ALD2018 Wednesday Morning

Growth Of Indium Oxide Thin Films Based On A Plasma Enhanced Atomic Layer Deposition Technique

Large-Area Atmospheric Pressure Spatial ALD for Display Applications

Amorphous Indium Zinc Tin Oxide (IZTO) Semiconductor Materials and the Associated Thin Film Transistor Properties Deposited by Atomic Layer Deposition

Evaluation of Si precursor for SiO₂ OLED Encapsulation by PEALD

Hydrogen Barrier Properties of ALD Al₂O₃ with Different Oxidants

Flexible Al₂O₃/Organic Multilayer Moisture Barrier Films Deposited by Spatially Resolved ALD Processes in a Single Chamber

Optimization of Film Structure by Stress Engineering for Flexible Thin Film Encapsulation

A Condense Polymer-inorganic Hybrid Nanolayer with Extremely Low Gas Transmission Rate Behavior and Ultra-flexible Nature

SiN-Al₂O₃ Nano-laminates Fabricated with Combination of CVD-ALD Method for Encapsulation of Highly Stable Flexible OLED Electronics

Thermoelectric Device Based on ALD/MLD-grown ZnO and ZnO:benzene Thin Films on Flexible and Textile Substrates

Transparent Graphene Heater Improved by Defect Healing of Metal Atomic Layer Deposition

Surface Modification Studies and Stabilization of Perovskite Quantum Dots with Atomic Layer Deposition

Fabrication of TiO₂ Interconnected Nanotubes by ALD and Synthesis of g-C₃N₄/Au/TiO₂ Heterostructure for Photocatalytic Water Splitting

Nano-energetic Materials Fabricated by Atomic/Molecular Layer Deposition

Atomic Layer Deposition of Alumina on Lactose Particles for Modified Release: Effect of Co-reactants and Substrate Crystallinity

A High Vacuum Plasma Enhanced Atomic Layer Deposition System for Depositing Very Reactive Metals

Plasma Properties of High Pressure ALD

Remote Plasma Atomic Layer Deposition of Gallium Oxide Thin Films using Trimethylgallium and Oxygen Plasma

Impact of Substrate Biasing during Plasma-enhanced Atomic Layer Deposition on Dielectric Breakdown of Al₂O₃ Thin Film

Growth Mechanism of High-k Y₂O₃ on GaAs(001)-4×6 using in-situ Cycle-by-Cycle ALD and Synchrotron Radiation Photoelectron Spectroscopy

Role of Low and Medium Energy Ions in PEALD Processes

Energetic Ions during Plasma ALD and their Role in Tailoring Material Properties

Role of Plasma Chemistry on Structure and Properties of Low Resistivity PEALD TiN Films

Effect of Oxygen Plasma and Growth Temperature on the Densification of Plasma-Enhanced Atomic Layer Deposited Silicon Dioxide Film

On the Co-reactant for Atomic Layer Deposition of Metals: Hydrogen/Nitrogen-based Plasmas for Cobalt ALD

Plasma-enhanced Atomic Layer Deposition of Tungsten Films using Tungsten Chloride Precursor

Tailoring Molybdenum Carbide Properties by Plasma and Ion Energy Control during Plasma Enhanced ALD

Atmospheric-Pressure Plasma-Enhanced Spatial ALD of In₂O₃:H

Low-Temperature Plasma-Enhanced ALD of Highly Conductive Niobium Nitride Thin Films with RF Substrate Biasing

Low-temperature Plasma Assisted Atomic Layer Deposition of Cadmium Telluride

Improved Deposition Rate of Low T PEALD Silicon Nitride Using Amines

Improved Adhesion and Electrical Properties of Plasma-Enhanced ALD Platinum through Cycle-by-Cycle Hydrogen Plasma Treatment

Low Temperature SiNx Film Deposition by Plasma Enhanced Atomic Layer Deposition with Trisilylamine

Enhanced Thermal Stability of LTO Electrode by Atomic-Layer-Deposited Al₂O₃

Electrochemical Performance of Atomic Layer Deposited Zinc Oxysulfide Thin Film in Li-ion Battery

Interfacial and Surface Design of Electrode by ALD and MLD for Next-generation Batteries

Biodegradable ALD Materials for the Packaging of Thin Film Batteries for Implantable Medical Devices

Enhanced Conductivity in Thin-Film Solid-Composite Electrolytes for Lithium-Ion Batteries by Combining Molecular and Atomic Layer Deposition

Resolving the Mutual Contradiction between Porosity and Toughness of Carbon Textile for Flexible Supercapacitors

Atomically-Precise Interfacial Engineering of Energy Conversion and Storage Materials by ALD

Minimizing Polysulfide Shuttle Effect in Lithium-Ion Sulfur Batteries by Anode Surface Passivation via Atomic Layer Deposition

A Facial Way to Prepare Large Areal 3D Porous Carbon via Molecular Layer Deposition and its Application for Lithium Sulfur Batteries

Enhanced Metal-support Interaction of Ceria Supported Platinum Single Atoms and Subnanoclusters for Room Temperature CO Oxidation

DBD Plasma Assisted Atomic Layer Deposition Alumina Barrier Layer and its Applications

Sequential Infiltration Synthesis for sub 20 nm Thermal Scanning Probe Lithography Patterns

Fabrication of BN Coated Carbon Nanostructures using ALD Based on Polymer Derived Ceramics Route

Atomic Layer Deposition of Lead(II) Iodide

Crystalline High-k Dielectric Films on Atmospheric Plasma Treated Graphene by Atomic Layer Deposition