AVS 72 Plasma Science and Technology Sessions

Topics | Time Periods | Schedule Overview

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Session Code Start Session Name Room
PS+AP-MoM Monday, November 9, 2026 10:00 AM Plasma Processes for Advanced Interconnects 315
PS1-MoA Monday, November 9, 2026 1:30 PM Plasma Diagnostics 315
PS2-MoA Monday, November 9, 2026 4:00 PM Plasma Catalysis and Synthesis 315
PS1-TuM Tuesday, November 10, 2026 8:00 AM High Aspect Ratio and Cryogenic Etching I 315
PS2-TuM Tuesday, November 10, 2026 11:00 AM High Aspect Ratio and Cryogenic Etching II 315
PS1-TuA Tuesday, November 10, 2026 2:15 PM Atmospheric and Liquid Plasmas 315
PS2+EUV-TuA Tuesday, November 10, 2026 4:00 PM Plasma Processes for Feature Scaling 315
PS1-WeM Wednesday, November 11, 2026 8:00 AM Plasmas for 3D Integration 315
PS2-WeM Wednesday, November 11, 2026 11:00 AM Plasma Applications in Packaging and Wafer Bonding 315
PS1-WeA Wednesday, November 11, 2026 2:15 PM Machine Learning for Plasma Processes 315
PS2-WeA Wednesday, November 11, 2026 4:15 PM Low Global Warming Potential and Sustainability in Plasma Processing 315
PS1-ThM Thursday, November 12, 2026 8:00 AM Advanced Ion and Reactant Control I 315
PS2-ThM Thursday, November 12, 2026 11:00 AM Advanced Ion and Reactant Control II 315
PS-ThA Thursday, November 12, 2026 2:15 PM Simulation for Plasma Processes 315
PS-ThP Thursday, November 12, 2026 4:30 PM Plasma Science and Technology Poster Session Ballroom A
PS-FrM Friday, November 13, 2026 8:15 AM Novel Chemistries and Materials in Plasma Processing 315
Topics | Time Periods | Schedule Overview