AVS2016 Monday Afternoon

Sessions | Time Periods | Topics | Schedule Overview

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Session Monday, November 7, 2016
1:40 PM 2:40 PM 3:40 PM 4:40 PM
High-k Dielectrics on WSe2 by Ozone-based Atomic Layer Deposition: An In-situ XPS Study
A Two-step Atomic Layer Etching on MoS2 Realized by Remote O2 Plasma
Engineering the Atomic Structure of 2D Transition Metal Dichalcogenides using Electron Beam: Experiments and Simulations
New Computational Tool for Electron Localization: Application to Low-dimensional Monolayers of h-BN and MoS2
Effects of helium-ion beam irradiation on opto-electrical properties of multi-layers WSe2
CO2 Adsorption Kinetics on Nitrogen Doped Graphene and Graphite
Electronic Structure of Metallic Twin Grain Boundaries in Monolayer MoSe2
A Multi-technique Approach for Studying the Effect of Protein G B1 Orientation on Antibody Binding
ME-SIMS Revisited: Attempting to Unlock the Potential using Advancements in Sample Preparation and SIMS Technology
Improvements in SIMS Methods and Instrumentation in Effort to Make Measurements Biologists Can Use
Towards Bacterial Differentiation with Quantitative SIMS
New Insights into the Microenvironment of Cancerous Tissue by Combined Mass Spectrometry, Microscopy and Multivariate Analysis
Super-resolution Mass Spectrometry Imaging of Biological Materials with the New 3D nanoSIMS
High-resolution, Sub-cellular Imaging of Pharmaceutical Localization by Correlative SIMS and TEM
Sub-Micron Imaging and Identification of Molecular Chemistry by TOF-SIMS Parallel Imaging MS/MS
ALD Gate Dielectrics for GaN HEMTs
Advances in High-k Dielectric Integration with Ga-polar and N-polar GaN
Effects of Surface Cleaning and Different Metals as Schottky Contacts to Bulk and Epitaxial β-Ga2O3
Deep Traps in Wide Bandgap Semiconductors: From GaN to beta-Ga2O3
Study of Oxygen and Moisture Effect on Device Instability of Bottom-Gate ZnO Transistors with Sol-Gel Derived Channel Layers
Depth Dependent Modification of Optical Constants Arising from H­+ Implantation in n-type 4H-SiC Measured using Coherent Acoustic Phonons
Electrical and Thermal Stability of ALD-TiN Schottky Gates for AlGaN/GaN HEMTs
Spectroscopic Photo Current Voltage Measurements to Investigate Non-uniform Defect Distributions in AlGaN/GaN HEMT Hetererostructures
Bi­1Te1: A New Dual Topological Insulator
Spin-Polarized Scanning Tunneling Microscopy of a Two-Dimensional Ferromagnetic Semiconductor at Room-Temperature
Spin-Orbit Induced Surface States of Rashba Systems and Topological Insulators
Spin-Resolved Momentum Microscopy of Strongly Correlated Electron Systems and Topological Insulators
Spin-orbit-Induced Effects in the Electronic Structure of W(110) and Ta(110): Similarities and Differences
Formation of a 2D Interface by Low Energy Proton Implantation in ZnO Microwires
Density Functional Studies of Magnetic and Spintronic Materials
Metrology of Laser-based Powder Bed Fusion Additive Manufacturing Systems
Investigation of Superconductive Heavily Doped Boron Diamond for Device Fabrication
Two-Dimensional Layered Materials For Composites Applications
AIM Photonics – Manufacturing Challenges for Photonic Integrated Circuits
Development of III-Nitrides for Energy Harvesting Applications
The Effects of N Incorporation in GaAsSb/GaAs Core-shell Nanowires
Exploitation of Microwave Interaction and Photoconductive Effects in TiO2 Nanotube/Nanowire Arrays for Use in Light Harvesting and Sensing Devices
Next Generation Photovoltaics from Solution-processed Quantum Dot Assemblies
Negative Index and Hyperbolic Metamaterials: Into the Ultra-Violet
Probing Sub-5 nm Gap Plasmon Using Collapsible Nano-fingers
Strong Near-Field Coupling of Plasmonic Resonators Embedded in Si Nanowires
Atmospheric Plasma Deposition of Antimicrobial Nano-Coatings on Biomedical Textiles
Plasma Polymers for Biomedical Applications
Plasma Coating Using Biologics: Degradation or Polymerisation?
