AVS2004 Thursday Morning

Physical and Chemical Characterization of MOCVD Zirconia Films Deposited on Hydrogen-Terminated and Native Oxide Si Surfaces

Challenges for the Characterization and Integration of High-k Dielectrics

Engineering the Properties of Hf-based Gate Dielectrics: Role of Initial Surface Preparation and Post Deposition Annealing

Applications of ARXPS to Semiconductor Fabrication and Characterization

ALD and MOCVD Growth of High K Dielectric Al and Hf Films Studied by Parallel Angle Resolved XPS (PARXPS)

Comparative Study of Metal Oxy-Nitride Films by Electron Spectroscopy

Development of Reference Thin Films for Gate Oxide Thickness Determination and Ultra Shallow Junction Profiling

XPS and SIMS Analysis of HfSiON Films

Nitridation of Hf Silicate Layers for Advanced CMOS Gate Oxides : A Core Level and Valence Band Study by Photoelectron Spectroscopy

Strategies for the Biofunctionalization of Surfaces using Functional Polymer Layers

Interfacial Biomaterials: Guiding Biology on Synthetic Surfaces

Antibacterial Surfaces of Covalently Immobilized Dendrimers

Biomimetic Vascular Engineering: Exploiting Concepts from Nature to Create New Biomaterial Interfaces

Stability of Polypeptide Multilayers as Studied by in situ Ellipsometry: Effects of Drying and Post-Buildup Changes in Temperature and pH

PCA of TOF-SIMS Spectra from p(AAm-co-EG/AAc) IPNS on Quartz

Development of an Antimicrobial Polymer Surface Coating for the Prevention of Staphylococcal Infections

Spectroscopic Characterization of Surface-Immobilized Antibacterial Furanone Coatings

Defect Mediated Ferromagnetic Coupling Through an Insulating Barrier Layer¹

Measuring Spin Polarization at the Fermi Level in Potential Half-Metallic Ferro-magnets

Transition Metal Oxides in Reduced Dimensions

Growth and Characterization of PLD Grown Co Doped TiO₂

Room-Temperature Ferromagnetism in Cr-doped TiO₂ Anatase

Synthesis of Room-Temperature Ferromagnetic Materials by Ion Implantation: Transition-Metals-Doped TiO₂ (110) Rutile

MBE Growth and Room Temperature Ferromagnetism in Epitaxial Co-doped SrTiO₃

Characterization of Transition Metal Doped ZnO Films and Nanostructures

Effects of Heat Treatment on the Magnetic Properties of Nickel Cobalt Oxide Films

Fault Detection and Classification Using RGA in Semiconductor Manufacturing

Using Process Control to Address Manufacturing Challenges at 300mm

Run-to-Run Process Control And Equipment Monitoring for Advanced Etch Applications.

Gate Sidewall Profile Control for Plasma Etch Tool

DRAM Gate CD Control in Dry Etch Process using Optical Integrated Metrology

Improving Etch Process Control with Advances in Vacuum Measurement

New Intelligent Molecular Flow Sensor-Experimental Definition of Flow Properties

Three-Dimensional Nanotechnology by Focused-Ion-Beam Chemical-Vapor-Deposition

Integration of Ion Beams with Scanning Probes for Local Doping and Chemical Analysis of Materials

Fabrication and Electrical Characterization of 2D Dopant Nanoelectronic Devices in Si

Scanning Tunneling Microscopy Electronic Characterization of a Nano Device for Quantum Computing

Nanotip Arrays Fabricated by One-step and Self-masked ECR-Plasma Etching and Their Applications for Field Emission, Antireflection and Sensing

Nanoscale Integration of NanoCarbons Based on Ultrananocrystalline Diamond and Carbon Nanotubes

The Role of Hydrogen in Ultrananocrystalline Diamond Thin Film Growth

Surface-Templated Assembly of Nanoparticles on Solid Surfaces for Nano-Optical Applications

MOCVD Synthesis of Group III Nitride Nanowires and Heterostructure Nanowires

Ultralong and Portable Semiconductor Nanowire Arrays

Fabrication of Gold Nanowires by Non-contact Atomic Force Microscopy

Controlled Polymerization of Substituted Diacetylene Self-assembled Monolayers Confined in Molecule Corrals

Semiconducting Nanowires - Synthesis, Characterization and Novel Properties

Strain Mapping in Nanowire Heterostructures

Direct Atomically Resolved Imaging inside a Nanowire

Time-Resolved X-Ray Excited Optical Luminescence Studies of Semiconductor Nanowires¹

Mechanical and Electromechanical Behaviour of Li⁺(Mo₃Se₃)^- Nanowires and Nanowire Bundles

Strong Field Emission of Taper-Like and Rod-like Si Nanowires Grown on Si_XGe_1-X Substrate

Molecular Engineering to Test the Mechanism of Conductance Switching for a Variety of Conjugated Molecules

Room Temperature Molecular Memory Observed from a Nanowell Device

Metal/Molecule/Metal and Metal/Molecule/Semiconductor Device Structures

Room Temperature Negative Differential Resistance Measured through Molecular Monolayers Adsorbed to Silicon Surfaces with Ultra-high Vacuum Scanning Tunneling Microscopy

Two Distinct Types of Switching Behavior in a Single Molecule

Electrical and Mechanical Contacts at the Atomic Scale: a Combined UHV STM/AFM Study

Structure of Self-Assembled Monolayers on Platinum

Oligomer Length Dependent Study of Metal-Molecule Interactions in Model Molecular Wire Systems

