AVS2009 Monday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Monday, November 9, 2009
8:20 AM 9:20 AM 10:20 AM
Optical Properties of Bulk GaSe and InSe Single Crystals
Ellipsometric Porosimetry for the Microstructure Characterization of Plasma-Deposited SiO2-Like Films
Industrial Applications of Spectroscopic Ellipsometry
Spectroscopic Ellipsometry Studies of Sputtered Vanadium Oxide Thin Films
Real Time Spectroscopic Ellipsometry Studies of Si:H and Ge:H Thin Films for Microbolometer Applications
Non-destructive Determination of Spatial Distributions of Free-Charge-Carriers in Low Doped Semiconductors using THz Ellipsometry
Ellipsometric Depth Profiling of Polymer-Blend Films for Organic Electronics and Photovoltaics
Thickness Variations Determined by Spectroscopic Ellipsometry in Organometallic Chemical Vapor Deposition: Connection to Growth Processes
Optical Anisotropy Induced by Oblique Incidence Ion Bombardment of Ag(001)
Self-assembling and Biofunctionalization of Plasmonic Gallium and Gold Nanoparticles on Semiconductors for Label Free Bio- and Chemo-sensing
Geometry and Interactions: How Shape and Intermolecular Interactions Direct the Self-Assembly of Cage Molecules on Au{111}
On the Role of Supramolecular Nanostructure in determining Interfacial Energy and Biological Interactions
Can We Make Alkanethiol SAM's on Surface of Gold Nanorods?
Size-selective Placement of Nanoparticles on a Single Particle Level
Graphene-based Materials
Investigation of Process Dependence of Graphene Growth on Nickel Thin Film
Evolution of Electrical, Chemical, and Structural Properties of Transparent and Conducting Chemically Derived Graphene Thin Films
Plasma-based Approach to Controlling the Oxygen Concentration in Graphene Oxide
Graphene Growth on Transition-Metal Thin Films
Is Fullerene-Intercalation in Graphite a Vehicle to Graphene Surface Layer Doping?
1 nm Thin Carbon Nanosheets: Two-Dimensional Functional Materials
Catalytic Property and Morphology of Pt Clusters on Graphite Surface
Marconi and the First "Vacuum Tube": More than 100 years of Nothing at Work
Charles Herrold, Inventor of Radio Broadcasting
Mutual Evolution of Vacuum and Broadcasting Technology
Zirconia Nanoplatelets for use in Dental Restoratives
Formation of Metallic Nanoclusters on TiO2 by Deposition and Sputtering
Towards Emergence of New Function by Engineering Materials: Colloidal Nanocrystals as Building Blocks for Nanocomposites and Assemblies
The Direct Writing of Nanoscale Patterns of Nanoparticles and Polymer–Nanoparticle Composites
Synthesis and Structural Characterization of Fe-O Nanonetworks
Synthesis of Shape Controlled Sinter Resistant Nanoparticles
Fabrication and Characterization of Carbon Nanostructures; Optical, Mechanical and Chemical Properties
Microscopic and Spectroscopic Studies of Photoactive Supermolecular Porphyrin Assemblies
Solid-State Tunneling Spectroscopy of Individual Nanoparticles
Modification Mechanisms of Porous Low-k SiOCH Film during Plasma Ashing Processes
Oxygen Plasma and Radical Interactions with Ultralow-K Organosilicates; Fundamental Damage Mechanisms
Synergistic Damage Effects of Vacuum Ultraviolet Photons and O2 in SiCOH Ultra-Low-k Dielectric Films
Sidewall Modification of Porous SiOCH Ultra Low k Materials Induced by Reducing and Oxidizing Post Etching Plasma Treatments
Reaction Mechanism and Profile Evolution for Porous Low-k Dielectric Sealing by Combined He and NH3 Plasma Treatment
Materials Interactions as a Challenge for BEOL RIE at 22nm Node and Beyond
Challenges in Porous Ultra Low-k for 22nm Dual Damascene Trench Etch
Sidewall Roughness Transfer during Advanced Interconnect Patterning: Impact of Masking Strategies and Plasma Etching Processes
Post Etch Treatments as Solution to Limit or Prevent Residue Growth on Metallic Hard Mask after Porous SiOCH Etching in Fluorocarbon Based Plasma
Plasma Etching and Texturing of Multi-Crystalline for Silicon Solar Cells using Remote-Type Pin-To-Plate Dielectric Barrier Discharge
Production of Crystalline Si Nanoparticles for Third Generation Photovoltaics using a Multi-Hollow Discharge Plasma CVD Method
Novel Model-Based Sensor for Thin Film Deposition on Large Area Substrates
Plasma Processing of Thin Silicon Films for Photovoltaic Applications
Atomic Hydrogen Induced Defect Kinetics in Hydrogenated Amorphous Silicon: An In Situ Real Time Study
Hydrogen-dominated Plasma, Due to Silane Depletion, for Microcrystalline Silicon Deposition
Plasma Uniformity Measurements in a Scalable, Multi-Electrode, VHF/UHF Plasma Source
