AVS 72 Wednesday Morning

Functionalizing 2D Materials with Defects and Dopants Using Ultra-Low Energy Ions

Clean Integration of h-BN Encapsulated Graphene Heterostructures with Ferroelectric Al_1-xB_xN Thin Films for Robust Carrier Concentration Modulation

Hidden in Plain Sight: Aromaticity of Hexagonal Boron Nitride

Damage-Free Fabrication of Single Photon Emitters in Hexagonal Boron Nitride by Remote Plasma Generation of Vacancies

Probing Static and Dynamical Phenomena in Magnetic Systems Using Spin Defects in Hexagonal Boron Nitride

Characterization of Optically Active Spin Defects in hBN as Quantum Sensors

Towards Probing spin dynamics in mesoscopic sized 2D magnets

A New Topological Monolayer

Spatially-resolved Voltage-reversal due to Bernoulli Potentials in Dissipative Bi2Sr2CaCu2O8+x

Signature of Ferromagnetic and Ferroelectric Coupling in WTe₂/Cr2Ge2Te6 Heterostructures

Electrical Detection of NéEl Vector Reversal in a Van Der Waals Antiferromagnet

Cyclic dielectric etching challenges for next-generation FDSOI logic and quantum devices

Atomic Layer Etching of TiN using O₂/Ar Plasma and SF₆/H₂/Ar Plasma Half-Cycles

Atomic Layer Etch Process for InGaAs Using (CH4+H2)/Ar+ Plasma

O2/CF4/Ar+ 3-Step Plasma Atomic Layer Etch Process for Aluminum

Directional Atomic Layer Etching of Lithium Niobate for Nonlinear Integrated Nanophotonics

Native Oxide Removal and Passivation of Niobium for Superconducting Devices

Thermal Atomic Layer Etching of the Semiconductor Oxide Channel Materials by Sequential Surface Modification and Volatile Release Reactions

Isotropic Atomic Layer Etching via Thermal-Cyclic Processing: Broad Material Capabilities with a Focus on Work–Function Metal Films

Selective Thermal Chemical Vapor Etching (CVE) and Atomic Layer Etching (ALE) of Ge Versus Si

Controlled SiO₂ Etch Rates Using a HF/H₂O Liquid-Layer in a Vacuum Environment: Dependence on H₂O and HF Pressures

Thermal Selective Etching of Si_1-xGe_x in XeF₂

Non-destructive XPS Depth Profiling Using a Three-Anode HAXPES Source with Simultaneous (Angle-Resolved) Data Collection over a Range of Angles

XPS Depth Profiling of Multilayer Stacks using Femtosecond Laser Ablation (fs-LA)

Calibration of Removal Rates for fs-Laser Ablation XPS Depth Profiling

IR Femtosecond-Laser Ablation of IR-Transparent Coatings - Consequences for XPS Depth Profiling

AFM Analysis of Surface Morphology and Grain Growth in Ag Thin Films Prepared by RF Magnetron Sputtering

Non-Destructive Depth Profiling with a Multi-Colored Monochromated X-Ray Source

Evaluating Oxygen Gas Cluster Ion Beams for Inorganic Depth Profiling in Tof–Sims

Low-k SiOC Etching: Correlating Surface Reaction Mechanisms with SiOC/poly-Si Etching Selectivity

Multimodal Surface Analysis and Depth Profiling Using Femtosecond Laser Ablation, Ion Sputtering, and Ion Scattering Spectroscopy

Velocity-Resolved Snms as a Surface-Analytical Probe of Electronically Driven Sputtering Under Swift-Heavy-Ion Irradiation

Experimental Validation of Monte Carlo Transport Simulations for MoS_2​ Sputter Deposition

TOF-SIMS Depth Profiling of Inorganic–Organic Multilayers Using a Hybrid Sputtering Approach

Resolving Chemical Speciation in Complex Nickel-Based Electrocatalysts through Detailed XPS Analysis and Corroborations with ToF-SIMS

Rigorous Electrostatic Constraints for Interface State Extraction in Wide-Bandgap MOS Devices

Doping Dependent Defect Formation in Heavy Ion Irradiated β-Ga2O3

Influence of Substrate Orientation and Surface Treatments on n-Ga2O3/p-GaN Heterointerface Quality

A Comparison of Cr/Au and Ti/Au Ohmic Contacts on β-Ga₂O₃

Temperature-Driven Reversible Carrier-Polarity Switching in Bi-Doped SnSe

Hybrid MBE for Freestanding Ultra-wide Bandgap CaSnO₃ Thin Films Using a Water-soluble BaO Sacrificial Layer

Suppression of Stacking Fault Expansion in SiC Epitaxial Layers via Substrate Implantation

Processing of SiC Pillar Arrays for Quantum and Photonic Applications

Structural and Electrical Characterization of He Ion Implanted 4H-SiC

Impact of ZnO Deposition Method on Post-Illumination Charge Trapping and Recovery in Organic Photodiodes

Accelerated Data-Efficient Metasurface Simulation Using Deep Learning and Neural-Adjoint Inverse Design

Water Detritiation: From ML-Guided Selection to Catalyst Synthesis

Al Intercalation Into C-Vacancy Sites in TiCx for Low-Temperature Synthesis of MAX-Phase Ti₂AlC Hydrogen Permeation Barrier Coatings

Characterizing Heavy Water Displacement in Molecular Sieve Drying Beds for Practical Trace Tritium Capture Methods

Characterizing the Behavior of Hydrogen Isotopes and Impurity Species on Vanadium Surfaces by Direct Recoil Spectroscopy

Theoretical and Experimental Study of Hydrogen Super-Permeation in Iron

Development of Tungsten Alloys to Mitigate Impacts of Neutron Irradition on Tritium Inventory

Liquid Metals as Plasma-Facing Components in Fusion Devices: Can They Solve the Power Handling Challenge? 

