AVS2004 Thursday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Thursday, November 18, 2004
8:20 AM 9:20 AM 10:20 AM 11:20 AM
AS-ThM
Physical and Chemical Characterization of MOCVD Zirconia Films Deposited on Hydrogen-Terminated and Native Oxide Si Surfaces
Challenges for the Characterization and Integration of High-k Dielectrics
Engineering the Properties of Hf-based Gate Dielectrics: Role of Initial Surface Preparation and Post Deposition Annealing
Applications of ARXPS to Semiconductor Fabrication and Characterization
ALD and MOCVD Growth of High K Dielectric Al and Hf Films Studied by Parallel Angle Resolved XPS (PARXPS)
Comparative Study of Metal Oxy-Nitride Films by Electron Spectroscopy
Development of Reference Thin Films for Gate Oxide Thickness Determination and Ultra Shallow Junction Profiling
XPS and SIMS Analysis of HfSiON Films
Nitridation of Hf Silicate Layers for Advanced CMOS Gate Oxides : A Core Level and Valence Band Study by Photoelectron Spectroscopy
BI+
Strategies for the Biofunctionalization of Surfaces using Functional Polymer Layers
Interfacial Biomaterials: Guiding Biology on Synthetic Surfaces
Antibacterial Surfaces of Covalently Immobilized Dendrimers
Biomimetic Vascular Engineering: Exploiting Concepts from Nature to Create New Biomaterial Interfaces
Stability of Polypeptide Multilayers as Studied by in situ Ellipsometry: Effects of Drying and Post-Buildup Changes in Temperature and pH
PCA of TOF-SIMS Spectra from p(AAm-co-EG/AAc) IPNS on Quartz
Development of an Antimicrobial Polymer Surface Coating for the Prevention of Staphylococcal Infections
Spectroscopic Characterization of Surface-Immobilized Antibacterial Furanone Coatings
MI-ThM
Defect Mediated Ferromagnetic Coupling Through an Insulating Barrier Layer1
Measuring Spin Polarization at the Fermi Level in Potential Half-Metallic Ferro-magnets
Transition Metal Oxides in Reduced Dimensions
Growth and Characterization of PLD Grown Co Doped TiO2
Room-Temperature Ferromagnetism in Cr-doped TiO2 Anatase
Synthesis of Room-Temperature Ferromagnetic Materials by Ion Implantation: Transition-Metals-Doped TiO2 (110) Rutile
MBE Growth and Room Temperature Ferromagnetism in Epitaxial Co-doped SrTiO3
Characterization of Transition Metal Doped ZnO Films and Nanostructures
Effects of Heat Treatment on the Magnetic Properties of Nickel Cobalt Oxide Films
MS-ThM
Fault Detection and Classification Using RGA in Semiconductor Manufacturing
Using Process Control to Address Manufacturing Challenges at 300mm
Run-to-Run Process Control And Equipment Monitoring for Advanced Etch Applications.
Gate Sidewall Profile Control for Plasma Etch Tool
DRAM Gate CD Control in Dry Etch Process using Optical Integrated Metrology
Improving Etch Process Control with Advances in Vacuum Measurement
New Intelligent Molecular Flow Sensor-Experimental Definition of Flow Properties
NS1-ThM
Three-Dimensional Nanotechnology by Focused-Ion-Beam Chemical-Vapor-Deposition
Integration of Ion Beams with Scanning Probes for Local Doping and Chemical Analysis of Materials
Fabrication and Electrical Characterization of 2D Dopant Nanoelectronic Devices in Si
Scanning Tunneling Microscopy Electronic Characterization of a Nano Device for Quantum Computing
Nanotip Arrays Fabricated by One-step and Self-masked ECR-Plasma Etching and Their Applications for Field Emission, Antireflection and Sensing
Nanoscale Integration of NanoCarbons Based on Ultrananocrystalline Diamond and Carbon Nanotubes
The Role of Hydrogen in Ultrananocrystalline Diamond Thin Film Growth
Surface-Templated Assembly of Nanoparticles on Solid Surfaces for Nano-Optical Applications
NS2-ThM
MOCVD Synthesis of Group III Nitride Nanowires and Heterostructure Nanowires
Ultralong and Portable Semiconductor Nanowire Arrays
Fabrication of Gold Nanowires by Non-contact Atomic Force Microscopy
Controlled Polymerization of Substituted Diacetylene Self-assembled Monolayers Confined in Molecule Corrals
Semiconducting Nanowires - Synthesis, Characterization and Novel Properties
Strain Mapping in Nanowire Heterostructures
Direct Atomically Resolved Imaging inside a Nanowire
Time-Resolved X-Ray Excited Optical Luminescence Studies of Semiconductor Nanowires1
Mechanical and Electromechanical Behaviour of Li+(Mo3Se3)- Nanowires and Nanowire Bundles
Strong Field Emission of Taper-Like and Rod-like Si Nanowires Grown on SiXGe1-X Substrate
OF+
Molecular Engineering to Test the Mechanism of Conductance Switching for a Variety of Conjugated Molecules
Room Temperature Molecular Memory Observed from a Nanowell Device
Metal/Molecule/Metal and Metal/Molecule/Semiconductor Device Structures
Room Temperature Negative Differential Resistance Measured through Molecular Monolayers Adsorbed to Silicon Surfaces with Ultra-high Vacuum Scanning Tunneling Microscopy
Two Distinct Types of Switching Behavior in a Single Molecule
Electrical and Mechanical Contacts at the Atomic Scale: a Combined UHV STM/AFM Study
Structure of Self-Assembled Monolayers on Platinum
Oligomer Length Dependent Study of Metal-Molecule Interactions in Model Molecular Wire Systems
Electrical Properties of DNA Characterized by Conducting-Atomic Force Microscopy
PS-ThM
Atmospheric and Micro Discharges
Gas and Electrode Temperatures in Non-equilibrium Atmospheric Pressure Plasma with Microwave Excitation
Characterization of the Cold Atmospheric Plasma Hybrid Source
Diagnostics of High Pressure DC Helium Microplasma Discharge
Atmospheric-pressure Microdischarges as Short-residence Time Reactors for Silicon Nanoparticle Synthesis
Comparison of Atmospheric Pressure Helium Plasmas Operating in the Abnormal Glow and Recovery Modes
Atmospheric He-O2 DBD Plasma for Steel Decontamination
Line Plasma Generation of Microwave Employing Narrow Width Waveguide
Atmospheric Pressure Plasma Liquid Deposition - A New Route to High Performance Coatings
SC+
HVP-CVD: A Novel Chemical Vapor Deposition Approach for Zinc Oxide Synthesis
Realization of Mg(x=0.15)Zn(1-x=0.85)O based Metal-Semiconductor-Metal UV Detector on Quartz and Sapphire
A Non-Traditional Approach to Low-Temperature Nitride Thin Film Deposition and Nanoscale Device Fabrication
Confined Epitaxial Growth of GaN for Defect Reduction and Device Development
Conductive Atomic Force Microscopy Studies of Forward and Reverse Current Conduction in GaN Films
Thin-Film Diamond Electronics: Progress and Expectations
X-ray Absorption and Emission Studies of Diamond Nanoparticles
Direct Electronic Sensing of Biological Binding Events on Diamond Thin Films
Enormous Photocurrent for Hydrogenated Single-crystalline B-doped Diamond Epilayers Grown by Microwave-excited Plasma Chemical Vapor Deposition.
