AVS1996 Thursday Afternoon

Surface Modification of Polymers using Plasma Source Ion Implantation

SIMS of Polymer Films and Modified Polymer Surfaces

Analysis by TOF-SIMS of Perfluoro-polyethers with Active Endgroups

Temperature Programmed SIMS: Desorption and Surface Diffusion of Polymer Molecules on Metal Substrates

Surface Characterization of Poly (p- phenylenevinylene) and its Derivatives, MEH-PPV and DMOS-PPV, using XPS and Static SIMS

Charge Neutralization Effects in High Resolution Electron Energy Loss Spectra (HREELS) of Polymer Surfaces

HREELS Studies of Vapor Deposited Polyaniline Thin Films

Polymer Self-Assembled Thin Films and Their Applications for Chemical Sensing

Variable Angle Internal Reflection Raman Spectroscopy of Multi-layer Polymer Thin Films

Theoertical Studies of Diffusion and Growth Phenomena on Semiconductor Surfaces

III-Sb(001) "Odd" Reconstructions: A Violation of the Electron Counting Model?

Atomic Layer Epitaxy for II-VI Material Growth

Low-temperature Selective Growth of GaAs by Modulated Flux Chemical Beam Epitaxy

Positron Annihilation Induced Auger Electron Spectroscopy (PAES) Study of the Structure of Si/H/Ge(100) Interfaces

Etching of Double-Height-Stepped Si(100)-2x1: A Study of Steps and Their Interactions

Evolution of Step Structures on Vicinal Si(111) during Adsorption and Etching by Bromine and Chlorine\super *\

Control of Atomic Step Distributions on Si(001) by Thermal Processing

Steps Structures on Passivated Si(111)-1x1 Surfaces

Pulsed Laser Deposition of Tb-doped Y\sub 2\O\sub 3\ Photoluminescent Thin Films

Electron Beam Dissociation of CO and CO\sub 2\ on ZnS Thin Film Field Emission Display Phosphors

High Luminance Nanophosphors by a Novel Gas Condensation Process

Characterization of Novel Luminescent Films for Field Emission Flat Panel Display Application

Structural and Optical Properties of Alkali Halide Multilayers LiF:NaF Films

Y\sub 2\O\sub 3\:Eu and Y\sub 3\Al\sub 5\O\sub 12\:Eu Red Luminescent Films

Pulsed Laser Deposition of Thin Film Phosphors for Field Emission Flat Panel Displays

Structure, Morphology, and Giant Magnetoresistance of Spin Valves

Schottky Barrier Formation vs Interfacial Structure for Fe on Reconstructed Surfaces of GaAs(001)

In-situ Ellipsometric Control of Metallic Multilayer Thin Films

Structural and Magnetic Properties Calculated using Density Functional Theory

The Structure of the Ferromagnetic MnNi Surface Alloy

Growth, Morphology and Magnetic Properties of Monolayer Epitaxial Co Films on Cu(100)

Growth, Structure, and Magnetic Properties of Fe\sub 3\O\sub 4\ and \gamma\-Fe\sub 2\O\sub 3\ Epitaxial Thin Films Grown by Oxygen-Plasma-Assisted Molecular Beam Epitaxy

Mg Outdiffusion on Ferrite Films Grown on MgO (001)

An Example of Technology Innovation Resulting in a Successful Product

Temperature and Concentration Effects on Ozone Ashing of Photoresist

Defect Reduction and Cost Savings through Re-inventing RCA Cleans - A Joint Research and Manufacturing Project

Vapor Phase Cleaning of Sodium from Silicon Surfaces

Post High Dose Implant and Post Via-Etch Photoresist Stripping and Cleaning without the Use of Acids and Solvents

In Situ Cleaning of LPCVD Tools using a Thermal NF\sub 3\ Etch Process

Effects of Plasma Etching Damage and Cleaning Treatment on Titanium Silicide Formation

Integrated Dry Cleaning of Contamination Resulting from Reactive Ion Etching of Silicon Dioxide

Carbon Contamination in an Etching Reactor using Electron Cyclotron Resonance Plasma and the Effect of N\sub 2\ Addition

From Clusters and Nanophase Assemblies to Nanowires

Transport Properties Along Finite-Length Atomic Chain

Nanostructural and Local Electronic Properties of Fe/W(110) Correlated by Scanning Tunneling Spectroscopy

Photoluminescence Spectra of Self-organized SiGe Quantum Dot Lattices

Tunneling Spectroscopy in High Mobility GaAs/AlGaAs Heterostructure Subject to Surface Field Effect Induced Periodic Potentials

In Situ, Growth-Controlled Fabrication of Semiconductor Nanostructures

Microscopic Processes of Crystal Growth: How can we Control Surface Roughness and Self-organization of Nano-scale Islands

Growth and Properties of Self-Organized Si/Si\sub 1-x\Ge\sub x\ Clusters in Multilayer and Single Films

Electroluminescence as an Indicator for "Soft-breakdown" in Thin Oxides Due to Plasma Processing

Direct Measurement of Charging Voltages and Currents

Electrical-Stress Simulation of Plasma-Damage to Submicron MOSFETS: A Comparison between DC and AC Stresses

