ALD/ALE 2021 ALD Fundamentals Sessions
Click a Session Code to view its Abstracts
Topic Abstract Book
(706KB, Jun 9, 2021)
Topics
| Time Periods
| Schedule Overview
| Session Code | Session Name |
|---|---|
| AF1 | Precursors and Chemistry: Precursor Design, New Precursors, Process Development |
| AF2 | Precursors and Chemistry: Simulation, Modeling, and Theory of ALD |
| AF3 | Precursors and Chemistry: Mechanisms |
| AF4 | Growth and Characterization: Surface Science of ALD |
| AF5 | Growth and Characterization: High Aspect Ratio/High Surface Area/Powder ALD |
| AF6 | Growth and Characterization: Plasma Enhanced ALD |
| AF7 | Growth and Characterization: Low Temperature ALD |
| AF8 | Growth and Characterization: In-situ Monitoring and Analysis |
| AF9 | Growth and Characterization: Characterization of ALD Films |
| AF10 | ALD Fundamentals Poster Session |