AVS2002 Wednesday Morning

Verification of Silicon Native Oxide Growth Models using Spectroscopic Ellipsometry

Measurement of Semi-Isolated Poly-Silicon Gate Structure with Optical Critical Dimension Technique

Progress in Spectroscopic Ellipsometry: Applications from Vacuum Ultraviolet to Infrared

Application of Bragg Light Scattering Method for Studying of Spatial Dispersion Effects in Ferroelectrics

Titanium Dioxide Thin Film Growth on Si(111) by Chemical Vapor Deposition of Titanium(IV) Isopropoxide

Nitrided Silicon-Silicon Dioxide Interface: Electrical and Physico-Chemical Characterization by Complementary Surface Techniques

Accurate SIMS analysis of SiON Films

A Challenging Problem: Interfaces between Condensed Matter

Surface Chemistry of Environmentally Relevant Transition Metal Oxides Studied in Aqueous Solutions using Soft X-ray Spectromicroscopy

Investigation of Protein Adsorption with Simultaneous Measurements of Atomic Force Microscope (AFM) and Quartz Crystal Microbalance (QCM)

Real-time AFM Investigations of the Enzymatic Degradation of DNA-polymer Dendrimer Complexes

Interaction of Water with Protein Resistant Self-Assembled Monolayers: Neutron Reflectivity Measurements of Water Density in the Interphase Region

Force Spectroscopy of Self-Assembled Monolayers Containing 'Sandwiched' Oligo(Ethylene Glycol) Interfaces on Gold under Electrolyte Solution

Chemical and Biological Agent Decontamination of Civilian Facilities

Science and Technology for Combating Terrorism

Basic Research Needs for Countering Terrorism

Panel Discussion: Science & Technology Issues for Homeland Security, T. HOPKINS, Defense Threat Reduction Agency; T. MICHALSKI, Sandia Nat. Labs; E. RABER, Lawrence Livemore Nat. Lab; M.J. SAILOR, UC, San Diego; D. WALT, Tufts Univ.; L.J. WHITMAN, NRL

Perpendicular Recording Media Near 100 Gbit per square inch

High Frequency Noise Measurements in Spin-Valves

Theory of Spin-dependent Tunneling

In-Situ Conductance Measurements of Giant Magnetoresistive Multilayers

Probing Nanomechanical Systems with Electron Tunneling Devices

Fabrication and Characterization of a Carbon Nanotube Torsional Oscillator

Femtogram Detection using Nanoelectromechanical Oscillators

IR Imaging Using Uncooled Nanostructured Microcantilever Thermal Detectors¹

Frequency and Phase Entrainment in MEMS Oscillators

Fabrication of Submicron-Scale Metallic Comb-Drive Actuators

Controlling Energy Losses in Nanoscale Structures with Surface Chemistry

Electronic Structure of Nitrogen Doped Ultrananocrystalline Diamond

Growth, Microstructure and Properties of Fullerene-Like Carbon Nitride Thin Solid Films Deposited by DC Magnetron Sputtering

Selective Oxidation of Faulted Halves of Si(111): (7x7) with Ozone

Dynamics of Br-Si(100)-(2x1): Surface Modification in the Absence of Desorption

Surface, Bulk and Interfacial Analysis of Self-assembled NAno-phase Particle (SNAP) Films

Electronic Structure of Ag/Cu Striped Nanostructures

Patterned Anodization on Aluminum Surfaces

Interfaces between Metals and Conjugated Organic Materials: From Physisorption to Covalent Bonding

Structural and Electronic Properties of the Interfaces between Au(111) and the Organic Semiconductors Pentacene and p-sexiphenyl

Growth of Organic Molecules on Ferromagnetic Substrates for Hybrid Organo-metallic Spintronic Devices

Controlling Metallic Contacts to Molecular Electronic Devices

DLC Thin Film as Electron Injection Layer in Organic LEDs

Self-assembly of Molecular 1D wires on Cu(110)

