ALD2017 ALD Fundamentals Sessions

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Session Code Start Session Name
AF-SuA Sunday, July 16, 2017 1:30 PM ALD Fundamentals: Precursors and Mechanisms (1:30-3:30 pm)/High Aspect Ratios & High Surface Areas (4:00-5:30 pm)
AF+AA-MoM Monday, July 17, 2017 8:00 AM ALD Fundamentals: Plasma ALD (8:00-10:00 am)/Emerging Applications (10:45 am-12:00 pm)
AF-MoA Monday, July 17, 2017 1:30 PM ALD Fundamentals: Characterization (1:30-3:30 pm)/Mechanisms and Surface Science (4:00-5:00 pm)
AF-MoP Monday, July 17, 2017 5:30 PM ALD Fundamentals Poster Session
AF1-TuM Tuesday, July 18, 2017 8:00 AM ALD Fundamentals: Precursors and Process Development (8:00-10:00 am)/Precursors and Mechanism (10:45am-12:00 pm)
AF2-TuM Tuesday, July 18, 2017 8:00 AM ALD Fundamentals: Theory & Mechanism (8:00-10: am)/Emerging Materials and Devices (10:45 am-12:00 pm)
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