AVS1997 Thursday Afternoon

The Effect of Pressure Sensitive Adhesive Outgassing on Head/Disk Interface Tribology

Hard Disk Drive Analysis Using Time Of Flight Secondary Ion Mass Spectrometry (TOF-SIMS).

Analytical Methods for Determining Root Cause in Media Failure.

Calibration Standards for Substrate Defect Inspection Systems: The Development of the Indentation Technique

Nanoscale Indentation/Scratching of Ultrathin Protective Overcoats on Hard Magnetic Disks

Corrosion and Tribology Study of Carbon Overcoat on Magnetic Thin Film Disk

Chemistry / Orientation of Lubricants on Hard Disk Magnetic Media Substrates Using Near Edge X-ray Absorption Fine Structure

Scanning Auger Microscopy Characterization of Magnetic Hard Disc

c(4x4) Reconstruction on Si(001) as a Warning of Carbon Contamination

Correlating Surface SIMS and TXRF Measurements of Surface Metal Contamination on Silicon Wafers

Characterization of Fluorocarbon Polymers Generated by CHF₃, CF₄, CO, and C₄F₈ Chemistries during High Density Plasma SiO₂ Etching

Post-Poly Etch Residue Removal in a Microwave Plasma Environment for a 0.18 micron CMOS Technology

Gas/Solid Etching of Silicon Dioxide Using HF/vapor Mixtures

In-Situ Formation and Patterning of Ultrathin SiO₂ Mask Layers for Nanoscale Selective-Area Deposition of Si

GaAs(110) Terrace Patterning by Halogenation and Laser Irradiation

BEEM Study on Metal Schottky Contacts of 6H- and 4H-SiC

Deposition of Ultra Thin CVD Ta₂O₅ Films on Si(100) Using Ta(N(CH₃)₂)₅ and O₂ for Gate Dielectric Applications

Structure and Growth of Cerium Oxide Films by Molecular Beam Epitaxy

A Simple Efficient N Atom Source for Nitride MOCVD based on a Dielectric Barrier Discharge

Atomic Layer Growth Process Characterization of Dimethylethylamine Alane and Ammonia on Si(100) for AlN Thin Film Deposition

Analysis of AlN Thin Films Grown on Si(100) by Pulsed Supersonic Jet Molecular Beams

Direct Measurement of Ultrathin SiO₂ Thickness by AFM with Self-Assembled-Monolayer Islands as a Self-Patterned-Mask

Studies on Ultrathin Silicon Oxides Grown by Low Temperature and Low Pressure Wet Oxidation.

Transition Metal Nitride Formed at 40K by Simultaneous Physisorption and Thermal-Evaporation ; TiN/Si(100)

Scanning Tunneling Microscopy and Ballistic Electron Emission Microscopy Studies of Epitaxial Pt/CaF₂/Si(111)

Dry Processing of Polycarbonate

Deep Silicon RIE with Profile Control

The Design, Fabrication and Characterization of a Thermal Microprobe

Microfabrication of 3D-microcoil for Miniature NMR Spectrometer

An Oxygen Plasma Flash Process for the Control of Corrosive Gas Migration in a Semiconductor Wafer Plasma Etch System

Mechanism of Polymer Formation in Poly-Si Etching

Gas Purity Requirements for Semiconductor Processing: Tungsten CVD and Aluminum Etch

Study of E-H Mode Transition in a Large Planar Geometry ICP Reactor

Effects of Lateral Confinement and Ti Underlayer Thickness on C49 and C54 TiSi₂ Phase Formation in TiN/Ti Bilayers on Flat and Patterned Si(001)

The Business Case for In Situ Sensors and Metrology

Developments in Equipment Support Technology

Real-Time Process Sensing and Metrology of Amorphous Silicon and Silicon Nitride PECVD Processes Using In-Situ Mass Spectrometry

Matching Network Efficiency Measurements for Wafer Biasing Applications

A Diode Laser-Based Sensor for In Situ Measurement of Moisture Contamination in Semiconductor Process Tools

Particle Measurement in Vacuum Tools by In Situ Particle Monitor

Diode-Laser-Based Atomic Absorption Monitors for Atomic Flux Measurement in Electron Beam Evaporation

A High Resolution Quartz Microbalance for Studying Sub-Monolayer Deposits and Determining Surface Oxide Stoichiometry.

Beam Scattering Studies of Plasma-Surface Interactions in Chlorine Etching of Photoresist, Polysilicon and Silicon Dioxide

Ion Bombardment Energies in Continuous and Pulsed High Frequency Plasma for Materials Processing.

Positive Ion Species in Inductively Coupled rf Discharges Containing Mixtures of Cl₂, BCl₃, Ar, and N₂

Surface Reactivity, and Velocity Distributions of NH₂ Radicals in an NH₃ Plasma Molecular Beam and Scattered from a Surface.

