AVS2003 Monday Morning

Aqueous-derived Planar Proxies: A Connection between Surface Science and Real World Catalysts

The Role of XPS in Materials Characterization in an Industrial R&D Setting

Quantitative Depth Distribution Analysis of Hg and Na in Glass

Rutherford Backscattering Quantification of Mercury Interaction with Fluorescent Lamp Materials

Investigation of the Tribological System of Roller Bearings with TOF-SIMS

Interfacial Analysis between Amorphous Carbon Films and Glass by XPS and Improvement of Adhesion Strength at the Interface by Plasma Treatment

Determination of SiGe Film Composition and Thickness by Combined AES and Multiple-Voltage X-ray Emission Analysis

Carbon Gold Sulfide by 13.56 MHz Plasma CVD and Sputtering Process

Thickness, Dose and Distribution Measurements of Silicon Oxynitride Ultra-thin Films

Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) and Surface Plasmon Resonance (SPR) Determination of Surface Bound Anti-Lysozyme Orientation

Identification of Proteins in the Presence of Topographic Features using TOF-SIMS

Immobilized Microarrays of Capture Agents for Bioassay: A Return to the Past for Protein Surface Stability?

Limitations of Molecular Streptavidin/Anti-biotin Antibody Architectures using Micro-contact Printed Biotinylated Thiols

A Comparison of Microcontact Printed and Solution Adsorbed Cytochrome c Protein Films on Indium Tin Oxide Electrodes

Using Nanografting to Position with Predictable Orientation, De-novo Proteins on Gold

Nanoscale Control of ECM Proteins for Cell Adhesion

Activity of the Model Enzyme Urease Adsorbed on Different Colloidal Oxide Particles

In situ Real-time Atomic Force Microscopy Studies of Lysozyme and RR02 Protein Crystal Growth at Surfaces

Attempting the Unthinkable: Replacing SiO₂ with High-k Materials as the Gate Dielectric for Scaled Devices

Challenges and Progress on High-K Devices and Materials

First Principles Studies of the Electronic and Atomic Structures of ZrO₂/Si and ZrSiO₄/Si Interfaces

X-ray Photoelectron Spectroscopy (XPS) and Spectroscopic Ellipsometry (SE) Study of Hafnium Silicate Alloys Prepared by Remote Plasma Assisted Chemical Vapor Deposition: Comparisons between Conduction Band Offset Energies and Optical Band Gaps

Photoemission Study of High-k Gate Dielectric/Si(100) Heterostructures - Chemical Bonding Features and Energy Band Alignment

Separate and Independent Control of Interfacial Band Alignments and Dielectric Constants in Transition Metal-rare Earth Ternary Oxides

A Materials and Electronics Properties Study of the ZrO₂/Si and SiO₂ Interfaces

Interface and Materials Properties of High-k Gate Stack Structures

Development of Low Resistance Copper Thin Films Using a Strain Enhanced Grain Growth Technique

Processing and Characterization of PMSSQ Based Materials for Nanoporous Low-K Dielectrics

Multi-scale Modeling of Chemical Mechanical Planarization

Thermal Characterization of Stacked 3D System-in-Package

Advanced Clean Process by Supercritical Carbon Dioxide

Two-Gas Reactive Sputtering

Hydrogen Pressure Dependence of Trench Corner Rounding during Hydrogen Annealing

Development of a Continuous Generation/Supply System of Highly-concentrated Ozone Gas for Low-temperature Oxidation Process

Profile Control for Deep Silicon Etch by Sidewall Passivation in High Density Plasma

The Study on Deformation of ArF Photo Resist in Dry Etching

Conductance and Stability of Atom-sized Al Contacts under High Biases

In-situ Monitoring of Quantum Conductance in Electrodeposited Magnetic Point Contacts¹

Quantum Dot Nucleation and Growth in a Microfluidic Reactor

Formation of 31P Qubit Test Structures by Single Ion Implantation

Spin Based Qubit Fabrication in SiGe

A Systematic Study of SiGe Quantum Fortresses and Possible Applications to Quantum Cellular Automata

Current Challenges in Nanocrystal-Quantum-Dot Lasing

Si Nanocrystal Synthesis in an Oxide Matrix: A Multiscale Computational Study

Nanocrystalline Structures in Amorphous Silica

Investigation of Nucleation and Growth of Si(Ge) Nanocrystals Embedded in HfO₂ as Floating Gate for Flash Memory Devices

Coupling Molecules to Electronic Materials Chemical Bonding and Polarization Effects at Metal-Molecular Monolayer-Semiconductor Junctions

Long Range Electronic Coupling at Molecule-metal Interfaces: C60/Cu(111)

Molecule on Metal versus Metal on Molecule: The Sexiphenyl/Al Interfaces

Adsorption of Sexithiophene on Clean and Potassium-Dosed Al(111)

Interaction between Metals and Organic Semiconductors Studied by Raman Spectroscopy

Electronic Structure and Hole Injection Barriers for Pure and Substituted Phenylene Ethynylene Oligomer Self-Assembled Monolayers

Direct Double-Bond Contacts to Metal Carbides: A New Surface Functionalization Reaction

Study of Transport Through Organic Molecules on Semiconductor Surfaces Using STM-SPV

Contact Effects in Molecular Junctions

Not Quite 50 Years of Plasma Etching

Chemical Topography Analyses of Photoresist Patterns Exposed to HBr/O2 and Cl2/O2 Trimming Plasma Processes

Aspect Ratio Dependent Etching in the Si-Treatment Process of the Source and Drain Area of sub 90 nm Devices

