AVS 69 Monday Morning
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
Session | Monday, November 6, 2023 | ||||||||||
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8:20 AM | 9:20 AM | 10:20 AM | 11:20 AM | ||||||||
AP+ |
Atomic Layer Etching of Aluminum and Aluminum Oxide for Optical Applications
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Thermal Etching of First Row Transition Metal Oxides using Acetylacetone and O3: Pathway for Atomic Layer Etching
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Selectivity between Silicon-Based Materials for Thermal Atomic Layer Etching and Spontaneous Etching
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Thermal Atomic Layer Etching of SnO2 by Fluorination and Ligand-Exchange Using HF and Al(CH3)3
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BREAK
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Reactivity and Volatility as Key Metrics for Classifying the Substrate Selectivity of Ligands in Atomic Level Processing
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Etching of Silicon Nitride Using Vapor-Phase HF Exposures at Various Temperatures: Role of Ammonium Hexafluorosilicate Salt
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Crystal Phase Transformations During Thermal Atomic Layer Etching of Hafnium–Zirconium Oxide (HZO) Using Hydrogen Fluoride and Dimethylaluminum Chloride
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Novel Conversion Half-Cycle for Thermal ALD of High-Density Hfo2 and Its Use in HfO2/Al2O3 Nanolaminate Dielectric Barriers
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BI1+ |
Amphiphilic Coatings for Marine Low-Fouling Applications
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Bio-Informed Interface Design and Synthesis to Manipulate Microbial Behavior
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Using Flow-Cells to Culture Microbial Biofilms for Improved Secondary Ion Mass Spectral Imaging
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Role of Microbial Biofilms in the Settlement of Macrofoulers on Antifouling Marine Coatings
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BREAK
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BI2+ |
Electrochemically Conducting Lipid Bilayers: Q-Lipid-Containing Membranes ShowHigh in-Plane Conductivity Using a Membrane-on-a-Chip Setup
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Light Responsive Cyclic Peptide Polymer Nanomaterials
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Programmable Biomimetic Light-Harvesting Systems based on Strong Coupling of Synthetic Peptides and Dye-Functionalised Polymer Brushes to Plasmon Modes
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CA1+ |
Topological and Geometric Descriptors of Complex Self-assembly at Liquid Interfaces
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Machine Learning and the Future of Surface Analysis
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Complexity to Clarity: Detecting, Identifying and Analyzing Complex Materials with Machine Learning
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BREAK
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CA2+ |
Probing hydrogen bonding in aerosols, and solutions with X-Ray and vibrational spectroscopy
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The Investigation of Degraded Historic Glass Samples Using X-ray Photoelectron Spectroscopy
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Studying Oil-in-Water Emulsion Interfacial Changes Using Static and in Situ Imaging
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EL1-MoM |
Ellipsometry Analysis Overview: Things We Can’t Ignore
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Noise Reduction Using Linear and Nonlinear Filtering
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Numerical Ellipsometry: Artificial Intelligence Methods for Solving Ellipsometer Data
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Modeling Many-body Effects in Ge Using Pump-Probe Time-Resolved Spectroscopic Ellipsometry
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BREAK
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EL2-MoM |
Spectroscopic Ellipsometry and Reflectometry for Advanced Semiconductor Metrology
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Ellipsometry in Industrial Applications
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LX+ |
Instrumentation for Electron Microscopy and Spectroscopy in Plasma Environment
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Scienta Omicron HiPPLab - A Lab-based APXPS Instrument for Probing Surface Chemical Reactions
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Using Microheaters for Time-Resolved APXPS and Correlated ETEM
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NAP-XPS Instrumentation Came a Long Way - Where Will Applications Lead Us from Here?