Electrical Properties of DNA Characterized by Conducting-Atomic Force Microscopy

Atmospheric and Micro Discharges

Gas and Electrode Temperatures in Non-equilibrium Atmospheric Pressure Plasma with Microwave Excitation

Characterization of the Cold Atmospheric Plasma Hybrid Source

Diagnostics of High Pressure DC Helium Microplasma Discharge

Atmospheric-pressure Microdischarges as Short-residence Time Reactors for Silicon Nanoparticle Synthesis

Comparison of Atmospheric Pressure Helium Plasmas Operating in the Abnormal Glow and Recovery Modes

Atmospheric He-O₂ DBD Plasma for Steel Decontamination

Line Plasma Generation of Microwave Employing Narrow Width Waveguide

Atmospheric Pressure Plasma Liquid Deposition - A New Route to High Performance Coatings

HVP-CVD: A Novel Chemical Vapor Deposition Approach for Zinc Oxide Synthesis

Realization of Mg(x=0.15)Zn(1-x=0.85)O based Metal-Semiconductor-Metal UV Detector on Quartz and Sapphire

A Non-Traditional Approach to Low-Temperature Nitride Thin Film Deposition and Nanoscale Device Fabrication

Confined Epitaxial Growth of GaN for Defect Reduction and Device Development

Conductive Atomic Force Microscopy Studies of Forward and Reverse Current Conduction in GaN Films

Thin-Film Diamond Electronics: Progress and Expectations

X-ray Absorption and Emission Studies of Diamond Nanoparticles

Direct Electronic Sensing of Biological Binding Events on Diamond Thin Films

Enormous Photocurrent for Hydrogenated Single-crystalline B-doped Diamond Epilayers Grown by Microwave-excited Plasma Chemical Vapor Deposition.

Decomposition of Dimethyl Methylphosphonate on TiO₂(110)-Supported Ni Clusters of Different Sizes

Nucleation and Growth of 1B Metals on Rutile TiO2(110): Role of Oxygen Vacancies

Cluster Size and Support Effects on Activity in Supported Gold and Iridium Catalysts

Fullerene Surfaces as Templates for Cluster Formation: The Interaction with Silicon and Gold

The Role of Defects in the Nucleation, Structure, and Stability of Gold Clusters on Titania

Interaction of CO, Au, and O on Ru(0001)

Adsorption and Desorption of Propylene and Ethylene on Au/TiO₂

Chemistry of Sulfur Compounds on Au(111)-Supported Mo Nanoparticles.

Metal Oxide Nanowires: How Nano-Electronics Can Contribute to Catalysis

Advanced Adhesion Test Methods for Semiconductor Interconnect Film

Light vs. Heavy Diamond: an Investigation of the Fundamental Origins of Friction

Frictional Forces and Amontons' Law: From the Molecular to the Macroscopic Scale

Activation of SiC Surface for Vapor Phase Lubrication by Chemical Vapor Deposition of Fe

In Situ Studies of Interfacial Rheology of MoS2 and Most Solid Lubricating Coatings

Self-Assembled Monolayers: The Origin of Molecular Level Friction

Nanotribological Effects of Substrate Surface Order and Partial Fluorination for Alkanephosphonic Acid Self-Assembled Monolayers on Alumina

Tribological Behavior of Self-Assembled Double Layer Measured by a Pin-on-plate Method

Ultra-Low Coverage Spontaneous Etching and Hyperthermal Desorption of Aluminum Chlorides from Cl2/Al(111)

Real-time and In-situ Surface Stress and STM Measurements and their Application to Halogen Etching of Silicon Surfaces

Chemically Assisted Ion Beam Etching of GaAs by Argon and Chlorine Gases: Experimental and Simulation Investigations

Semiconductor Surface Chemical Functionalization for Microelectronics Applications: Gas Phase Chlorination of H-Passivated Silicon Surfaces

Charge-Carrier-Stimulated Halogen Desorption from Si(100)-(2x1)

Morphological Evolution during Competitive Etching and Oxidation of Vicinal Si(100) Surfaces

Atomic Oxygen Etching of Phosphorous-containing Polymer Surfaces

Structural Damage of Self-Assembled Monolayers Induced by 5-eV O⁺ Bombardment

In-situ STM-studies of Solid/Liquid Interfaces:Growth of Ultrathin Compound Films

Evolution of Surface Morphology during Thin Film Growth by Hot-Wire CVD: Short-Range Smoothening and Long-Range Roughening

Atomic-Scale Analysis of SiH₃ and H Surface Diffusion on Plasma-Deposited Amorphous Silicon Thin Films

Substrate Temperature Dependence of the Roughness Evolution of Hot-wire Deposited a-Si:H Studied by Real-Time Spectroscopic Ellipsometry and Atomic Force Microscopy

A Self-Consistent Prediction of a Deposition of Cu Sputtered in a rf Magnetron Plasma

Effects of Steering and Shadowing in Epitaxial Growth

Inhomogeneous Transport of Energetic and Thermalized Neutrals in a Magnetron Sputter System

A Target Material Pathways Model for High Power Pulsed Magnetron Sputtering

Complex Target Poisoning Effects in Reactive Sputtering

Process Parameter - Film Structure/Optical Property Study of Reactive Sputter Deposited Hafnium Dioxide

Integrated Modeling of Al₂O₃ Atomic Layer Deposition

Engineering, Business, and the Next Environmental Frontier: Will Sustainability Solutions Self-Assemble?

Emerging Applications for Electrodeposited Nano-Structured Materials: Environmental Benefits and Potential Risks

Designing More-sustainable Technologies through Green Chemistry and Nanoscience

Nanotechnology and Environmental Policy