AVS2009 Monday Morning
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
| Session | Monday, November 9, 2009 | ||||||||||
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| 8:20 AM | 9:20 AM | 10:20 AM | 11:20 AM | ||||||||
| AS+ |
Optical Properties of Bulk GaSe and InSe Single Crystals
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Ellipsometric Porosimetry for the Microstructure Characterization of Plasma-Deposited SiO2-Like Films
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Industrial Applications of Spectroscopic Ellipsometry
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Spectroscopic Ellipsometry Studies of Sputtered Vanadium Oxide Thin Films
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Real Time Spectroscopic Ellipsometry Studies of Si:H and Ge:H Thin Films for Microbolometer Applications
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BREAK
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Non-destructive Determination of Spatial Distributions of Free-Charge-Carriers in Low Doped Semiconductors using THz Ellipsometry
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Ellipsometric Depth Profiling of Polymer-Blend Films for Organic Electronics and Photovoltaics
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Thickness Variations Determined by Spectroscopic Ellipsometry in Organometallic Chemical Vapor Deposition: Connection to Growth Processes
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Optical Anisotropy Induced by Oblique Incidence Ion Bombardment of Ag(001)
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| BI+ |
Self-assembling and Biofunctionalization of Plasmonic Gallium and Gold Nanoparticles on Semiconductors for Label Free Bio- and Chemo-sensing
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Geometry and Interactions: How Shape and Intermolecular Interactions Direct the Self-Assembly of Cage Molecules on Au{111}
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On the Role of Supramolecular Nanostructure in determining Interfacial Energy and Biological Interactions
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Can We Make Alkanethiol SAM's on Surface of Gold Nanorods?
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Size-selective Placement of Nanoparticles on a Single Particle Level
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| GR-MoM |
Graphene-based Materials
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Investigation of Process Dependence of Graphene Growth on Nickel Thin Film
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Evolution of Electrical, Chemical, and Structural Properties of Transparent and Conducting Chemically Derived Graphene Thin Films
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Plasma-based Approach to Controlling the Oxygen Concentration in Graphene Oxide
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Graphene Growth on Transition-Metal Thin Films
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BREAK
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Is Fullerene-Intercalation in Graphite a Vehicle to Graphene Surface Layer Doping?
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1 nm Thin Carbon Nanosheets: Two-Dimensional Functional Materials
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Catalytic Property and Morphology of Pt Clusters on Graphite Surface
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| HI-MoM |
Marconi and the First "Vacuum Tube": More than 100 years of Nothing at Work
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Charles Herrold, Inventor of Radio Broadcasting
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Mutual Evolution of Vacuum and Broadcasting Technology
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| NS+ |
Zirconia Nanoplatelets for use in Dental Restoratives
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Formation of Metallic Nanoclusters on TiO2 by Deposition and Sputtering
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Towards Emergence of New Function by Engineering Materials: Colloidal Nanocrystals as Building Blocks for Nanocomposites and Assemblies
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The Direct Writing of Nanoscale Patterns of Nanoparticles and Polymer–Nanoparticle Composites
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Synthesis and Structural Characterization of Fe-O Nanonetworks
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BREAK
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Synthesis of Shape Controlled Sinter Resistant Nanoparticles
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Fabrication and Characterization of Carbon Nanostructures; Optical, Mechanical and Chemical Properties
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Microscopic and Spectroscopic Studies of Photoactive Supermolecular Porphyrin Assemblies
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Solid-State Tunneling Spectroscopy of Individual Nanoparticles
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| PS1-MoM |
Modification Mechanisms of Porous Low-k SiOCH Film during Plasma Ashing Processes
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Oxygen Plasma and Radical Interactions with Ultralow-K Organosilicates; Fundamental Damage Mechanisms
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Synergistic Damage Effects of Vacuum Ultraviolet Photons and O2 in SiCOH Ultra-Low-k Dielectric Films
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Sidewall Modification of Porous SiOCH Ultra Low k Materials Induced by Reducing and Oxidizing Post Etching Plasma Treatments
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Reaction Mechanism and Profile Evolution for Porous Low-k Dielectric Sealing by Combined He and NH3 Plasma Treatment
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BREAK
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Materials Interactions as a Challenge for BEOL RIE at 22nm Node and Beyond
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Challenges in Porous Ultra Low-k for 22nm Dual Damascene Trench Etch
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Sidewall Roughness Transfer during Advanced Interconnect Patterning: Impact of Masking Strategies and Plasma Etching Processes
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Post Etch Treatments as Solution to Limit or Prevent Residue Growth on Metallic Hard Mask after Porous SiOCH Etching in Fluorocarbon Based Plasma
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| PS2+ |
Plasma Etching and Texturing of Multi-Crystalline for Silicon Solar Cells using Remote-Type Pin-To-Plate Dielectric Barrier Discharge
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Production of Crystalline Si Nanoparticles for Third Generation Photovoltaics using a Multi-Hollow Discharge Plasma CVD Method
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Novel Model-Based Sensor for Thin Film Deposition on Large Area Substrates
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Plasma Processing of Thin Silicon Films for Photovoltaic Applications
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BREAK
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Atomic Hydrogen Induced Defect Kinetics in Hydrogenated Amorphous Silicon: An In Situ Real Time Study
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Hydrogen-dominated Plasma, Due to Silane Depletion, for Microcrystalline Silicon Deposition
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Plasma Uniformity Measurements in a Scalable, Multi-Electrode, VHF/UHF Plasma Source
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| SE1-MoM |
Development of Highly Functional Visible Light-responsive TiO2 Thin Film Photocatalyst Materials by a RF Magnetron Sputtering Method and their Applications for our better Environment and Production of Clean Energies using Sunlight
