AVS2005 Monday Afternoon

High Resolution XPS and EELS of Assembled Organic Monolayers

Evaluation of Electron Back-scattering in Auger Analysis using a Cross-sectioned GaAs/AlAs Superlattice

Angle Resolved XPS for Characterization and Metrology of Ultra-Thin Silicon Oxynitride Films

Multi-Technique Characterization of Iron Nanoparticles

Workfunction Differences between Cu Grains: Laterally Resolved UPS with the NanoESCA

In-Situ and Ex-Situ Characterization of the Electrochemically-Accelerated Corrosion of Ni-Cr-Mo-Gd Alloy Surfaces in Aqueous Media

Throughput Advantages of PRBS Modulation in TOF Electron Spectroscopy and Mass Spectrometry

Novel Field Emission Source for Electron Microscopy

Differential Charging of Nanoparticles on Oxide Surfaces as Determined by XPS with External Stimuli

Effective Protein-Protein Interaction and Clustering Phenomenon in Solution Studied by Small-Angle Neutron Scattering

Small-Angle Neutron Scattering: A High Resolution, Non-Destructive Probe Of Biomacromolecular Structure

Determining the Structures of Peptides in Membranes Using Diffraction and MD Simulations

Exploring the Collective Dynamics of Lipid Membranes with Inelastic Neutron Scattering

Meeting the Challenges in Bio-Materials Research using Neutrons

Diamond-based Electrical Biosensors for DNA Detection

Polymer Replicated Interdigitated Electrode Arrays and Their Application in Multiparameter Molecular Diagnostics

Surface Enzyme Reactions for Enhancing SPR Imaging Measurements of DNA Microarrays

Electrically Switchable DNA Layers as a Novel Detection Scheme for Bio-Sensing

DNA Conductance Sensor Platforms Using Nano-scale Break Junctions

Detection of DNA Hybridization on Porous Silicon Surface by Infrared Microspectroscopy

Probing DNA-DNA Interactions between Cytosine (dC) Homo-Oligonucleotides Immobilized on Gold

Quantification of Immobilized and Hybridized Oligonucleotide Surface Density on Commercial Amine-Reactive Microarray Slides using Radiometric Assay, Fluorescence Imaging and X-Ray Photoelectron Spectroscopy

Ion Current Detection of Mono-nucleotide Passing into a Nano-hole Fabricated on Si Wafer

Peter Mark Award Lecture: Synthesis and Patterning of Multifunctional Oxides

DFT Investigation of the Initiation of HfO₂ ALD on H-Si(100)-2x1 and Nitrided Si Surfaces

Hafnium Based High K Dielectrics for Advanced ULSI Technology

Plasma-enhanced ALD for CMOS Applications

LPCVD of Thin TiO₂ Films using TDEAT as Ti Source Gas and NH₃ as a Catalyst

MOCVD of ZrO₂ Thin Films Using the Novel Single Precursor Zirconium 3-methyl-3-pentoxide, Zr(mp)₄

The Effect of Nitrogen Incorporation on the Thermal Stability of La, Hf-aluminate Gate Stacks on Silicon

Atomic Layer Chemical Vapor Deposition and Characterization of Hf-silicate, Hf-silicate/Al2O3, and Hf-silicate/SiO2 Gate Dielectrics

Detection of Specifically Bound Biological Mass with Resonant Nanobeams and Nanochannels

Optically Driven Nanomechanical Resonant Structures for Detection of Single Molecules

Biofabrication: Enlisting Biological Materials for Fabrication

Toward a Chitosan-Based Micromechanical Biosensor

Polymeric Intermediate Layer Bonding in Micro/Nano Devices at Low Temperature for Bio-MEMS/NEMS Applications

Scaling Effects in Tribology: Micro- and Macroscale Studies of Diamond Like Carbon Nanocomposite Coatings

The Effect of Filling Carbon Nanotubes on Their Tribological Behavior

Nanometer Scale Mechanical and Electronic Properties of Molecular Films

On the Influence of Structure on Friction: The Amorphous-Crystalline Transition in Antimony Nanoparticles

Combined Nanoindenter and Quartz Microbalance Studies of Realistic Tribological Contacts and Ultrathin Lubricant Films

Effect of Temperature on the Nanomechanics of Lipid Bilayers Studied by Force Spectroscopy

Understanding the Frictional Response of Organic Monolayer Coatings using Atomic Force Microscopy

The Observation of Nanoscale Melting at Sliding Interface

Quantitative Elastic and Electromechanical Imaging: The Probe Dynamics of Vector Piezoresponse Force Microscopy

Seeing SAMs

Directed Assembly and Separation of Self-Assembled Monolayers Via Electrochemical Processing

AFM Investigation of the Growth of Self-Assembled MOSUD Layers

Submicron Dispersions from Urea-Based Liquid Crystalline Phases

Nanometer-scale Structures Created using Molecular Self-Assembly for Building Blocks and Components

Electric Nanocontact Lithography to the Directed Self-Assembly of Nanoparticle Based Devices

Self-Assembly Activated by Molecular Motors

Directed Assembly and Real-Time Electrical Detection of Nanowire Bridges

Reduction of Line Edge Roughness for 65nm Technology Node for Etched Contact Holes