Low and Atmospheric Pressure Plasma Polymerization for Immunosensing and Tissue Engineering
Low-Temperature Plasma Processing of Polymeric Materials for Biomedical Applications
Plasma-based Functionalization of Polystyrene Surfaces of Cell Culture Plates
The Search for New Multi-Pattern Etch Colors: Usual (SiO2, SiN, SiC) and Unusual (hi-k, BN, BC:H) Suspects
An Investigation into the Mechanism of High Selectivity SiOx and SiNx Dielectric Etching
The Impact of Highly Selective Dielectric Etches on Etch Stop Layers
Plasma Etching of High Aspect Ratio Contacts in SiO2 using Ar/C4F8/O2 Mixtures: A Computational Investigation
BEOL & Interconnect Challenges in Memory Scaling
Control of Uniformity and Ion Energy Distributions in Tri-frequency Capacitively Coupled Plasmas Accounting for Finite Wavelength Effects
Metal Etch Mechanisms Using NHx and CN-based Chemistry
The Impact of Gate Overlap on Self-Aligned Contact (SAC) Etching
Dynamic Plasma Etching of EUV Photoresist for Contact Profile Control and PR Selectivity Improvement
Atomic-scale Analyses of Plasma Etching for Unconventional Materials in Microelectronics
Plasma Wall Interactions: Y2O3 Wall Interaction in Cl2 Plasma Etching of Si and NF3 Plasma Cleaning
Novel atomic order CD Control Technology by Fusion of Quasi-ALE and ALD
Development of a New Analysis Technique of Nanostructures Etched by Plasmas: Quasi In-Situ TEM EDX Characterization
Atomistic Simulations of He Plasma Modification of Si/SiN Thin-Films for Advanced Etch Processes
Patterned Chromium Hard Mask Etching in a Two Reactant Gas for Bit Patterned Media Template Fabrication
Alternative Solutions for Nanometric-Precision Etching: H2 Plasmas Modification of Si/ SiN Thin-Films
Plasma Dynamics at the Surface Interface in Low Pressure Capacitively and Inductively Coupled Plasmas
Photoemission with Soft and Hard X-Rays: Past, Present, and Future
Honorary Session for Prof. Charles Fadley
Ultrafast Magnetization Relaxation Dynamics in La0.66Sr0.33MnO3 Films
Inelastic Background Analysis of Haxpes Spectra for Device Technology: A Non-Destructive Tool for Accessing Deeply Buried Interfaces
Soft X-ray ARPES Investigation of the Spin-polarized n-BaTiO3/SrRuO3 Buried interface
Progress and Perspectives in Photoemission using XFEL Radiation
Revealing the Origins of Non-Joulian Magnetism with High-Resolution Photoemission Microscopy
Tuning Dirac States by Strain in Topological Insulators
Detection of Current Induced Spin Polarization in Topological Insulators via Four-Probe Spectroscopy
Switching Handedness of Chiral Solitons Under Z4 Topology
Spectroscopic-imaging STM Studies on Dirac-Landau Levels in the Topological Surface State
The Rashba and Quantum Size Effects in Ultrathin Bi films
Understanding the Microscopic Effects of Annealing in Ba(Fe1-xCox)2As2 Superconductor
Annealing Effect on the Properties of Superconducting Parent BaFe2As2 Crystal
Scanning Tunneling Microscopy Studies of Hydrogen adsorption on the RuO2(110) Surface
Metal Vapor Adsorption Calorimetry on Layered Ca Niobate Nanosheets: Energetics and Adsorbate Structure
Structure and Reactivity of Model Iron Oxide Surfaces
Structure and Ethanol Reactivity of Ti-modified CeOx(111) Mixed Oxide Surfaces
New Insights into the Coverage-Dependent Structure and Desorption Kinetics of CO on Palladium(111)
Combined Experimental and Computational Study of Water on Fe3O4 (001)
Water Desorption from Sulfur-Doped Oxide Thin Films on W (100)
Adsorption and Decomposition of Dimethyl Methylphosphonate on Metal Oxide Surfaces Under Atmospheric Conditions
Oxygen Chemisorption and Thermal Oxidation of TiAlN High Power Pulsed Magnetron Sputtering Hard Coatings
Fabrication of Nano-power Generators using Thin Atomic Layer Deposited Films
Ultrafast Triggered Transient Energy Storage by Atomic Layer Deposition Into Porous Silicon for Integrated Transient Electronics
Refractory Solar Selective Coatings Synthesized by Atomic Layer Deposition
Sequential Infiltration Synthesis of Doped Polymer Films with Tunable Electrical Properties for Efficient Triboelectric Nanogenerator Development
ALD for Interfacial Engineering of Energy Conversion Devices
Anchoring Down Soluble Polysulfides for Lithium and Sodium Sulfur Battery Cathodes using Atomic Layer Deposition
Hybrid Inorganic-Organic Thin Films by ALD/MLD for Emerging Energy Technologies
Microcrystalline Silicon Thin Film Deposited by Tailored Voltage Waveform Plasmas using an SiF4/H2/Ar Chemistry and its Application to Photovoltaics
Boron Carbide-Aromatic Composite Films by PECVD: A Novel Approach to Electron-hole Separation
Impact of Pulsing the rf Power and the Precursor Injection on the Structure and Optical Properties of TiO2 and TiSiO Thin Films Deposited by PECVD
Plasma CVD of Boron-Carbon Thin Films from Organoboron Precursors for Next Generation Neutron Detectors
Plasma Enhanced Atomic Layer Deposition of Superconducting NbxTiyN Films
Mechanical Reliability of PECVD Barrier Films for Flexible Electronics
Origin of Stress in Sputtered CdTe and ZnS Films: Influence of Sputter Ion Mass on Mechanical and Chemical Layer Properties
Synthesis and Characterisation of MoB2-X and Mo-B-C Thin Films by Non-Reactive DC Magnetron Sputtering
Molybdenum Back Contacts Deposited by High Power Impulse Magnetron Sputtering
Plasma Characterization of Al and Cu with HIPIMS
Vacuum System Analysis of a Next Generation Light Source with Synrad and MolFlow+
Simulations of Vacuum Pumping and Beam Conditioning for CHESS-U Vacuum System
MFIG, A New Vacuum Sensor for Yield Enhancement
Dynamic Process Modeling on a Condensation-based Depressurization System
Vacuum Adventures Encountered Towards a Field-Portable Helium Isotope Detector
Use Of A Novel Sensor Using Remote Plasma Emission Spectroscopy For Monitoring And Control Of Vacuum Processes
Calibration of Quadrupole Mass Spectrometers with a Molecular Flow Gas Source
Sessions | Time Periods | Topics | Schedule Overview