ALD/ALE 2024 Atomic Layer Etching Sessions
Topic Abstract Book
(627KB, Aug 10, 2024)
Topics
| Time Periods
| Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| ALE-SuP | Sunday, August 4, 2024 6:00 PM | Atomic Layer Etching Poster Session |
| ALE-MoA | Monday, August 5, 2024 4:00 PM | ALD+ALE and Emerging Topics in ALE |
| ALE1-TuM | Tuesday, August 6, 2024 8:00 AM | ALE Applications and Methodologies |
| ALE2-TuM | Tuesday, August 6, 2024 10:45 AM | Thermal Gas-phase ALE |
| ALE1+AM-TuA | Tuesday, August 6, 2024 1:30 PM | ALE & Sustainability |
| ALE2+AM-TuA | Tuesday, August 6, 2024 4:00 PM | A.I. for ALD and ALE, and Wet-Chemical ALE |
| ALE1-WeM | Wednesday, August 7, 2024 8:00 AM | Plasma and Energy-Enhanced ALE |
| ALE2-WeM | Wednesday, August 7, 2024 10:45 AM | Selectivity, Metrology and Diagnostics in ALE |
| ALE-WeA | Wednesday, August 7, 2024 1:30 PM | Modeling in Atomic Layer Etching |