio-interfaces using SIMS: The Foreign Body Reaction

Elucidating of Native Macromolecule Structure in Cryo OrbiSIMS

Comparing Desalination Methods of Bacterial Biofilms for Static ToF-SIMS Analyses

Low Fouling Marine Coatings Based on Nitric Oxide-Releasing Polysaccharide-Based Hybrid Materials

Underwater Adhesives Through Chemically-Induced Protein Aggregation

Analysis of a Pharmaceutical Formulation using Orbitrap-SIMS

In situ Spectroscopies of Interfacial Reactions and Processes in Batteries

Novel Strategies for the Characterization of the Next-Generation Energy Storage Materials by ToF-SIMS: From an in-Situ Exploration to an Operando Measurement

Advanced In-Situ and Ex-Situ S/TEM Probing of Interfacial Process in Rechargeable Batteries

Investigating sp² and sp³ Carbon Ratios by XPS: A Study of the D-Parameter and a New Second Plasmon Loss (2PL) Parameter

Solid-Liquid Interfaces for Energy-efficient Chemical Separation of Critical Minerals and CO₂ Conversion

Buried Interfaces of Ir Photodetector Devices Analyzed with Lab-Based Xps/Haxpes

Detection and Discrimination of Aquatic Toxins Targeting Voltage Gated Sodium Channels Using Static ToF-SIMS Imaging

Enhancement of Electron Effective Mass in Semiconductor Materials and 2DEGs Revealed by THz Optical Hall Effect

In Situ and Real Time Spectroscopic Ellipsometry of Polycrystalline CuInSe₂ Co-Evaporation for Narrow Bandgap Photovoltaic Absorbers

Anisotropic Optical Properties of GdScO₃

Combined Density Functional Theory and Spectroscopic Ellipsometry Studies of Anisotropic Materials

Advancing Metrology in Semiconductor Manufacturing: Challenges and Novel Ellipsometry Techniques

Mid-Infrared Ellipsometry for High Aspect Ratio Semiconductor Process Control Applications

The Role of Co-Adsorbed Water in Decomposition of Oxygenates

Integrating First-principles Modeling and AP-XPS for Understanding Evolving Complex Surface Oxides in Materials for Hydrogen Production and Storage

Applications of NAP XPS in Pharmaceutical Manufacturing: Surface Analysis, Hydrogen Bonds, and Solute-Solvent Interactions

The Change of DNA and Protein Radiation Damage Upon Hydration: In-Situ Observations by Near-Ambient-Pressure XPS

Integrated Nanophotonics Temperature Metrology Platform

AVS Dorothy M. and Earl S. Hoffman Scholarship Recipient Talk: Breaking the Efficiency Bottleneck of Micro-LEDs Through Nanoscale and Excitonic Engineering

Modeling Gas Phase Etching in High Aspect Ratio Stacked Nanostructures for Semiconductor Processing: Stacked SiGe Layer Etching

Fabrication of Silicon Microfluidic Gratings for Neutron Imaging

The Small Shift Matters – Submilliradian Tilt Goniometry in Scanning Electron Microscopy

On Point – Accurate Integration of Quantum Dots and Bullseye Cavities

Nanostructured Gas Sensors for the Detection of Meat Spoilage

From Natural to Fabricated Gas Sensing Photonic Nanostructures: Unexpected Discoveries and Societal Impact

Argon-Plasma Dry Etch of sub-Micron Feature-Size Waveguides in Thin-Film Lithium Niobate

On the Influence of the Target Material on the Discharge Properties of the High Power Impulse Magnetron Sputtering Discharge

Numerical Analysis of Curling Probe Designing for an Effective Electron Density Measurement in Plasma

Annular Beam Confocal Laser-Induced Fluorescence Diagnostic for Measurements of Ion Velocity Distribution Function in Industrial Plasmas

Control of Electron Energy Distribution Function in Electron Beam Generated ExB Plasma

Expanding the Capabilities of Microwave Hairpin Resonator Probes

Time-Resolved Electron Energy Distribution in a Multi-Frequency Capacitively Coupled Plasma Reactor

Mass Spectral Characterization and Control of Plasma Etch Processes

Development of a Catalytic Probe for the Detection of Fluorine Radicals with Applications to Semiconductor Manufacturing

Multi-Diagnostic Investigation of Etching Plasma Species in an Industry-Grade Inductively-Coupled Plasma Etcher

Hole-Based, Atomic-Scale Quantum Devices in Silicon

Interface Loss Engineering for High Coherence Aluminium Qubits

Examine the Electrical Transport Properties of Superconducting Quantum Devices Based on PtSi

Two Architectures for Superconducting Quantum Processors with Tunable Couplers

Quantum Device Formation in Silicon via Ion Implantation

Quantum Technology Manufacturing Roadmap v1.0

Cryogenic Properties of Discrete Electronic Components for Use in Quantum Measurement Circuits

Mini-Module Stress Testing to Assess ‘Fatigue-Like’ Failure Mode of Gridlines on Silicon Solar Cells

Relating Stress in Thin Films to the Underlying Kinetic Processes: Experiments and Modeling

Tailoring the Tribocorrosion Resistance of Al-based Metallic Thin Films via Alloying and Nanolayering

Tribological Properties of Conversion Layers and Carbon-based PVD Coatings for Rolling Bearing Applications

The Tribological Behaviour of TiAlN Coating Under High-Temperature Conditions

Atomic Layer Deposition Coatings on Micron-Sized Iron Powders for Increased Oxidation Resistance

Characterizing the Composition, Structure, and Mechanical Properties of Titanium Silicon Nitride Erosion Resistant Coatings

Spin- and Alignment-Controlled O₂ Chemisorption and Catalytic CO Oxidation on Stepped Pt and Pt/Co Alloy Surfaces

Atomic-Scale Insights Into the Sintering Resistance and Oxidation of Single-Atom Alloys

Visualization of the Local Dipole Moment at the Si(111)-(2x2) Surface Using DFT Calculations

Mechanism Study of a Chemisorbed O₂ Molecule on Ag(110) Induced by High-Order Overtone Excitation Using STM

Characterization of Oxygen Evolution from Rh(111)

Spin-Polarized VLEED from Au(111): Surface Sensitivity of the Scattering Process

Unravelling the Chemisorption Mechanism of Epoxy-Amine Coatings on Zr-Based Converted Galvanized Steel by Combined Static XPS/ToF-SIMS Approach

Fermi Surface Emergence and Valence Band Maximum Formation During Li_XCoO₂ Insulator-to-Metal Transition

Nanoscale Hydrogen Detection Using Time-of-Flight Secondary Ion Mass Spectrometry

Cesium Intercalation of Graphene: A 2D Protective Layer on Alkali Antimonide Photocathode

On Ground and In-Orbit Decontamination Strategies for Space Hardware

Helium Permeation Through Zerodur Glass

Improvement and Verification of Modified Knudsen Equation to Calculate the Gas Flow Rate through a Cylindrical Tube in Various Flow Regimes

Dirty Vacuums - To Contamination and Beyond

Outgassing Studies of A36 Mild Steel