ICMCTF2011 Session G1: Innovations in Surface Coatings and Treatments
Time Period ThM Sessions | Abstract Timeline | Topic G Sessions | Time Periods | Topics | ICMCTF2011 Schedule
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8:00 AM |
G1-1 Electrical Measurement of Contamination Films in Plasma Reactors
Breandan O'Shaughnessy, Sungho Jang (University of Texas at Dallas); JunSeok Lee (DMS); GilSik Lee (University of Texas at Dallas) A novel means of contamination monitoring in plasma etching and deposition chambers is presented. Electrical measurements and digital signal processing (DSP) are applied to the measurement of relative thickness of films deposited on a probe during industrial etching processes. Etching and cleaning in a commercially available PlasmaTherm etching reactor are monitored in this way. The efficacy of O2 and SF6 cleaning is verified using these results. |
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8:20 AM |
G1-2 Hierarchical Homo- and Hetero-Structures Produced using Unbalanced Magnetron Sputtering Techniques
Samir Aouadi, Ben Sirota, D'Arcy Stone, Lin Wang, Matthew McCarroll (Southern Illinois University, Carbondale) Hierarchical nanostructures that consist of various combinations of metal oxides semiconductors (TiO2, ZnO, V2O5, etc.) were synthesized using the unbalanced magnetron sputtering processes on Si and glass substrates. These structures were created to be used primarily as photocatalysts to degrade pollutants in water and air but may be used for other applications that include solar energy harvesting. The crystal structure and the morphology of the nanostructures were evaluated using x-ray diffraction, scanning electron microscopy, and transmission electron microscopy. These properties were evaluated as a function of deposition conditions such as power to the targets, substrate temperature, oxygen partial pressure, and substrate bias. Finally, the performance of these materials was investigated by evaluating the photoluminescence spectra of these materials and the degradation characteristics of various dyes. |
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8:40 AM | Invited |
G1-4 Synthesis, Interface Engineering, and Applications of Cubic Boron Nitride Films
Wenjun Zhang, Bin He, Qing Ye, Yang Yang, Igor Bello, ShuitTong Lee (City University of Hong Kong) Cubic BN (cBN) has a set of extreme properties similar or even superior to diamond, which makes cBN a very promising material for fabrication of cutting tools, thermal, optical, and high-temperature and high-frequency electronic devices. Cubic BN is a synthetic material, and the study on the synthesis of cBN by high pressure high temperature (HPHT) method started in the early 1960s. Cubic BN films have also been prepared by a variety of ion-assisted physical vapor deposition (PVD) methods. The bombardment of deposited films by energetic species (tens to hundreds of eV) is, however, inevitably accompanied with a significant build-up of compressive stress (5-20 GPa) and leads to the nanocrystalline nature and delamination of the films with a thickness larger than 200 nm. Recent success in the growth of cBN films by chemical vapor deposition (CVD) methods based on fluorine chemistry results in considerable progresses in improving crystallinity, thickness, and adhesion of cBN films. This presentation aims to discuss the major issues hindering cBN films for practical applications, and review the recent progress in the nucleation, growth, and characterization techniques of cBN films. It describes various successful approaches in the interface engineering and growth techniques in increasing film thickness, improving crystallinity, and tuning the electrical properties of cBN films. New developments of cBN films in the applications of mechanical, electronic, and optoelectronic devices will also be addressed. |
9:20 AM |
G1-6 Solution-Based Diamond-Like Carbon Coatings
Vasiliki Poenitzsch, Carol Ellis-Terrel, Ronghua Wei, Kent Coulter (Southwest Research Institute) Southwest Research Institute has identified and demonstrated, at a proof of concept level, an innovative method of fabricating diamond-like carbon (DLC) coatings that involves chemical synthesis of hydrocarbon polymers possessing diamond-like structure at the atomic level and subsequent use of pyrolysis to convert the polymers to diamond-like carbon (s-DLC). The low-temperature, atmospheric, and solution-based processing allows for coating substrates previously considered impractical or impossible due to their size, geometry, or incompatibility with vacuum processes. Further, the properties of the films may be tuned by adjusting the precursor chemistry to control the sp2, sp3 and H content. The chemical composition, microstructure, and properties of the s-DLC coatings were examined with and compared to those of traditional DLC using FTIR and Raman spectroscopy, electron energy loss spectroscopy (EELS), scanning electron microscopy (SEM), electrical impedance, and nanoindentation measurements. In this presentation, an overview of the synthesis, application, and performance of the s-DLC coatings will be given with a specific focus on areas for further development. |
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9:40 AM |