Loading Effect Study on Cl₂+HBr Plasma Etching of Polysilicon

Pattern Deformations during Resist Trimming Process and its Suppression by He-diluted O₂/SO₂ Chemistry

On the Roughness of Etched Silicon

Investigation of Trim Etching Process for Formation of Si/High-K Gate Stack

50nm Gate Electrode Patterning using a Neutral Beam Etching System

Surface and Reactor Dynamics Governing Photoresist Trim and Organic BARC Open Plasma Processing

3-Dimensional Modeling of Pulsed Inductively Coupled Plasmas: A Method to Improve Uniformity¹

Modules for an XPS Expert System: Applications in Corrosion Science

Auger Electron Spectroscopy: Reducing Measurement Uncertainty

Molecular Characterization of Biomaterials with ToF-SIMS Imaging

Extrinsic and Intrinsic Excitations in Ge and Si Photoelectron Spectra

Multivariate Analysis for XPS Spectral Imaging¹

III-Nitride Epitaxy on Oxide Substrates: New Understanding and Novel Device Alternatives

Ion-Beam-Assisted Molecular Beam Epitaxy of GaN

Optimizing AlGaN-GaN Heterostructures by MOCVD for Microwave Electronics

Improvement of Optical and Electrical Properties in Blue Light-Emitting Diodes with InGaN-based Triangular-Shaped Quantum Wells

Optical Studies on the Incorporation of Carbon as a Dopant in Cubic GaN

Effect of Substrate Temperature on Crystal Orientation and Residual Stress in RF Sputtered Gallium Nitride Films

Formation of Zinc-blende-structure GaN Thin Films on Si Substrates by Radio Frequency Planar Magnetron Sputter Deposition

Nanomechanical Testing of Films and Coatings

Molecular-Scale Tribology in Model SAMs and Amorphous Carbon Films

Thin Film Growth by PVD in the Presence of Residual Gas

John A. Thornton Memorial Award Address: Advances in Reactive Sputtering Processing Technology

Angular Distribution of Cl Atom Products from Direct and Precursor-Mediated Hyperthermal Abstractive Chemisorption of Cl2/Al(111)

Photoinduced Electron Transfer Chemistry and Dissociation of Adsorbed CO₂: Harnessing Å-Scale Molecular Acceleration Towards a Surface

Adsorption Dynamics and Desorption Kinetics of Argon and Methane on MgO(100)

Adsorption of CO on Rutile (1x1)-TiO₂(110): A Molecular Beam Study

Ultra-Low Coverage Spontaneous Etching and Hyperthermal Desorption of Aluminum Chlorides from Cl₂ on Al(111)

Probing the Vibrational State-Resolved Gas-Surface Dynamics of Polyatomic Molecules Without the Laser

Kinetics of H Atom Adsorption on Si(100) at 325 - 600 K

Charge Exchange between Metal Ions and Surfaces

Atomic Level Explanation of the Compensation Effect in Heterogeneous Catalysis

Formation of Surface Cyanide through Carbon-Nitrogen Coupling Reactions on Pt(111)

The Effect of Atomic Steps on the Adsorption and Desorption of CO on Ru(109)

Medard W. Welch Award Address: Get Real ! --- The Importance of Complexity for Understanding the Function of Surfaces

CO and Ethylene Dissociation on Ni(111): Influence of Steps

From Atomic Scale Reactant Ordering to Mesoscale Pattern Formation: CO Oxidation on Pd(100)

The Correlation between the Electronic Structure and the Energetics of CO Chemisorption on Pd/Re (0001) Surfaces

Chemisorption Bond Weakening on Finite Size Terraces: CO on the Stepped Ru(109) Surface Compared to Ru(001)

Orientation of N₂O on Pd (110) and Rh(110) at Low Temperatures

Determining Diffusion Mechanisms Using STM

Surface Characterization and Inter-diffusion Study of Copper on Ruthenium Thin Film Deposited on Silicon Substrate

Dynamics of Surface Alloys: Decay of 2D Islands on Pb/Cu(111)

Edge Diffusion on Spiral Steps on Pb(111) Microfacets*

Sb-mediated Ge and Si Growth on Ge(001)

The Frustrated Alloying of Ge on Ultra-Flat Si(001)

New Diffusion Mechanisms on Amorphous Surfaces

Mobility of Nanostructures on the Surface of a Desorbing Solid: Friction at the Nanoscale

Time-space Height Correlations of Thermally Fluctuating 2-d Systems; Application to Vicinal Surfaces and Analysis of STM Images

STM Tip-induced Translation through Excitations of the H₂O and D₂O Bending Modes on Pd(111)

Advancements in ALD Chemistry

Incorporation and Control of Silica in Hafnium Silicates using Atomic Layer Deposition Techniques

In-situ Infrared Analysis of Atomic Layer Deposition Half-Reactions: Hafnium Diethyl- Amide Adsorption and Dissociation on SiO₂ and HfO₂

Characteristics of Hafnium Aluminate Films for Gate Dielectric Applications Deposited by Atomic Layer Deposition Method

Atomic Layer Deposition of Transition Metal Films

Demonstration of AlN ALD Using Hydrazine as the Nitrogen Precursor

Low Temperature Deposition of SiN using Sequential Exposures of Si₂Cl₆ and NH₃

Atomic Layer Deposition on Fine Particles

Fifty Years of Vacuum Science

The Measurement of Vacuum;1950-2003

Major Advances in Capture Pumps in the Last 50 Years

Major Advances in Transfer Pumps; 1953-2003

The Development of Ultrahigh and Extreme High Vacuum Technology for Physics Research¹