Structural Characterization of the Outermost Surface Monolayers of CH₃ and CF₃ Terminated n-Alkanethiol Monolayers Self-Assembled on Au(111)

Fundamental Studies of Phase Transitions in Functionalized Amphiphile Monolayers

Characterization of Fluorinated Monolayers

Controlling Defects in Self-Assembled Monolayers

New Preparation Methods for Self Assembly of Alkanethiolates on III-V Semiconductor Surfaces

The Effect of Solvents and Electrical Fields on the Molecular Conformation in Organic Monolayers

Nanometer-Scale Design and Fabrication of Polymer Interfaces using Polydiacetylene Monolayers

Bias-dependent Contrast in STM Images of Phenyloctadecylethers

Self-Assembling Trichloro- and Trimethoxy- silanes on TiO₂(100) Crystal

Surface Preparation and Contamination Control for Advanced CMOS Processing

Dissolution of Cu and Au into Aqueous Semiconductor Processing Solutions

A Reduced Carbon Contaminant, Very Low-Temperature Silicon Substrate Preparation for Defect-Free Homoepitaxy

The Modeling of Excimer Laser Particle Removal From Silicon Surfaces

Chelating Agents for Dry Removal of Metals

Process Optimization of CMP of Dielectrics for ULSI Multilevel Metallization

Nanoscale Corrosive Wear of Ionic Materials: A Model System for Chemical Mechanical Polishing

Studies on Passivation Behavior of Tungsten in Application to Chemical Mechanical Polishing

Studies of the Pad-Slurry-Surface Interactions in Chemical-Mechanical Polishing of Copper Thin Films and Patterned Structures

Limiting Factors in Dense Pseudo Spin Valve and Spin Dependent Tunneling Memory Arrays

New Aspects of GMR Spin Valves: Enhancing Specular Electron Scattering and Using Surfactants for Improved Growth

High Temperature Pinning Properties of IrMn vs. FeMn in Spin Valves

Magnetisation Reversal Studies by TEM of Continuous and Patterned GMR Films

Deposition and Processing of Novel GMR Structures ¹

Direct-Measurement of Spin-Dependent Transport Across Ferromagnetic and Non-Magnetic Thin Films

Effect of Noble Gas Addition (He,Ar,Xe) on Cl₂-Based Etching of NiFe and NiFeCo

Magnetoresistance Properties in Granular Silicide Thin Films Formed by High Dose Iron Implantation

Complete Solvent Free Stripping of via Structures using NF₃,H₂O,O₂ Ashing Chemistry

Studies of a New High Dissociation Inductively-Coupled Plasma Downstream Strip Module

Lithography for Smaller than 0.15 Micron Silicon Technology

Evaluation of Chamber Liners, in TCP Metal Etchers, to Reduce the Equipment Clean Time and to Increase the Mean Time between Cleans

Evolution Effects of Reactor Inner Wall Surface on Fluorocarbon Plasma Parameters

Studies of 300MM Poly-Silicon Etch Processes Using A Inductively Coupled Plasma Source

Integrating Process Models and Operational Methods

Application of an Inductively-Coupled Plasma Source to Destruction and Abatement of Fluorine-based Gases

Low Dielectric Polymer Etching with a Downstream Microwave Plasma

Recent Progress in the Functionalisation of AFM Probes using Electron-Beam Nanolithography

Surface Derivatization of Nanoscale Tungsten Tips for Interfacial Force Microscopy

Silicon Cantilevers for Ultrahigh-Density Data Storage

Capacitative Force Modulation Technique in Nanoindentation

Nanoindentation as a Probe of Stress State

Nano-scale Observations of Stress-Enhanced Dissolution in Monoclinic CaHPO₄ 2H₂O: Chemical vs. Mechanical Effects

Conductance and Force at an Atomically Defined Junction

Chemical Imaging with Scanning Near Field Infrared Microscopy

Tapping-Mode and Nonoptical Force Sensing Near-Field Scanning Optical Microscopy

Development and Application of a Dual-Probe Scanning Tunneling Microscope for Nanoscale Investigations of Materials

Gate Oxide Damage: Testing Approaches and Methodologies

Evaluation of Charging Damage Test Structures for Ion Implantation Processes

SPORT Measured Electron Shading Effects and Comparison with Computer Simulation

Suppression of Charging Damage Caused by Electron Shading Effect in Gate Etching Technology