Dip Pen Nanolithography on Insulating Substrates

Plasma Etch Chemistries for III-V Lasers and Light-Emitting Diodes

Surface Chemical Changes of Aluminum During NF3-Based In-Situ Chamber Cleaning: Critical Discharge Parameters

Metal Etching in High-Density Plasmas

Effects of Dry Etch Process for Platinum Upper Electrodes on Electrical Properties of High-k (Ba,Sr)TiO₃ Thin-Film Capacitors

Residual-Free Reactive Ion Etching of the Bell Contact Ti/Pt/Au

Advanced Metal Gate Etch with 193nm Lithography in a Silicon Decoupled Plasma Source Etcher (DPSII)

Effect of Carbon Based Polymer Formation on Process Stability in Polysilicon Etching

Plasma Enhanced Chemical Vapor Deposition of a Dense SiO₂ Cap Layer on Low-k Nanostructured Porous Silica

RIE processes of Formation of Nanometer-Scale Dot Arrays

Efficient Production of Single-Wall Carbon Nanotubes by Means of the Gravity-free Gas Arc Dischargee

Patterned Growth of Vertically Aligned Carbon Nanofibers using a High Density Plasma Enhanced Chemical Vapor Deposition Process

Carbon Nanotubes by ICP-CVD: Growth, Characterization, Plasma Diagnostics, and Modeling

Zinc Oxide Nanowires Grown by Plasma Assisted Chemical Vapor Deposition

Surface Vibrational Spectroscopy Beyond the Harmonic Approximation: Experiments and ab initio Calculations of Ethoxy Adsorbed on Cu(100)

Development of a Time-of-Flight HREELS Using Pseudorandom Modulation

The STM as Operative Tool: Physics and Chemistry with Single Atoms and Molecules

Microscopic Nature of the Interaction of Water with Noble Metal Surface

First Principles Simulation for NC-AFM Images of Si(111) √3x√3-Ag Surface

Single Molecular Motion and Reaction Induced by STM Inelastic Tunneling

Dry De-intercalation in Layered Compounds upon Controlled Surface Charging in XPS

Nucleation and Epitaxial Growth of Gallium Nitride on Sapphire (0001) using Ion-beam-assisted Molecular Beam Epitaxy

STM Characterization of Ge Nucleation on Ge(001)

High Resolution Large Area STM Analysis of Nucleationless Island Formation in SiGe/Si(100)

Scanning Probes and Transition States: Uncovering the Low-barrier Si ad-dimer Diffusion Mechanism on Si(001) by its Electric Field Dependence

Simulations of Surface Diffusion on Amorphous Silicon

Relaxation of a Single Silicon Mound during Silicon Deposition on the Si(111)(7x7)

Morphology of Crystal Growth on Vicinal Surfaces: MBE and H-assisted MBE Growth on Laser-textured Ge(001)

Characterization of Si(100) Homoepitaxy Grown in the STM at Low Temperatures

The PE-ALD of Ta Based Metals/Nitrides: The Growth, Materials Properties, and Applications to Future Device Fabrications

Characteristics of TiN Films Deposited by rf Remote Plasma Enhanced Atomic Layer Deposition (ALD) Method using Metal Organic Precursor

Importance of Hydrogen Recombination on Flow Tube Walls During Hydrogen Radical-Assisted Metal Atomic Layer Deposition

Improved Nucleation of TiN ALD Films on Low k Polymer Dielectrics Using Al₂O₃ ALD Adhesion Layers

Alternating Layer Deposition of Dielectric Films

Photochemically-Assisted ALD of BN Thin Films

Influence of Thermal and Surface Treatments on the Outgassing Of Austenitic Stainless Steels Studied by Thermal and Electron Stimulated Desorption

Comparison of Outgassing Rates of Bare and TiN-coated Stainless Steel Vacuum Chambers*

Degassing of Static Expansion Vacuum Gauge Calibration Chamber

Organic Contaminants Adsorption Behavior on Silicon Wafer Surface Under Reduced Pressure

Study on Desorption of Carbonaceous Gas Molecules from Copper Surfaces under Electron Bombardment and the Surface Characterization

Solubility and Diffusion of Hydrogen in Ordered Metals