Direct Measurement of Surface Discharging Currents during Plasma Etching

Mechanism of Halogen Etching of Cu Surfaces

Minimizing Metal Etch Rate Pattern Sensitivity in a High Density Plasma Etcher

Characterization of Pit-like Sidewall Corrosion in the Etching Process of Al-Cu Alloy

Performance of Different Etch Chemistries on Titanium Nitride Arc Layer and Related Selectivity and Microloading Improvements for Submicron Geometries on a High Density Metal Etcher

Modeling and Profile Simulation of Aspect Ratio Dependent Metal Etching in an Inductively Coupled Plasma Etcher

Loading Effect Reduction in Tungsten Etchback using SF\sub 5\Helicon Plasma

Ionized Physical Vapor Deposition using a DC Magnetron Sputtering System Coupled with Secondary Plasma Sources

Sputtering Apparatus with External Plasma Injection and with Target/Source Focusing of Deposition Material

The Effect of Metal on Ionization Mechanism in Magnetron Sources Operating in Self-Sputtering Mode

Determination of Ionization Fraction and Ion Energy using a Quartz Crystal Oscillator and Gridded Energy Analyzer

Optical and Film-related Diagnostics of Relative Ionization Uniformity in Ionized Magnetron PVD (I-PVD) System

Crystallographic and Electrical Properties of Sputter-deposited Ta Thin Films formed under Various Ion Bombardment Conditions

Ta Metallization using an Electron Cyclotron Resonance Plasma Source Coupled with Divided Microwaves

Compositional Variations of Sputter Deposited Ti/W Barrier Layers on Substrates with Pronounced Surface Topography

Reactive Sputtering Deposition of Aluminum Nitride and Aluminum Oxide Thin Films using Pulsed Techniques

Reactive Sputter Deposition of TiO/sub X/ Thin Films

Mimicking Aspects of Heterogeneous Catalysis

Direct Dissociative Chemisorption of Methane, Ethane, Propane, and Cyclopropane on Ir(110)

Selective C-C Bond Activation in Small Cycloalkanes by Gas Phase Atomic Hydrogen on the Ni(100) Surface

\pi\-Allyl Coordination and Allyl Radical Desorption from a Cu(100) Surface

A Dramatic Increase in the Selectivity for Methane Formation from the Decomposition of Methanethiol on Ni-covered W(001)

Surface Chemistry of Phenol on Al(111)

Identification of the Fragmentation Pathways of Ferrocene on Cu(100)

Cyclization and Related Reactions of Iodoethanol on Ag(110)

Structure of Methyl Nitrite on Ag(111)

Adsorption and Reaction at Model Cloud Particle Surfaces

Surface and Bulk Diffusion of HDO and H\sub 2\\super 18\O on Single-Crystal H\sub 2\\super 16\O Ice Multilayers

The Structure of Water Films formed by Condensation on Mica Surfaces

Dehydroxylation and Rehydroxylation of \alpha\-Al\sub 2\O\sub 3\ Surfaces

Adsorption and Photoreaction of Oxygenates on Tropospheric Metal Oxide Particulates

XPS Studies of Chromium Adsorption on Iron Mineral Surfaces

Growth Kinetics of Phosphate Films on Metal Oxide Surfaces

Structure and Phase Transition in Thin Pyridine Films Adsorbed on Ag(111) and Ag(100): A Second Harmonic Generation Study

Evidence for Weakly Bound Oxygen on Ceria Films

Chemisorption Geometry, Vibrational Spectra, and Thermal Desorption of Formic Acid on TiO\sub 2\(110)

Ultraviolet Raman Spectroscopy of Catalysts and Other Solids

The Reactions of Carbonyls on the Oxides of Lanthanides and Actinides

Adsorption of D\sub 2\O on the Surface of a Fe\sub 3\O\sub 4\(001) Epitaxial Film Grown by MBE: A TPD, LEED and AES Study

Reaction of Hydrogen with Oxide and Sulfide Surfaces: Formation of Water and Hydrogen Sulfide

Electron Stimulated Desorption Studies of the Reaction of MgO(100) Surface with D\sub 2\O

The Growth, Structure and Reactivity of Au on TiO\sub 2\(110)

An In Situ Xps Study of Gold Oxidation by UV/Ozone

The Influence of Strain on Semiconductor Thin Film Epitaxy

Evolution of the Surface Morphology of MBE Grown Tensile Strain Si\sub 0\\sub .\\sub 5\Ge\sub 0\\sub .\\sub 5\/Ge(001)

Boron Segregation with and without Atomic Hydrogen during the Growth of Boron Doped Layers on Si(110), Si(100), and Si(111)

Low Temperature Polycrystalline Silicon Film Formation Technology by a Harmonization with Sputtering and Plasma CVD using a Low Kinetic Energy Particle Process

The Effects of Ion Beam Pretreatment of SiO\sub 2\ Surfaces on the Nucleation and Surface Roughness of Polycrystalline Films Produced by Rapid Thermal Chemical Vapor Deposition

Microstructural Properties of Polycrystalline Silicon Solid-Phase-Crystallized from a-Si:H on Glass: The Effects of a Silicon Nitride Layer between a-Si and Glass

Effect of Substrate Structure on CdTe OMVPE

The Effect of Temperature Profiling Techniques on the Properties of CdTe Thin Films

Highly Oriented Crystalline 2H-WS\sub 2\ Thin Films by Metal Organic Chemical Vapor Deposition