Difference in Etch Depth between Isolated and Dense Holes in Via-Etching of SiOC Film

Etching Mechanisms of Low-k Material with the Solid First^TM ILD Process in Fluorocarbon based Plasma

The Role of Inert Diluents in Low Pressure Electronegative Fluorinated Gas Discharges under Dual Frequency Excitation

Polymer Management in Dielectric Etch

Polymer Management in Advance Dielectric Etch Applications

Analysis and Impact of F Penetration into low-k Dielectrics during Plasma Etch

Effect of Species Density and Ion Scattering During Ashing on Ultra Low-κ Inter-Level Dielectric Films

Behaviors of Fluorocarbon Radical Temperature in Ar/N₂/C₄F₈ low-k Etching Plasma

Advanced Gate Stack Etch Modeling for 65 nm Node

Investigation of Gate Oxide Behavior during Highly Selective Poly-Si Gate Etching for Triple Gate Transistors

Silicon Etching Beyond the 90nm Technology Node: the Need for Total Parameter Flexibility

Silicon Gate Etching using Amorphous Carbon Hard Mask

Atomic Scale Etching of Poly-Si in Inductively Coupled Ar and He Plasmas

Spectroscopic and Real-Time Study of Ar⁺ and XeF₂ Etching of Si(100) by Second Harmonic Generation

Optimization of Cryogenic Processes with Plasma Diagnostics

The Role of the Reaction Products in the Silicon Etching Cryogenic Process

The Characterization of Silicon Trench Etching in a High Density Reactor Using Self-Excited Electron Resonance Spectroscopy (SEERS)

The MAX Phases: Ductile, Machinable Ternary Carbides and Nitrides

Alternating Covalent-Ionic and Metallic Bonding in Nanolaminated Cubic Perovskites

Observation of the Growth and Microstructural Development of MAX Phase Ti₂AlN Thin Films during Magnetron Sputtering using Synchrotron Radiation

The Materials Science of MAX Phase Thin Films

The Promise of High Power Pulsed Magnetron Sputtering (HPPMS)

Towards Large Area Deposition of Cr₂AlC on Steel

In-situ CV and XPS Evaluation of Tungsten Carbides as Alternative Electrocatalysts

Development of a High Temperature Electrochemical Reactor with Differential Electrochemical Mass Spectrometry for Kinetic Rate Analysis of Methanol Oxidation

Hydrogen Production and Conversion

The Electronic Structure Effect in Heterogenous Catalysis

Microcanonical Transition State Theory: Closing the "Nonequilibrium Gap" Between Surface Science, Catalysis, and Electronic Structure Theory

First Principles Study of Factors Controlling the Rate of Ammonia Decomposition on Ni and Pd Surfaces

Water Chemistry on Cu(110): from Ultra High Vaccum to Ambient Conditions

Hydrogen Interactions with Quasicrystalline Aln-; Pd- & n-; Mn Surfaces

Detection of Nitric Oxide using Gold Nanoparticle Catalysts on WO₃ Chemiresistive Sensors

Reconstrutions of the Polar Oxide Surface MgO(111)

Effects of CH₃OH, H₂O and O₂ on Ultrathin Ordered Alumina Films under Non-UHV conditions: Hydrogen Bonding and Pressure Gaps

Structural Characterisation and Reactivity of V₂O₃(0001) Thin Films

The Multiple Roles of Oxygen in Organic Photo-oxidation on TiO2: Insights from Studies on a Model Photocatalyst Surface

Iron Oxide Thin Films as Supports for Model Catalytic Systems

Role of Dichlorocarbene in the Surface Chemsitry of Halomethanes on Fe₃O₄(111)-(2X2) ; a Comparative Thermal Desorption Study

Methyl Radical Chemistry on Clean and UO₃-Covered Single Crystal Hematite Surfaces

Characterization of the Co₃O₄(111) Single Crystal Surface

The Interaction of Carbonyls with Oxide Surfaces: The Adsorption of Formaldehyde on CeO_X(111)

Structure and Reactivity of the Positively and Negatively Poled Surfaces of LiNbO₃(0001)

Beam-Induced Nano-Structuring for Advanced Mask Repair

Electron Beam Induced Processing Techniques for Advanced Lithography Mask Repair

Reduction of Laser-Induced Roughness in a-Si:H Surfaces for Vacuum Compatible Lithography

Maskless, Direct-Write Nanolithography using Electron Beam-Induced Deposition

Focused Ion Beam Sculpting of Curved Shapes in Metals and Amorphizable Solids

Focused Electron and Ion Beam Processing and Fabrication

Sub-Micron Features Using a Focused Ion Beam and Novel Resist Structures

Improving the Brightness of GaN-based Light Emitting Diodes in the Green

Indium Incorporation Studies for Blue and Green Emitting Multi-Quantum Wells and Light Emitting Diodes

Temperature Measurement and Control during Group-III Nitride MOCVD

Color Conversion in Light Emitting Devices using Nonradiative Energy Transfer

Photonic Crystals for Enhanced Light Extraction in InGaN LEDs

CdSe Nanocrystal Light Emitting Diodes: Toward Full Spectrum White Light Generation

Trapped Whispering-Gallery Optical Modes in White Light-Emitting Diode Lamps with Remote Phosphor