Measurements and Modeling of Low-Energy Sputtering as a Function of Target Temperature and Grain Size

Molecular Dynamics Simulations of Low Energy (25-200 eV) Ion-Surface Interactions

Surface Chemistry of NF₃ Plasma and Ion Beam Interactions with Silicon

Interactions of Molecular Fragments from Silane/Hydrogen Plasma with Si Surfaces: An Atomic Scale Computational Study

Molecular Dynamics Simulations of Physisorbed Halogen Atoms on Halogenated Silicon Surfaces

Electronic Structure vs. Coverage of Alkali Atoms on W(110)

Surface Photoelectric Effect in Thin Layers of Alkali Metals

Predicting Scanning Tunneling Microscopy Images of Molecules Adsorbed on Metal Surfaces

Chemisorption on Metal Surfaces via a New Embedding Theory

An X-ray Absorption Study of Benzene Bonded to Clean and Chemically Modified Metal Surfaces and Metal Clusters

The Electronic Structures of Ir(100): A Photoemission Study.

Atomic View of Corrosion of Strained Metal Films

Oxidation and Reduction of Pt-Sn Surface Alloys

Oxidation-Reduction Kinetics of Palladium Catalysts

Enhanced Reactivity of Co Deposited on Cu(111)

Surface Reactivity Studies of an AlPdMn Alloy

Hydrodesulfurization Reactions on Carbon Modified Mo(110) Surfaces

Reconstruction and C-1 Chemistry of Oxygen-Modified Mo(100)

Bonding Nature between Oxygen and Sodium on Si(113) Surface

Study of the Reactions of Li with Tetrahydrofuran and Propylene Carbonate by Photoemission Spectroscopy

Temperature-Dependent Near-Surface Chemistry of BaLi₄ Gettering Alloy Studied by Means of X-ray Photoemission Spectroscopy

Thermal Dependence of fcc(001) Surface Structure: Failure of the Quasiharmonic Model

Nature of Adatom Bonds to Transition-Metal Surfaces: O/Pt

A Low Temperature Scanning Tunneling Microscopy Study of Benzene and Carbon Monoxide Coadsorbed on Pd(111)

Cr-induced Self-organization of Nanostructures on a Pt(111) Surface

Nonstoichiometry on TiO₂(110) and Cu- TiO₂ Interfaces

Ab Initio Calculation of the Stoichiometry and Structure of the (0001) Surfaces of GaN and AlN

The Structure of Sb-Terminated GaAs(001) Surfaces.

Dynamics of Phasons Formed on Si(100) Surface Dimer Rows Studied by Scanning Tunneling Microscopy

New Structural Model for the Si(111)4x1-In Reconstruction

An XPS Analysis of Several Co_3-y Fe_y O₄ Films and Their Optical Properties.

A High Resolution XPS Investigation into the Oxidation Resistance of Ti_1-xAl_xN Based Layers

An Investigation of the Optical Properties and Composition of Three Binary Metal Oxide Films: Co_3-y Fe_y O₄, Co_3-x Cr _x O₄, and Cr_x Fe_yO₄.

Infrared and Ellipsometric Analysis of Ion Implanted SiO₂

Negative Ion Assisted Silicon Oxidation at Low Temperature

Infrared Spectroscopy and UV-Visible Ellipsometry Analysis of SiO₂ Films Deposited from O₂/TEOS Plasmas

Structure of the Interfacial Region between Polycarbonate and Plasma-Deposited SiN_1.3 and SiO₂ Optical Coatings.

Heterogeneity in Hydrogenated Silicon: Evidence for a Linear Chain-like Structure

Texture Formation and Surface Roughening of Ni Thin Films Deposited by Magnetron Sputtering onto SiO₂/Si, MgO and SiC Surfaces

Determining Thickness of Thin Metal Films with Spectroscopic Ellipsometry for Applications in Magnetic Random-Access Memory (MRAM)

A Phase-Space Compressed, Guided Ion Beam Instrument for Mass-Selected Ion Beam Deposition

Plume Development and Evolution during Low Fluence UV Laser Ablation of Transparent Materials

Synergetic Effects in Ion Beam Energy and Substrate Temperature During Energetic Film Deposition

Seeded Pulsed Supersonic Molecular Beam Growth of Silicon Carbide Thin Films

Formation of Carbon Nitride Thin Films by Charge Balanced Dual Ion Beam Deposition

Cubic Boron Nitride Thin Film Deposition by Unbalanced Magnetron Sputtering and dc Pulse Substrate Biasing

Growth of GaN and AlN on 6H-SiC(0001) using Supersonic He Beams Seeded with NH₃