AVS2006 Monday Morning

Biomolecular Lithography on GaAs Surfaces

The Effect of Ring Substitution Position on the Structural Conformation of Mercaptobenzoic Acid Self-Assembled Monolayers on Au(111)

XPS Analysis of Arenes and Proteins on Gold Substrates Attached by Electrochemical Reduction of Aryldiazonium Salts

Challenges in the Modification and Characterization of Two- and Three-Dimensional Biointerfaces

Nanoscale Chemical Patterning and Architectures

Tailoring of Functional Nano-Patterned Surfaces for Biosensing Applications by Combination of Plasma Processes and Electron-Beam Lithography

Optically-Stimulated Surface Diffusion Exploited for Directed Self-Assembly on Amorphous Semiconductors

Nanowires and Nanodevices via Assembly of Clusters

Carbon Nanotube and Thiol Tethered ssDNA Interactions on Gold

Identifying Short DNA-Strands with Redox Markers by in situ Scanning Tunnelling Microscopy

Hybridization Behavior of DNA/Oligo(ethylene glycol) Functionalized Gold Surfaces in Complex Media

Amino-Silane and Chitosan Coated Silicon Substrates for DNA Extraction

Thymine Homo-oligonucleotides as Model Systems for DNA Surface Science

Engineering DNA-DNA Surface Interactions

Quantitative XPS Imaging of DNA Microarray Surfaces

DNA Nanostructure Adsorption and Growth on Inorganic Surfaces

Interfacial Hybridization Reactions Monitored by Surface Plasmon Optical and Electrochemical Techniques

The Economics of Matter: Nanotechnology & Scale of Manufacturing

Colloidal Nanocrystals of Complex Shape: Synthesis, Properties, Applications

Manufacturing Nanoparticles for Applications in Society

Nanotechnology and High-Efficiency Automobiles

DNA-linked Dendrimer Nanoparticle Systems for Cancer Diagnosis and Treatment

A Novel Scanning Probe Microscope with MOS Transistor and Nano Tip

Simulation of Electrostatic Force Microscopy Imaging Modes

Chemical Specificity and Defect Characterization on MgO(001)

QPlus Sensor AFM at Low Temperatures with Atomic Resolution on NaCl

Nanoscale Spectroscopy with Optical Antennas

Ultra High-Stability SPM to Study Molecules at Variable Temperature

Mapping Atomic-Scale Interaction Potentials

Electromechanical Imaging of Ferroelectric Materials in a Liquid Environment: Ultrahigh Resolution and Novel Physics

Spatial Resolution, Information Limit, and Contrast Transfer in Scanning Probe Microscopy

Raman Spectroscopy of Strained Silicon Structures for CMOS Technology

Fluorocarbon-based Plasma Etching Processes for Silicon Dioxide and Silica Dielectrics - Mechanistic Insights and Current Issues

Effect of Species Density and Ion Bombardment during Ashing of Extreme Ultra Low-κ (eULK) Inter-Level-Dielectric (ILD) Materials

Systematical Evaluation of Etching Damage of Light, Radicals and Ions on Low-k Porous SiOCH Films

Negative Ions in Dual-Frequency Capacitively Coupled Fluorocarbon Plasmas

Plasma and Etching Characteristics for C₆F₆ Gas

New Challenges in Etching Ultra Low-k Dielectrics for 45nm and Beyond

Analysis of Plasma-Induced Modification of Porous SiOCH Low-k Materials during Etching and Post-Etching Plasma Processes

Material Modifications and Surface Roughness during Porous SiOCH Etching Processes

Grain Size Effects on Plasma-based Copper Etch Process

Plasma Etch Challenges in Non-Planar Device Fabrication

Effect of Photoresist Trimming and Plasma Treatments on Line Roughness, Necking, and Bending During High Density Plasma Polysilicon Gate Etching

Understanding the Impact of Chamber Walls during Plasma Etching: a Key to Control Plasma Processes In ULSI

Effect of Etching Process on Gate LER

Plasma Atomic Layer Etching Using Conventional Plasma Equipment*

Impact of Plasma Damage on Cobalt Silicidation

Plasma Etching Challenges of New Materials Involved in Gate Stack Patterning for sub 45 nm Technological Nodes

Ta and Mo-based Metal Etch for Advanced Gate Stacks

Influence of Stopping Layer Nature on Poly-Si/Metal Gate Patterning Process

Plasma Etching of Tungsten Nitride for sub 45nm Metal Gate

Activation of Au for Nitrogen Addition Reactions

Toward Computational Screening in Heterogeneous Catalysis: Pareto-Optimal Methanation Catalysts

Double-Bond Isomerization in Cyclic Olefins Adsorbed on Platinum Surfaces.

Catalysis Science of Surface Metal Oxide Catalytic Active Sites

Methanethiol Desulfurization on Titania-Supported Ni Clusters

Chiral Surface Structure and Enantioselectivity

Diffusion of Adsorbates: on "Walking" and "Dancing" Molecules

Comparison of the Stability of Small Molecules On Rh(111) and Rh(553)

Biphasic Substrate-Adsorbate Energy Transfer Following Subpicosecond Photoexcitation

Influence of Film Thickness on the Reactions of Gas Phase Radicals with Self Assembled Monolayers

Activated Dissociative Chemisorption: Distinguishing Between Statistical and Dynamical Behavior

Vibrational Energy Flow in a Gas-Surface Reaction

Ultrafast Structural Dynamics in Complex Materials using Femtosecond Visible and X-ray Pulses

Direct Probing of the Surface Dangling Bond by Means of Evanescent Wave Cavity Ring Down Spectroscopy

Image and Image-Derived States Formed by Molecular Thin Film Structures

Reaction Dynamics of NO Gas on Iron Phthalocyanine Thin Films

Spatially Controlled Nano-Scale Doping of Er³⁺ in Y₂O₃ by Atomic Layer Deposition

MnO₂ and MgO Atomic Layer Deposition Using Bis(Ethylcyclopentadienyl) Precursors and H₂O

A New Fabrication Method of Nanostructural Materials by Using Selective Atomic Layer Deposition

Mechanism of Al₂O₃ Atomic Layer Deposition Using Trimethylaluminum and Ozone

Atomic Layer Deposition of Y₂O₃-Al₂O₃ Nanolaminate Thin Films and Compounds

Plasma Enhanced Atomic Layer Deposition of TiO₂ and HfO₂: Plasma Source Configuration and Film Properties

Interface Properties of Hafnium Oxide Films Grown by Atomic Layer Deposition on Native, Chemical Oxide and H-Terminated Si Surfaces

Atomic Layer Deposition of Aluminium Silicate Films

Structure and Electrical Properties of BN Atomic Layer Deposition Grown in a Quasi-static Viscous Flow Reactor

Plasma Controlled Atomic Layer Deposition for Sealing Pores in Low-k Materials