ALD/ALE 2022 Wednesday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Wednesday, June 29, 2022
10:45 AM
Atomic Layer Deposition of Perovskite K(Tax,Nb1-x)O3 films on Silicon for Integrated Photonics via KOtBu and H2O
Low-temperature ALD Sb2Te3 for Self-powered Broad-band Photodetector
Preparation of High Mobility Indium Hydroxide Doped by Atomic Layer Deposition and Study on Photoelectric Properties
ALD MgF2 Using (EtCp) 2Mg and SF6 Remote Plasma Source
Moisture Sensitivity of ALD Metal Fluorides for Far UV Optical Coatings
Sub 10-nm Ferroelectric HfO2 Capacitors Doped with Gd
Controlling Stochastic Resistive Switching in Organic-Inorganic Hybrid Memristor by Vapor-Phase Infiltration
Atomic Layer Deposited Vanadium Oxide Thin Films for Thermocromic and Microelectronic Applications
Brain-Based Inspiration: Towards Neuromorphic Computing With ALD Based Memristive Devices
Deposition of Copper-based Metal-Organic Framework Thin Film by Molecular Layer Deposition
ALD-Grown ZIF-8 Thin Films : Mechanism Insight Leads to Push Beyond the Current Thickness Limit
Molecular Layer Deposition of Zeolitic Imidazolate Framework 8 Thin Films
Mld of Phosphane-Ene Polymer Thin Films: Bringing Solution Polymer Chemistry to a Gas Phase Process
Molecular Atomic Layer Deposition of Inorganic-Organic Hybrid Dry Resist for EUV Application
Atomic Layer Deposition of Layered Chalcogenides
2D Alloys of WS2 and NbS2 by PEALD
2D Molybdenum Dichalcogenides by Atomic Layer Deposition
Plasma-enhanced Atomic Layer Deposition of Crystalline MoS2 Thin Films Using a Novel Precursor
Sessions | Time Periods | Topics | Schedule Overview