AVS2001 Monday Morning

TOF-SIMS Characterization of Additives in Polymer Materials: Influence of Primary Ion Bombardment Conditions

ToF-SIMS Surface Chemical State Imaging of Biomaterials

Application of Spectrum Imaging and Multivariate Statistical Analysis to Time-of-Flight Secondary Ion Mass Spectrometry¹

Multivariate Statistical Approaches for Distinguishing Between Chemical and Topographical Features in TOF-SIMS Images

Data Interpretation and Quantitative Analysis - A Global Approach in Static SIMS

Secondary Ion Mass Spectrometry Analysis of Wafer Contamination Resulting from Gloved Hands

Chemical Recognition on Lipid Membrane Surfaces

Surface Docking Sites for Macromolecules: Interface Architecture based on PLL-g-PEG/PEGbiotin-(Strept)avidin

Self-Assembly of Modified Porphyrin Monolayers

Efficient New Method of Nucleic Acid Immobilization

Probe Density Effects for Target Hybridization in DNA Monolayer Films Studied By SPR

Two-dimensional Arrangements of Streptavidin on Biotin-doped Supported Lipid Bilayars Optimized for DNA-DNA Hybridization

Surface Science Studies of Model Fuel Cell Electrocatalysts

The Surface Electrochemistry of Carbon Monoxide and Methanol on Solid Electrodes and Supported Catalysts

Measurement of Elevated Temperature Rate Processes Involved in Methanol Electro-Oxidation on Supported Platinum Catalysts

Ruthenium, Osmium, and Palladium Modified Platinum Elecrodes: Surface Structure and Reactivity

Quantitative Analysis of Piezoresponse Force Microscopy: Electrostatic vs. Electromechanic Interactions

Template Sol-Gel Synthesis and Characterization of BaTiO₃ Nanostructures

Low-temperature Process of (Y_0.95,Bi_0.05)MnO₃ Ferroelectric Thin Film and its Structural and Electrical Properties

Effects of Bi/Sr Stoichiometric Ratio on Electrical Properties of Pt/SrBi₂Nb₂O₉/Si Ferroelectric Gate Structure

Recent Progress of Ferroelectric Memory Materials and FET-type FeRAMs

High Speed 256k Magnetoresistive RAM

Dry Etching of MRAM Device Structures

Spin Dependent Tunneling Devices for Nonvolatile Latch Memory

Effects of Interfacial Electronic States and Roughness on Tunnel Magnetoresistance

Performance of the BARC Magnetoresistive Sensor*

Optical Digital Profiling for Production Applications

Critical Dimension and Profile Measurement by Optical Scatterometry for Sub-0.15 µm Advanced Gate and Shallow Trench Isolation Structures

Wafer Inspection with HDI Surface Reflectance Analyzer

Using SQUIDs for Failure Analysis in the Semiconductor Industry

Development of a 300 mm Wafer Defect Analysis Tool Integrating High Resolution Auger Spectroscopy and Ultrahigh Resolution Immersion Lens SEM Microscopy

The "Millipede" - More than 1000 Tips for parallel and dense AFM Data Storage

Attractive Mode Manipulation of Fullerenes on Si(100)

Reliable Nanofabrication Method on Au Cluster Films in a Non-contact Mode with an Atomic Force Microscope

Creating Nanoscale Patterns by Arranging Gold Nanocolloids with an AFM

Dynamics and Manipulation of Surface Electronic States

The Challenges of Plasma Etching in MEMs Processing

Maskless Etching of Silicon using Patterned Microdischarges

Efficiency of Microfabricated ICP Sources¹

Microhollow Cathode Discharge Flow and Stability

Experimental and Numerical Model Investigations of Miniature Microwave Plasma Sources

Potential and Current Profiles of Nitrogen Gas DC Microplasmas

Optical Emission Spectroscopy of Exhaust Stream Gases for Improved Process Control

