AVS2003 Sunday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Sunday, November 2, 2003
10:00 AM 11:00 AM 12:00 PM
WS-SuM
Basic Understanding of Reactive Sputtering Processes
Shallow Implantation as a Mechanism for Target Poisoning in Reactive Sputtering
Modeling of Sputtering Equipment and Processes as an Engineering Tool: Building a Virtual Sputter Tool
Sessions | Time Periods | Topics | Schedule Overview