Development of Highly Functional Visible Light-responsive TiO2 Thin Film Photocatalyst Materials by a RF Magnetron Sputtering Method and their Applications for our better Environment and Production of Clean Energies using Sunlight
The Effect of Nb Additions on the Synthesis, Photo-Response, and Photo-Activity of TiO2 Thin Films
Identification of Carbon Sensitization for the Visible Light Photocatalytic Titanium Oxide
Effects of Oxygen Vacancies on Electro-Optic Properties of Reactively Co-Sputtered Nb-doped Titania Films
Micro-Structure of Photo-Catalytic TiO2 Films Deposited by Oxygen Ion Assist Reactive Evaporation Method and Reactive Sputtering
Enhancement of Visible-Light Activities of Photocatalytic WO3 Films Deposited by Sputtering
Optimization of Photovoltaic Performance through the Integration of Electrodynamic Dust Shield Layers
Industrialization of Metal Ion Sputtering
Structural and Mechanical Behavior of Fullerene-Like and Amorphous Carbon Nitride Thin Films Deposited by HPPMS
Effects of the Working Pressure and Pulse Parameters on the Ion Energy and Mass Distributions in Modulated Pulse Power Sputtering Plasma
Effects of HiPIMS Plasma Transport on Thin Film Deposition
Deposition Rates of High Power Impulse Magnetron Sputtering: Physics and Economics
Optical Diagnostics of HIPIMS Discharges: Dependence of Film Growth on Control Parameters
Time-resolved Plasma Characterization in Modulated Pulse Power (MPP) Magnetron Sputtering
Reaction of Phenylenediamines on Ge(100)-2x1: The Effects of Functional Group Spacing on Reactivity
Electronic and Steric Effects in the Reactions of Isocyanates and Isothiocyanates at the Ge(100)-2x1 Surface
Surface Transamination Reactions for Thin Film Deposition on NHx-Precovered Silicon
Si ALE using Molecular Disilane on Si(100)-(2x1)
Adsorption Studies of Molecular Disilane on p-type Ge(100) at Room Temperature
High-stability Molecular Interfaces to TiO2 Surfaces
HREELS Study on the Doping of ZnO by H and Cu Atoms
Reactions of NO2 with BaO and Ba(OH)2 on Pt(111)
In-situ Spectroscopy Studies of Surface Species on Pd Surfaces during CO Oxidation
Surface Structures of TiOx Thin Films on Au (111)
Geometric Structure of the TiO2(011) (2x1) Surface by Low Energy Electron Diffraction (LEED)
Metal Oxide Surfaces: Defects, Dopants, and Reactivity
Controlled Manipulation of Oxygen Vacancies on TiO2(110)-1x1 Using LT-STM
Oxygen Reactivity on Reduced TiO2(110)
Oxygen Interactions with Hydroxylated TiO2(110) Surfaces
The Photochemistry of Trifluoroacetone on TiO2(110)
TiO2 with Subsurface Metallic Nanoclusters for Stimulating Photochemistry
Switching of Sulfur Lattice Sites in S-doped TiO2(110) Under Controlled Annealing Environments
Photoluminescence Properties of SrAl2O4:Eu2+,Dy3+ Thin Phosphor Films Grown by Pulsed Laser Deposition
Multifunctional Double Perovskite Thin Films and Heterostructures
Influence of Nanostructure on Charge Transport in RuO2 Thin Films
Electrical and Structural Properties of Ultrathin Polycrystalline and Epitaxial TiN Films Grown by Reactive dc Magnetron Sputtering
Cubic and Wurtzite Sc1-xAlxN Solid Solutions Grown by Reactive Magnetron Sputter Epitaxy onto ScN (111) and AlN(0001) Seed Layers
Process Control of Vanadium Oxide Thin Films Grown by Pulsed-dc Reactive Sputtering for Microbolometer Applications
Compositional and Structural Evolution of Sputtered Ti-Al-N
ALD of Metal Chalcogenide Thin Films
Molybdenum ALD and Mo/W Alloy Growth Using MoF6, WF6 and Si2H6 as the Reactants
Vapor Deposition of Ruthenium Thin Films from an Amidinate Precursor
Thermal and Remote Plasma ALD of Ru from CpRu(CO)2Et and O2
Atomic Layer Deposition of Platinum-Iridium Mixed Metal Layers
Electrically Conductive Fiber Media by Atomic Layer Deposition of Tungsten
Interconnect Reliability Improvement by Selective CVD of Co Capping Layer on SAM Treated Copper/Low-k Surface
From Chemisorption to Steady-State Growth: Initial Stages of ALD Examined using In Situ X-ray Photoelectron Spectroscopy
Silicon-based Surface Treatments for Improved Vacuum System Throughput, Inertness, and Corrosion Resistance
Modeling Decontamination of Vacuum Chambers by Downstream Plasma Cleaning
Methods for Measuring Outgassing for Qualification of Materials, Components and Systems
Outgassing Characterization of Elastomeric Seals Used in Semiconductor Wafer Processing
Permeation Through Elastomers: Comparison of Viton® and Chemraz® 653 O-rings under Controlled Compression and Temperature
Controlled Formation of Condensed Frost Layers in Cryogenic High Vacuum Pumps
Combination of Compact NEG and Small Ion Pumps for UHV Systems
Water Vapor Cryopumping: Refrigerant Phaseout Compliance
Vacuum Processing for the 21st Century
Sessions | Time Periods | Topics | Schedule Overview