G1-7 Microstructure and Corrosion Behavior of Magnetron Sputtering Ni-P-Based Alloy Thin Films
Fan-Bean Wu, Chia-Che Wu, Yu-Cheng Hsiao (National United University, Taiwan) The Ni-P thin film is widely used for surface protective coating in versatile applications, especially for anti-corrosion layer. The alloying elements are frequently doped to form Ni-P-based alloy thin films with enhanced properties. In this work alloying species, including Al, W, and Ru, which are characterized as light weight, refractory, and noble metals, are incorporated through magnetron sputtering technique. The 350°C as-deposited Ni-P-based film exhibits an amorphous/nanocrystalline feature. With higher treatment temperatures, Ni-P compounds, such as Ni12P5, Ni5P2 and Ni3P, are observed for ternary Ni-P-based films. The alloying elements show a strong effect on suppression of Ni-P phase transformation at 350°C. At elevated temperatures, W dissolves into Ni to form the Ni(W) phase for the Ni-P-W coating. Meanwhile, Ni3Al compound precipitates in the Ni-P-Al film. The Ni-P-Ru film shows an inert electrochemical response under potentiodynamic scanning test as compared to other alloy films. The effect of deposition temperature on corrosion resistance is also analyzed. The corrosion resistance decreases significantly with deposition temperature. The amorphous/nanocrystalline microstructure feature is beneficial to the Ni-P-based alloy films. The influence of alloying elements and phase transformation on electrochemical response of the ternary Ni-P-based films is analyzed. |
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10:00 AM |
G1-8 An Investigation into the Effect of Triode Plasma Oxidation (TPO) on the Properties of Ti-6Al-4V
Sarah Banfield (Tecvac Ltd and University of Sheffield, UK); Junia Cristina Avelar-Batista Wilson (Tecvac Ltd, UK); Glenn Cassar, Adrian Leyland, Allan Matthews (University of Sheffield, UK); Jonathan Housden (Tecvac Ltd, UK) Improving the poor tribological properties of titanium alloys has been the subject of extensive research for many years. A number of oxidation processes have been developed for that purpose. In this study, surface hardening of Ti-6Al-4V is achieved by triode plasma oxidation (TPO) which differs from conventional diode plasma treatments through the use of a third electrode; a negatively biased tungsten filament to enhance the ionisation levels in the plasma. The resultant surface generally consists of a top oxide layer with an oxygen diffusion zone lying immediately underneath it. The effects of process parameters such as substrate temperature, current density and oxygen partial pressure are investigated. Surface hardness measurements at various indentation loads were carried out on all TPO-treated samples to assess the changes in hardness with depth across the diffusion layer. The hardness profiles obtained confirmed the gradual decrease in surface hardness with depth and provided a rough estimate of the thickness of the hardened layer produced. Ball-on-plate reciprocating sliding wear data and glancing angle XRD analysis of the oxidised samples are also presented. The results indicate that a harder and deeper case is achieved both at high substrate temperature and high oxygen partial pressure. Furthermore XRD data show that the substrate temperature significantly affects the structure of the oxide layer produced. All TPO-treated samples also exhibit better wear performance compared to the untreated material. |
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10:20 AM |
G1-10 Interfacial Reaction of Sn3.0Ag0.5Cu Solder with novel Ni-xZn Under Bump Metallization
Hsiu-Min Lin, Jenq-Gong Duh (National Tsing Hua University, Taiwan) A novel Ni-xZn under bump metallization (UBM) design was provided by magnetron sputtering to improve the conventional Ni metallization. In flip chip technology many efforts have been focused on suppression of both intermetallic compounds (IMCs) formation and UBM consumption rates. In this study, the formation and growth of Sn3.0Ag0.5Cu (SAC305) solder joint with Ni-xZn UBM were evaluated with a field-emission scanning electron microscopy (FE-SEM). Further, more the IMCs interfacial reactions were analyzed by a field emission electron probe microanalyzer (FE-EPMA) to evaluate the composition re-distribution. After reflow and aging, Zn elements might slow down the IMC formation and growth in these solder joints with Ni-xZn UBM. These beneficial observations were attributed to the effect of Zn, which played a role of interdiffusion barrier between Ni and Sn. A possible mechanism for the growth, formation, and phase transformation in the related interfacial reaction was discussed and proposed. |
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10:40 AM |
G1-11 A Novel Preparation of Sn,Sb-O2-x Coatings by Pulsed Fiber Laser Annealing
