AVS2002 Monday Morning

Maximizing and Automating Information Extraction in Time-of-Flight Secondary Ion Mass Spectrometry

G-SIMS - Molecular Structure

Recent Advances in Time-of-Flight SIMS

Applications of Time-of-Flight Secondary Ion Mass Spectrometry in Materials Research

Method to Quantify the Comparison of Predicted vs. Experimental Isotopic Clusters in Time of Flight Secondary Ion Mass Spectrometry for High Mass Peak Identification

TOF-SIMS Characterization of Mixed Decanethiol - Octadecanethiol Self-Assembled Monolayers

Secondary Ion Emission from Thick Organic Films: Influence of Primary Ion Bombardment Conditions

A New Approach to Measuring the TRUE Boron Profile Near the Si Surface using SIMS

Study of Electron Beam Excited Plasma SNMS for High Detection Sensitivity

Molecular Simulation Studies of Orientation of Antibodies Adsorbed on Charged Surfaces

Mapping the Free Energy State of Water in Hydration Layers and Its Importance for Ligand-Receptor Binding

Growth of a Polymer Brush from Solution: Adsorption, Desorption, Conformational Conversion and Charging

Puzzles of Fluid Flow in the Biomaterials Environment

Hydration Forces on a Switchable Bioactive Surface

Structural Properties of Nucleosomal DNA Characterized by Atomic Force Microscopy

Imaging of Water Ionization at Platinum Surfaces in High Electric Fields

A Specular He Scattering Study of Water Adsorption, Desorption, and Clustering on Pt(111)

Surface Chemistry of Solid Oxide Fuel Cells

Strategies for the Study of Methanol and CO Electrocatalysis on Solid Electrodes and Nanometer-Scale Supported Catalysts

Potential Application of Tungsten Carbides as Direct Methanol Fuel Cell (DMFC) Electrocatalysts

Ru Nanoparticles Prepared by Decomposition of Ru₃(CO)₁₂ on Au (111): Structural Characterization and Chemical Properties

Development of a Microreactor System for Electrocatalytic Studies of Methanol Oxidation

Combined Atomic Force Microscope and Acoustic Wave Devices: Application to Electrodeposition

Study of Bismuth Thin Film Electrodeposition and Oxide Formation on Au(111)

Low-temperature Epitaxial Growth of the Wide Bandgap Semiconductor SiCAlN

Evolution of Structure and Optical Properties of GaAsN Films Grown by Reactive Molecular Beam Epitaxy

Effects of LED Processing Steps on the Surface of Doped GaN Epilayers

Hydrogen Removal Mechanisms from Gallium Nitride

N-type Diamond Electronics With Nitrogen Doped Ultrananocrystalline Diamond

Electronic Structure and Spin-Polarization of Mn-containing Dilute Magnetic III-V Semiconductors

Spin-transport in Ferromagnet/Semiconductor Structures

Spin Dependent Electron Transport in Hybrid Ferromagnet/GaAs Structures at Room Temperature

Tunneling Transport Across Reverse Biased Ag/Fe/Ag/GaAs Schottky Barriers

Modeling of Spin Injection into Disordered Semiconductors

Surface and Interface Properties of a Half-Metallic Alloy

Electrical Spin Injection from NiMnSb into GaAs

Epitaxial Growth and Annealing Studies of Single Crystal, Ferromagnetic Co₂MnGa of GaAs (100)

Growth Temperature Controlled Magnetism in Molecular Beam Epitaxially Grown Ni₂MnAl Heusler Alloys

Product Development and Yield Enhancement through Failure Analysis of Integrated Circuits with Scanning Capacitance Microscopy

Integrated CD Metrology for Poly Si Etching

Metrology for Manufacturing

Measurements of Shallow Trench Isolation by Normal Incidence Optical Critical Dimension Technique

The Evolution of Single Atomic Steps on vicinal Si(111) in NH₄F

Real Time in situ Spectroellipsometry

Real Time Process Control by Spectroellipsometry

In-Situ Studies of the Amorphous to Microcrystalline Transition of Hot-Wire CVD Si:H Films Using Real-Time Spectroscopic Ellipsometry

Post-Deposition Control of Resistivity and Anisotropy in ZnO Thin Films

Structural Properties of Polymeric Nanostructures

Dynamics and Mechanics of Nanoscale Adhesive Contacts

Creep Compliance and Stress Intensity in Small Viscoelastic Contacts

Mechanical and Electrical Properties of Mo₃Se₃-Nanowires and Nanowire-networks

Towards the Sensing of Atomic Interactions by Nanoindentation with Extremely Sharp Tips