Peak Wafer Temperature Measurements during Dielectric Etching in a MERIE Etcher

Spatially (z)-Resolved Electron Temperatures and Species Concentrations in Inductively-Coupled Chlorine Plasmas, Measured by Trace-Rare Gases Optical Emission Spectroscopy

Diagnostic of Silicon Etch Plasmas by Optical and Mass Spectrometry, Correlation with XPS Surface Diagnostics

Electrical and Plasma Property Measurements of a DRIE Bosch Process

III-N-V: A Novel Class of Compound Semiconductors for Electronic and Photonic Applications

Microstructure and Optical Properties of (InGa)(AsN) Alloys and Nanostructures

Measurement of Charge Separation Potentials In GaAs(1-x)N(x)

Characterization of GaPN Layers Grown by Molecular Beam Epitaxy on Si Substrates

Nanoscale Phase Formation at Cu(In,Ga)Se₂ Surfaces

Metal-organic Vapor Phase Epitaxial Growth and Photoluminescent Properties of ZnMgO and ZnCdO Thin Films

Coexistence of Active and Passive Oxidation Areas on the Si(100) Surface under Oxygen Cluster Beam Impact

An Ab Initio Study of the Initial Oxidation of the Si(100)-(2x1)

Oxidation of Si(100): Mechanisms of Oxygen Insertion, Migration and Agglomeration

Fundamental Aspects of Silicon Oxidation: O₂ and H₂O Reaction with Si(100) and H-passivated Si Surfaces

Displacement of Surface As Atoms by Insertion of Oxygen Atoms into As-Ga Backbonds

Magnetron Sputtered W/C Films with C₆₀ as Carbon Source

Synthesis and Characterization of Thermally Stable TiB₂/TiC Nanolayered Superlattice Coatings for Dry Machining Applications

Chemical Vapor Deposition and Characterization of TiO₂ Nanoparticles

Nanocomposite Tribological Coatings with "Chameleon" Surface Adaptation

Nanometer-size Monolayer and Multilayer Molecule Corrals on HOPG: A TOF-SIMS, XPS and STM Study

Great Enhancements in Dissociative Electron Attachment to Chlorofluorocarbons Adsorbed on Polar Molecular Ices: A New Pathway for the Formation of the Ozone Hole

Electron Stimulated Reactions of Chlorocarbons in Ice Films

Study of CO₂ Adsorption on Ice using High-pressure X-ray Photoelectron-spectroscopy

Sea Salt Aerosol Reactions: Quantitative Single Particle Studies

Surface Chemistry of Size-Selected, Gas-Phase Nanoparticles

Scanning Electron Microscopy Studies of the Hydration of Mixed Alkali Halide Aerosols

Mesoscopic Strain-Induced Magic Fe Nanostructures on Cu(100)

Nanostructed Growth of Metal Clusters on Ultrathin Al₂O₃ Films on Ni₃Al(111)

Nanocatalysis:Tuning Efficiency and Selectivity Atom-by-Atom

Ion Beam Deposition of Size-selected Supported Metal Clusters

Decay Characteristics of Surface Nanostructures: (100) vs (111) Surfaces¹

Reactions on Free Platinum Clusters: Adsorption of Oxygen and Hydrogen and Formation of Water

MEMS Device Platforms as Research Tools for Developing Improved Sensing Films

Correlation Between Gas Response of MIS Field-Effect Sensors and the Bond Strength Between the Metal and the Insulator Layer of the Device

On the Ammonia Response Mechanism of Field-effect Gas Sensors with Thin Pt Gates

Charge Transport Mechanisms in Epitaxial Tungsten Oxide Films Used for Chemiresistive Sensors

RHIC Insulating Vacuum System: Status and Performance^*

Getter Requirements for a CRT with a Diamond Coated FE Electron Source

Applicability of Spinning Rotor Gauges to Pressure Measurements in Sealed System

Sealed Vacuum Systems including Vacuum Insulation