Modeling of Charging Damage during Dielectric Deposition in High-Density Plasmas

Silicon Oxidation Employing Negative Ion under Transformer Coupled RF Bias

Direct Measurement of VUV Caused Oxide Conduction during Plasma Charging

Vacuum Ultraviolet Spectra of Metal-Etch Plasma Processing Discharges

Spatial Characterization of Plasma VUV Emission in an ECR Etcher

Ab Initio Studies of the Surfaces and Growth of GaN and AlN

Film Defects and Growth Dynamics in Wide Bandgap Epitaxy

Growth of Thin Film Materials with Supersonic Molecular Beams

Selected Energy Etching of Semiconductors by Electron-enhanced Surface Reactions

Velocity, Temperature, and Chemical Composition of a dc-Arcjet Plume

Medard W. Welch Award Lecture - Optical Spectroscopy of Surfaces and Interfaces: Progress and Opportunities

Chemistry and Intermolecular Interactions of Nitridation and Oxidation Precursors on Si(100)-(2x1)

Spectromicroscopy Evidence of Lateral Inhomogeneities for Metal-(III-VI) Semiconductor Interfaces

Direct Determination of the Interplay between Gas-Surface Reactivity, Thin Film Strain and Alloy Surface Segregation: Growth of Strained Heteroepitaxial Si_1-xGe_x Thin Films on Si(100)

Ballistic Electron Emission Microscopy Studies of Tunneling to Surface and Bulk States on Cu (111) Thin Films

Current-Voltage Measurements of Ultrathin Metal-Si(111) Sensors

Electroless Deposition of Au onto H-Si(111)

Growth of Si_1-xGe_x on Si(011): Kinetics, Surface Structure, and Morphological Evolution

Surface Structural Study of Ultra-Thin Si (111) on SiO₂

Reconstructed Oxide Structures Stable in Air: Monolayer Silicate on Hexagonal SiC Surfaces

Monte-Carlo Simulation of the Adsorption and Desoption of CF₄ on Cu/CuO(110)

Adsorption, Absorption, and Abstraction of Hydrogen on Cu(111) Surfaces

A Comparison of State-Resolved Studies of Reaction and Inelastic Scattering for H₂ with Palladium and Copper Surfaces

Energy Dependent Al(111) Oxidation Kinetics

Initial Stages of Al(111) Oxidation by Oxygen - Temperature and Surface Morphology Effects

Comparison of Chemical Selectivity and Kinetic Energy Release in Si_(s) + ICl_(g) and H_(g) + ICl_(g)

Hydrogen Atom Induced Decomposition of Water Adsorbed on Si(100)

Nonthermal Effects of Photon Illumination on Surface Diffusion

The Role of Surface Reconstruction in the Photofragmentation Dynamics of Oriented Methyl Bromide Adsorbed on GaAs

The Atomic Steps of Oxygen Adsorption on Pt(110)-(1x2)

Etching of the Si(001) Surface with Molecular Oxygen

Surface Morphology Induced on Metal Surfaces by Ion Sputtering

Direct Observation of Etching Mechanisms of Cu Surfaces with STM

How Predictable Is Surface Morphology?

Restructuring of Non-Square Vacancy and Adatom Clusters and of Indentations and Protrusions at Step Edges for Ag/Ag(100)

Evolution and Structure of the Stripe Phase Reconstruction of Cu/Ru(0001)

Dynamics of the Striped Nanostructure of the Oxidized Cu(110) Surface: A Momentum-Resolved ESDIAD Study

Evidence and a Model for a Chemically Mediated Roughness Transition

Reconstruction of Bimetallic Systems: Ultrathin Films of Rh, Pt and Pd on W(211)

ULSI Metallization and Interconnects

Pinhole Formation in Solid Phase Epitaxial Film of CoSi₂ on Si(111)

Investigation of the Structural and Chemical Stability of Advanced Metal Gate and Ultra-Thin Gate Dielectric Interfaces

Low Temperature Deposition of Zirconium Diboride, A Candidate Diffusion Barrier, Using Remote Plasma CVD

A Parameter Free Model for the Simulation of Trench Filling Profiles under Al PVD and Al IPVD Conditions

Energy Dependent Atomistic Simulations of Trench-filling

Sputtered Copper Seedlayer Processing Issues

The Effect of Sputter Process and Target Pass-Through Flux on Sputter Deposition of Co Thin Film for Cobalt Silicide Metallization

Improvement of Morphological Stability of Ag Thin on TiN Layer

Electron Beam Degradation of Sulfide-Based Thin Film Phosphors for Field Emission Flat Panel Displays

Current Status of Field Emission Displays (FED's)

Thin Film and Powder Phosphors for Field Emission Flat Panel Displays

A Poor Vacuum Tolerant, Low-Voltage, Scalable, Thin-Film-Edge Dispenser Field Emitter Array

Diamond Coated Silicon Field Emitter Array

Field Emission Characteristics of SiC Capped Si Tip Array by Ion Beam Synthesis