ALD2017 ALD Fundamentals Sessions
Topic Abstract Book
(857KB, May 5, 2020)
Topics
| Time Periods
| Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| AF-SuA | Sunday, July 16, 2017 1:30 PM | ALD Fundamentals: Precursors and Mechanisms (1:30-3:30 pm)/High Aspect Ratios & High Surface Areas (4:00-5:30 pm) |
| AF+AA-MoM | Monday, July 17, 2017 8:00 AM | ALD Fundamentals: Plasma ALD (8:00-10:00 am)/Emerging Applications (10:45 am-12:00 pm) |
| AF-MoA | Monday, July 17, 2017 1:30 PM | ALD Fundamentals: Characterization (1:30-3:30 pm)/Mechanisms and Surface Science (4:00-5:00 pm) |
| AF-MoP | Monday, July 17, 2017 5:30 PM | ALD Fundamentals Poster Session |
| AF1-TuM | Tuesday, July 18, 2017 8:00 AM | ALD Fundamentals: Precursors and Process Development (8:00-10:00 am)/Precursors and Mechanism (10:45am-12:00 pm) |
| AF2-TuM | Tuesday, July 18, 2017 8:00 AM | ALD Fundamentals: Theory & Mechanism (8:00-10: am)/Emerging Materials and Devices (10:45 am-12:00 pm) |