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BREAK
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Evolution of Metal-Organic Frameworks in the Presence of a Plasma by AP-XPS and IRRAS
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Surface Degradation and Passivation in Perovskite Solar Cells
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NS1+ |
Combined Metrology at the Nanoscale: Advanced Scanning Probe Microscopy to Evaluate Complex Semiconductors
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Correlated Functional Imaging of Printed and Ferroelectric 2D Devices for Ubiquitous Sensing and Neuromorphic Computing
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A Unique New Correlative Microscopy Platform for Combined Nanoscale Microscopy by Combination of AFM and SEM
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Correlative in-Situ Nanoscale Microscopy Using AFM and FIB-SEM for Nanomechanical Property Mapping Throughout a 3D Volume
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Anisotropic Friction Effects of Perovskite Nanoplatelets on a vdW Substrate
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BREAK
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NS2+ |
Nanoscale imaging with photo-induced force microscopy
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Near-field Optical Microscopy Imaging and Spectroscopy at 10nm Spatial Resolution
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Correlative Nanoscale Chemical, Mechanical and Electrical Property Mapping on a Single AFM-IR Platform
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PS+ |
IBE Patterning and Characterization of High Density STT-MRAM at Pitch 50nm and MTJ CD 20nm
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Cryogenic Etching by Physisorption of Neutrals for High-Aspect-Ratio Contact
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Plasma Etching Processes Challenges in Emerging Non-Volatile Memories
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Principle and Application of Etching Lag Mitigation in High Aspect Ratio Contact Process
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Etching Selectivities of SiO2 and SiN Against a-C Films Using CF4/H2 with a Pseudo-Wet Plasma Etching Mechanism
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BREAK
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Enhancing Etching Processes at Lower Wafer Temperatures: New Insights into Chemical and Physical Mechanisms
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High Selectivity Etching via Pulsed Selective Deposition
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QS+ |
High Stability Metal-Based Single Electron Transistors for Silicon Quantum Dot Charge Sensors
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High-quality and High Deposition Rate Atomic Layer Deposition of NbN and TiN for Superconducting Quantum Applications
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Navigating MBE Growth of Atomically Precise Complex Oxides using Source Chemistry
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Atomic Layer Deposition of Superconducting Titanium Nitride for Through-Silicon-Via Structures and Photon Detection
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BREAK
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Molecular Beam Epitaxy of Superconducting ZrN Thin Films on GaN Substrates
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Enhancing Quantum Circuits Through Biased Plasma-Enhanced ALD of Ultrathin Superconducting TaCxN1-x
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Characterization of Ultra-Thin Superconducting TaN Nanowires with Integrated Heatsink Capabilities for SNSPD Applications
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Cryogenic Microwave Loss Measurements of Metal-Oxides using 3D Superconducting Cavities
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SE1+ |
AVS John A. Thornton Memorial Award Talk: Low Temperature Thin Film Growth Using Metal-ion/Surface Interactions
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Multi-Component Materials – Bonding, Disorder and Possibilities
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High-k Gate Dielectrics for InAlN and ScAlN Barrier GaN HEMT Structures
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Molecular Layer Deposition for Alumina Gas Separation Membranes
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BREAK
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SE2+ |
Advanced Surface Engineering Coating Technologies for Automotive Applications
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Thin Film Materials Design & Some Thoughts on Complexity and Sustainability
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SS1+ |
Surface Inhomogeneities and Ordering Phenomena of (Pr,Ba)CoO3-δ Thin Film Electrocatalysts Induced by High Temperatures and Oxygen Partial Pressures
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Understanding the Influence of Electrolyte and the Buried Interface on the Stability of Hybrid Systems: A Spectro-Electrochemical Approach
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Controlling CO2 Reduction and Electrocatalysis Reactivity Using Alloy and Polymer-modified Electrodes
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Enhancement of CO2 Reduction Reaction Activity and Selectivity of Sub-2 nm Ag Electrocatalysts by Electronic Metal-Carbon Interactions
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Super Structure and Surface Reconstrutions with High-Energy Surface X-Ray Diffraction
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BREAK
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SS2-MoM |
Local Potential Determinations by XPS Provides the Missing Link about Charge Dynamics of Ionic Liquid Devices
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Interactions at the Solid-Liquid Interface of Microcrystalline ZnO and Bacterial Growth Environments
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Towards Understanding Interfacial Thermodynamics: Visualizing and Quantifying Competitive Adsorption on Muscovite Mica with AFM
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VT-MoM |
30 Years of Active and Combination Cold-Cathode Gauges
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Enabling Vacuum Process Monitoring with Time-of-Flight Spectroscopy
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Remote (100 meters) RGA Operation for High Energy Physics Experiments
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Prospects for Wide-Range, Primary Pressure Sensing with Tethered Optomechanics
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Novel Diaphragm Vacuum Gauge: Q’zGauge (QZG)
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BREAK
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A Demonstration of the Portable Cold Atom Vacuum Standard as a Pressure Sensor
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Update on Construction of the Vacuum Fixed Length Optical Cavity Pressure Standard
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Mfig a Mass Filtered Ion Gauge
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