SS1-ThM
Decomposition of Dimethyl Methylphosphonate on TiO2(110)-Supported Ni Clusters of Different Sizes
Nucleation and Growth of 1B Metals on Rutile TiO2(110): Role of Oxygen Vacancies
Cluster Size and Support Effects on Activity in Supported Gold and Iridium Catalysts
Fullerene Surfaces as Templates for Cluster Formation: The Interaction with Silicon and Gold
The Role of Defects in the Nucleation, Structure, and Stability of Gold Clusters on Titania
Interaction of CO, Au, and O on Ru(0001)
Adsorption and Desorption of Propylene and Ethylene on Au/TiO2
Chemistry of Sulfur Compounds on Au(111)-Supported Mo Nanoparticles.
Metal Oxide Nanowires: How Nano-Electronics Can Contribute to Catalysis
SS2-ThM
Advanced Adhesion Test Methods for Semiconductor Interconnect Film
Light vs. Heavy Diamond: an Investigation of the Fundamental Origins of Friction
Frictional Forces and Amontons' Law: From the Molecular to the Macroscopic Scale
Activation of SiC Surface for Vapor Phase Lubrication by Chemical Vapor Deposition of Fe
In Situ Studies of Interfacial Rheology of MoS2 and Most Solid Lubricating Coatings
Self-Assembled Monolayers: The Origin of Molecular Level Friction
Nanotribological Effects of Substrate Surface Order and Partial Fluorination for Alkanephosphonic Acid Self-Assembled Monolayers on Alumina
Tribological Behavior of Self-Assembled Double Layer Measured by a Pin-on-plate Method
SS3-ThM
Ultra-Low Coverage Spontaneous Etching and Hyperthermal Desorption of Aluminum Chlorides from Cl2/Al(111)
Real-time and In-situ Surface Stress and STM Measurements and their Application to Halogen Etching of Silicon Surfaces
Chemically Assisted Ion Beam Etching of GaAs by Argon and Chlorine Gases: Experimental and Simulation Investigations
Semiconductor Surface Chemical Functionalization for Microelectronics Applications: Gas Phase Chlorination of H-Passivated Silicon Surfaces
Charge-Carrier-Stimulated Halogen Desorption from Si(100)-(2x1)
Morphological Evolution during Competitive Etching and Oxidation of Vicinal Si(100) Surfaces
Atomic Oxygen Etching of Phosphorous-containing Polymer Surfaces
Structural Damage of Self-Assembled Monolayers Induced by 5-eV O+ Bombardment
In-situ STM-studies of Solid/Liquid Interfaces:Growth of Ultrathin Compound Films
TF-ThM
Evolution of Surface Morphology during Thin Film Growth by Hot-Wire CVD: Short-Range Smoothening and Long-Range Roughening
Atomic-Scale Analysis of SiH3 and H Surface Diffusion on Plasma-Deposited Amorphous Silicon Thin Films
Substrate Temperature Dependence of the Roughness Evolution of Hot-wire Deposited a-Si:H Studied by Real-Time Spectroscopic Ellipsometry and Atomic Force Microscopy
A Self-Consistent Prediction of a Deposition of Cu Sputtered in a rf Magnetron Plasma
Effects of Steering and Shadowing in Epitaxial Growth
Inhomogeneous Transport of Energetic and Thermalized Neutrals in a Magnetron Sputter System
A Target Material Pathways Model for High Power Pulsed Magnetron Sputtering
Complex Target Poisoning Effects in Reactive Sputtering
Process Parameter - Film Structure/Optical Property Study of Reactive Sputter Deposited Hafnium Dioxide
Integrated Modeling of Al2O3 Atomic Layer Deposition
TS-ThM
Engineering, Business, and the Next Environmental Frontier: Will Sustainability Solutions Self-Assemble?
Emerging Applications for Electrodeposited Nano-Structured Materials: Environmental Benefits and Potential Risks
Designing More-sustainable Technologies through Green Chemistry and Nanoscience
Nanotechnology and Environmental Policy
Sessions | Time Periods | Topics | Schedule Overview