AVS1997 TuM Sessions , Tuesday, October 21, 1997 8:20 AM

Tuesday Morning

Abstract Timeline | Time Periods | Topics | Schedule Overview

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Session Code Topic Session Name
AS-TuM AS Depth Profiling and Analysis
BI-TuM BI Surface Characterization of Biological Materials
EM+SS-TuM EM Role of Hydrogen at Semiconductor Surfaces and Interfaces
FP-TuM FP Structures & Materials for Field Emission & Vacuum Microelectronics
MI+NS-TuM MI Magnetic Device Technology
MS+AS+VT-TuM MS Process and Defect Characterization for Semiconductors
NS+SS-TuM NS Nanomechanics and Adhesion
PS1-TuM PS Novel Plasma Sources & Systems
PS2-TuM PS Chamber Cleaning and Downstream Processing
SS1-TuM SS Diffusion and Nucleation of Molecules and Clusters
SS-TuM SS Gas-Surface Dynamics
TF+VM-TuM TF Hard Coatings
TF-TuM TF ULSI Interconnects and Metallization - I
Abstract Timeline | Time Periods | Topics | Schedule Overview