Atomic Layer Deposition Affecting Gas Retention in Fusion Targets

Measurement of Residual Impurities after a Cryogenic DT Inertial Confinement Fusion (ICF) Implosion

FORGED-PFC High Heat Flux Facility Vacuum Vessel Design Status

Materials and Deposition Technologies Underlying Target Fabrication for Inertial Confinement Fusion

Challenges in Plasma Etching for 3D Interconnect Technology

Low Global Warming Potential (GWP) Gases for Deep Si Etch for Through-Silicon Via (TSV) Applications

Multiscale Modeling Approach for Bosch Silicon Etching Process Coupled to Machine Learning, Toward a Fast Etching Process Optimization

Feature-Scale Model of Si Plasma Etching in SF₆/O₂/SiF₄ Mixtures

Transport Gradient Model of Oxygen and Fluorine Flux Ratio in High-Aspect-Ratio Silicon Etching

Effects of Discharge Frequency and Precursor Molecule on the Deposition Rate, Film Density, and Residual Stress of a-C:H Hard Masks

Impact of HBr/H2 Gas Mixture on Etching of GeSexTe1-x Chalcogenide Thin Films for Reconfigurable and Nonlinear Photonics

Etch Opportunities in Advanced Packaging, Silicon, and Optical Photonics

Impact of Surface Activation Plasma Chemistry on AlN - Oxide Wafer Bonding for BSPDN Applications

Optimization of Dielectric Plasma Activation for Wafer to Wafer Fusion Bonding

Plasma-Induced Surface Modification of Indium for Improved Bonding

Molecular Systems for Reversible Hydrogen Storage: Atomistic-Level Insights

When Interfaces Break Scaling: Metal–Ceria Catalysts for Selective Methane Conversion

Supported Ni-Cu Catalysts for the Selective Dehydrogenation of Liquid Organic Hydrogen Carriers

Surface Structure, Stability, and Catalytic Reactivity of Metal Nanoparticles Supported on Tantalum Oxide

CO Oxidation on Plasma-Activated Pd and PdAg Surfaces

Catalysis with Liquid Gallium Alloys

Ni as a Promotor for Ethylene Epoxidation: Computation, Surface Science, and Reactor Studies

Tuning Oxygen Activation on Gold with RhAu Single-Atom Alloys

Reaction Product and Single-Atom Promotion of Acetylene Cyclotrimerization and Cross-Coupling on Ag(111)

Selective Hydrogenation of Styrene to Ethylbenzene Over a Pd/Cu(111) Single Atom Alloy Surface

Thin-film and Redox-active Polyvinyl Metallocene via Chemical Vapor Deposition

Amine Functionalization of Polydioxanone at Low Temperature By oMLD of Poly(p-phenylenediamine)

oCVD Enabled Conjugated Polymer Alloying for Filler-Free High-Capacity Chloride Storage Cathodes

Rational Design of Fluoroalkyl-Free Liquid-Repellent Coatings Accessed via Photoinitiated Chemical Vapor Deposition (piCVD)

Designing Functional Polymer Thin Films via Initiated Chemical Vapor Deposition

Kinetically Defined Radical Queching Window for Area-Selective Photoinitiated Chemical Vapor Deposition (AS-PiCVD)

Development of Vapor-Imprinted Polymers for Food Spoilage Monitoring via Selective Acetoin Detection

Molecular Layer Deposition of Polyurea Film and their Role in Sidewall Passivation during Reactive Ion Etching in HF Plasmas

Realizing Controlled Porosity in Atomic Layer Deposited Metal Oxides

Coordination-Driven Ambient Infiltration of Silicon and Germanium Precursors for the Synthesis of Polymer–Inorganic Hybrid Materials

Negative-Tone PMMA-InOx Hybrid Resist Prepared by Sequential Infiltration Synthesis

Utilizing the SI Redefinition and “NIST on a Chip” to Ensure Readiness Across the United States Air Force, Army, and Navy

Air Force Temperature Metrology and Photonic Thermometer Applications

The Standard Photonic Thermometer (SPoT) program at NIST

From SPRT Comparison to SI-traceable Photonic Thermometry with SPoT

Optical Frequency Comb Metrology for Assessing the Ultimate Stability of SPoT in a Water Triple-point (WTP) Cell

Dual Mode-Locked Comb Readout Method for Chip-Scale Silicon Photonic Thermometer

Developing Portable Tools for Photonic Thermometry

A Lighter Footprint: The Evolution of Ring-Resonator Thermometer Design at NRC

Chip-Based Photonic Thermometers: In-Situ Calibration and Si Traceability

Band-Edge Optical Microthermometers for Ultrahigh-Resolution Temperature Sensing

Quantitative Temperature Mapping with Nanometric Resolution