The liquid interfaces are very active and important for environmental, biological, and industrial processes. However, most surface analysis instrument are vacuum based and the rapid liquid evaporation makes in-situ analyzing liquid surface extreme challenge. Wet Cell II offers a simple solution for scientists and researchers to directly analysis of liquids at the molecular level in a vacuum environment with minor cost. As a lab-on-a-chip device, Wet Cell II can be straightforwardly adaptable to many different analytical platforms, including scanning electron microscopy (SEM) and time-of-flight secondary ion mass spectrometry (TOF-SIMS). Wet Cell II requires little or no sample preparation and only consumes a few drops of liquid. Typical applications include microbiology, liquid surface chemistry, drug delivery & reaction, and energy storage, etc.

Applications

 Polyimide cure

 BCB cure

 Low temp polymers cure

 Copper anneal

The YES-VertaCoat automated, silane vapor deposition system is designed for today’s most advanced MEMS and semiconductor process applications. Whether it’s precise surface modification to reduce stiction for MEMS devices or a thin copper diffusion barrier layer in an advanced semiconductor device, the capability to use a large number of different organosilanes provides the ability for precise surface modification.

Applications

 Wafer dehydration

 Surface tension modification

 Copper diffusion barrier

The YES-VertaVac series of automated high vacuum ovens ensures moisture and hydrogen removal using high vacuum (10-5) and high temperature (up to 450°C). Our patented nitrogen purge precedes process ramp and creates a successful procedure for improved MEMS lifetime and performance.

Applications:

 Wafer dehydration

 Getter activation

 Metal annealing