Playing Nano-squeeze with Fluids

Synthesis and Applications of Vertically Aligned Carbon Nanofibers

Facilitating Single-wall Nanotube Formation by Plasma Excitation

Directed Growth of Carbon Nanotubes on Anodized Aluminum Surfaces

A Novel CVD Method for Large-scale Synthesis of Carbon Nanotubes

Preparation, Chemical and Physical Properties of Large Area Free-Standing Carbon Nanofilms

Growth of Aligned Arrays of Carbon Nanotubes from Patterned Catalyst Particles

Carbon Nanotube Growth for Nanomechanical Devices

High-resolution Transmission Electron Microscopy Study of Catalyst Metal Particle at the Tip of Carbon Nanotube

Nitrogenated Carbon Nanostructures Grown by Microwave Induced Hot-filament CVD Techniques

The Evolution of Plasma Etching in Integrated Circuit Manufacturing

Resist Transformation under High Density Plasma Exposure

A Novel Gate-Electrode Fabricating Technique using a Sequential UHF-ECR Plasma Process

Impact of Chemistry and Mask Nature on Critical Dimension Control of Gate Etch Processes

Deposition of Silicon Oxychloride Films on Chamber Walls during Cl₂/O₂ Plasma Etching of Si

HBr Outgassing and Condensation from Silicon and Polysilicon Wafers after Plasma Etching

Energetic Neutral Fluxes Towards Surfaces in a MERIE Like Reactor

ICP Etching of Poly-crystalline Si-Ge as a Gate Material

Endpoint Strategies for Recess Etch Processes in DRAM and eDRAM Applications

Numerical Model of a Cl₂-BCl₃ Metal Etch Reactor

STM Studies of the Role of Copper in Chlorosilane Desorption Mechanisms from Cl-exposed Cu/Si(111) Surfaces

Dynamics of Oligomer Desorption from Surfaces

D Abstraction by H on Si(111) Surfaces: Temperature and Coverage Dependence

Adsorption and Abstraction of H Atoms on the Graphite (0001) Surface

Experimental and Theoretical Characterization of the Vibrational Properties of Aminocarbyne Surface Intermediates

Adsorption and Adhesion Energies of Pb on (1x1)-MoC/Mo(001) by Single-crystal Adsorption Calorimetry

Enantioselectivity on Naturally Chiral Surfaces

Self-assembly of Chiral Nanoclusters of Cysteine on Au(110)-(1x2)

Towards Epitaxial Growth of Chiral Metal Films on Metal Oxide Substrates

Novel Low-Temperature Reactivity of Model Bimetallic Surfaces with Monolayer Coverages

TPD Studies of the Chemistry of CCl₄ on Fe₃O₄ (2x2)-(111) Surfaces in the Presence of Adsorbed D₂O

Variable Temperature Scanning Tunneling Microscopy Studies of a Natural Single Crystal α-Fe₂O₃(0001) Sample: Termination and Surface Chemistry with CCl₄ and Cl₂

Influence of Surface Composition on the Pyrite Mediated Dechlorination Kinetics of Alachlor

Adsorption and Desorption of Methanol on WO₃ (100) Surfaces

Interaction of Co₃O₄ Single-Crystal Surfaces with Water

Surface Chemistry of Calcined UO₂ Powders

Examination of the Redox Chemistry of Water with the Oxidized and Reduced Surfaces of CeO₂(111)

Interface Mediated Defect Formation in Ultrathin Cerium Oxide Films

Identification of Defect Sites on Oxide Surfaces

Polar ZnO(0001)-Zn and ZnO(000-1)-O Surfaces: Geometric and Electronic Structure, Stabilization Mechanisms

The Polar O-ZnO(000-1) Surface: Stability and Interaction with Hydrogen

Progress in Optical Thin-Films: A Telecommunications Perspective

Hybrid Deposition of Sputtered and Evaporated Multilayer Thin Films

Electron Cyclotron Resonance Sputtering Apparatus for Optical Band-pass Filters for Wavelength Division Multiplexing

A New Dual Ion Beam Sputter Deposition System for the Production of Complex Optical Telecommunication Filters

Optical Thin Film Formation by Oxygen Gas Cluster Ion Beam Assisted Depositions

Plasma Deposited Inhomogeneous Optical Filters

Scandium and Vanadium Multilayer Mirrors: Working towards High Reflectivity in the Extreme Ultraviolet

Measuring Optical Losses in Thin Films with Ringdown Cavity

Efficient Infrared Emission for Zinc Sulphide: Rare Earth Doped Thin Films

Polycrystalline Thin Film Photovoltaics