Chun-Min Wang (National Cheng Kung University, Taiwan); Chun-Chieh Huang, Hao-Tung Lin (Cheng Shiu University, Taiwan); Jow-Lay Huang (National Cheng Kung University, Taiwan) A novel method was used for antimony doped into tin oxide to form Sn,Sb-O2-x. The Sb/ SnO2 multilayer films were prepared by ion beam sputtering and RF magnetron sputtering deposition technology separately. The as deposited films were treated by UV 355 nm pulsed laser for the assistance of Sb-ion driven into SnO2 to form antimony-doped structure. Sn,Sb-O2-x films have 45% resistivity decrease and over 90% transparent compared with non-doped SnO2 thin films. The majority carrier concentration showed over 20% improvement at the laser power peak 50 mJ, 30 Hz condition. As the laser power increasing, the majority carrier amounts dropped gradually. The Sb content was decreased as laser power over 50 mJ because of Sb evaporation after high temperature laser ablation. The as deposited films surface morphology was observed by atomic focus microscope (AFM). The results showed roughness of laser treated films were worse than untreated films and some crystallization formed on the surface. |
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11:00 AM |
G1-12 An analysis of the Temperature-Induced Supersaturation Effects on Structure and Properties of Sono-Electrodeposited Copper Thin Films
Archana Mallik, B Ray (National Institute of Technology, India) The effects of ultrasound and temperature on the nucleation mechanism, structure and properties of electrodeposited copper thin films on aluminum were studied using cyclic voltammetry (CV), X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM) techniques. It was found that deposition without ultrasound (silent) showed a mixed kinetics control while sonicated system was dominantly charge transfer control. Films were crystalline in structure. The deposits from the doubly activated bath have the distinct mushroom like morphologies, while in silent conditions there was a transition of morphology from dendritic structures to spherical grains with decrease in deposition temperature. Further, the addition of sonication environment has lead to substantial variations of thermal and mechanical properties of the copper thin films. There was a significant change in the variation of energy absorbed for films that deposited at different bath temperatures. The observed hardness values of the films were higher than the conventional polycrystalline copper. Further the soft films were found to have good wear properties. Thus, the beneficial sonication effect on deposits may be effortlessly and suitably tailored depending on the requirement, which holds a great promise for the future. |
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11:20 AM |
G1-9 The Stratified - Equiaxed Microstructure Transition of 316L Coatings by Low Pressure Plasma Spraying
De-Ming Yang, Bo-Han Tian, Yang Gao (The Thermal Spraying Center of Dalian Maritime University, China) The equiaxed microstructure of 316L stainless steel coatings has been successfully deposited by low pressure plasma spraying (LPPS), compared with the stratified microstructure prepared by other thermal spraying technologies previously. In this article, the coatings were prepared by changing of plasma currents from 500 to 700A and spraying distance from 250 to 450mm and preheating substrate from 300 to 900°C. The results indicated that the equiaxed coatings were determined by the power inputted to the plasma jets, the temperature of the preheating substrate, and spraying distance. The equiaxed coatings were not obtained under selected spraying distance and substrate temperature when the plasma current was below 500A . After increasing the power of plasma jet, some equiaxed grains were found between lamellar boundaries when the substract was preheated to 600°C around and fine equiaxed grains without lamellar boundaries were formed at about 900°C .
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11:40 AM |
G1-3 The Titanium Oxide Film for Vascular Stent Modification
Yongxiang Leng (Southwest Jiaotong University, China) Vascular stent has been an effective therapy for coronary artery disease. 316L stainless steel and 605L CoCrMo are the popular materials used to make stent due to their excellent mechanical property. But restenosis is a big challenge to the further application of vascular stent in biomedical field. Drug eluting stents (DES) have been shown to be effective in decreasing restenosis to a low level. However until now the complications of thrombosis for DES have still remained to some extent, even if anticoagulants have been taken by patients. It has been pointed out that the stent material, which will contact with blood when DES drug layer completely eluted, might be a main factor in influencing the propensity of thrombosis. To decrease thrombosis generation rate, surface modification techniques are extensively employed to improve the biocompatibility of stent materials. It is necessary to put an inorganic film with good blood compatibility for a long time between the stent and the drug. In this way, not only thrombosis but also releasing of toxic ions from stent will be reduced. In the work described in this paper, Ti–O film was deposited on coronary stents. The investigation of the behavior of mechanical compatibility, corrosion resistance and blood compatibility of the Ti–O film coated stent were performed. The results showed that the Drug eluting stents (DES) with Ti-O film pre-coated had lower restenosis and thrombosis generation, comparing with DES without Ti-O film. |