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The Effect of Nb Additions on the Synthesis, Photo-Response, and Photo-Activity of TiO2 Thin Films
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Identification of Carbon Sensitization for the Visible Light Photocatalytic Titanium Oxide
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Effects of Oxygen Vacancies on Electro-Optic Properties of Reactively Co-Sputtered Nb-doped Titania Films
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Micro-Structure of Photo-Catalytic TiO2 Films Deposited by Oxygen Ion Assist Reactive Evaporation Method and Reactive Sputtering
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BREAK
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Enhancement of Visible-Light Activities of Photocatalytic WO3 Films Deposited by Sputtering
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Optimization of Photovoltaic Performance through the Integration of Electrodynamic Dust Shield Layers
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| SE2-MoM |
Industrialization of Metal Ion Sputtering
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Structural and Mechanical Behavior of Fullerene-Like and Amorphous Carbon Nitride Thin Films Deposited by HPPMS
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Effects of the Working Pressure and Pulse Parameters on the Ion Energy and Mass Distributions in Modulated Pulse Power Sputtering Plasma
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Effects of HiPIMS Plasma Transport on Thin Film Deposition
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BREAK
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Deposition Rates of High Power Impulse Magnetron Sputtering: Physics and Economics
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Optical Diagnostics of HIPIMS Discharges: Dependence of Film Growth on Control Parameters
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Time-resolved Plasma Characterization in Modulated Pulse Power (MPP) Magnetron Sputtering
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| SS1-MoM |
Reaction of Phenylenediamines on Ge(100)-2x1: The Effects of Functional Group Spacing on Reactivity
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Electronic and Steric Effects in the Reactions of Isocyanates and Isothiocyanates at the Ge(100)-2x1 Surface
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Surface Transamination Reactions for Thin Film Deposition on NHx-Precovered Silicon
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Si ALE using Molecular Disilane on Si(100)-(2x1)
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Adsorption Studies of Molecular Disilane on p-type Ge(100) at Room Temperature
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BREAK
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High-stability Molecular Interfaces to TiO2 Surfaces
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HREELS Study on the Doping of ZnO by H and Cu Atoms
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Reactions of NO2 with BaO and Ba(OH)2 on Pt(111)
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In-situ Spectroscopy Studies of Surface Species on Pd Surfaces during CO Oxidation
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| SS2-MoM |
Surface Structures of TiOx Thin Films on Au (111)
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Geometric Structure of the TiO2(011) (2x1) Surface by Low Energy Electron Diffraction (LEED)
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Metal Oxide Surfaces: Defects, Dopants, and Reactivity
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Controlled Manipulation of Oxygen Vacancies on TiO2(110)-1x1 Using LT-STM
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Oxygen Reactivity on Reduced TiO2(110)
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BREAK
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Oxygen Interactions with Hydroxylated TiO2(110) Surfaces
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The Photochemistry of Trifluoroacetone on TiO2(110)
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TiO2 with Subsurface Metallic Nanoclusters for Stimulating Photochemistry
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Switching of Sulfur Lattice Sites in S-doped TiO2(110) Under Controlled Annealing Environments
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| TF1-MoM |
Photoluminescence Properties of SrAl2O4:Eu2+,Dy3+ Thin Phosphor Films Grown by Pulsed Laser Deposition
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Multifunctional Double Perovskite Thin Films and Heterostructures
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Influence of Nanostructure on Charge Transport in RuO2 Thin Films
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Electrical and Structural Properties of Ultrathin Polycrystalline and Epitaxial TiN Films Grown by Reactive dc Magnetron Sputtering
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BREAK
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Cubic and Wurtzite Sc1-xAlxN Solid Solutions Grown by Reactive Magnetron Sputter Epitaxy onto ScN (111) and AlN(0001) Seed Layers
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Process Control of Vanadium Oxide Thin Films Grown by Pulsed-dc Reactive Sputtering for Microbolometer Applications
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Compositional and Structural Evolution of Sputtered Ti-Al-N
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| TF2-MoM |
ALD of Metal Chalcogenide Thin Films
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Molybdenum ALD and Mo/W Alloy Growth Using MoF6, WF6 and Si2H6 as the Reactants
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Vapor Deposition of Ruthenium Thin Films from an Amidinate Precursor
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Thermal and Remote Plasma ALD of Ru from CpRu(CO)2Et and O2
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Atomic Layer Deposition of Platinum-Iridium Mixed Metal Layers
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BREAK
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Electrically Conductive Fiber Media by Atomic Layer Deposition of Tungsten
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Interconnect Reliability Improvement by Selective CVD of Co Capping Layer on SAM Treated Copper/Low-k Surface
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From Chemisorption to Steady-State Growth: Initial Stages of ALD Examined using In Situ X-ray Photoelectron Spectroscopy
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| VT-MoM |
Silicon-based Surface Treatments for Improved Vacuum System Throughput, Inertness, and Corrosion Resistance
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Modeling Decontamination of Vacuum Chambers by Downstream Plasma Cleaning
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Methods for Measuring Outgassing for Qualification of Materials, Components and Systems
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Outgassing Characterization of Elastomeric Seals Used in Semiconductor Wafer Processing
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Permeation Through Elastomers: Comparison of Viton® and Chemraz® 653 O-rings under Controlled Compression and Temperature
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BREAK
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Controlled Formation of Condensed Frost Layers in Cryogenic High Vacuum Pumps
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Combination of Compact NEG and Small Ion Pumps for UHV Systems
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Water Vapor Cryopumping: Refrigerant Phaseout Compliance
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Vacuum Processing for the 21st Century
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