AVS2000 Wednesday Afternoon
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
| Session | Wednesday, October 4, 2000 | ||||||||||
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| 2:00 PM | 3:00 PM | 4:00 PM | 5:00 PM | ||||||||
| BI-WeA |
Fundamental Studies of Self-Assembling Monolayers as Model Systems for Biological Interfaces
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Protein Adsorption and Cellular Responses to Polysaccharide Coatings
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Film Formation of Self-assembled Monolayers of Thiol-modified Polyethylene Glycol on Gold
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Synthesis and Characterization of Functionalized Polymerizable Diacetylene Containing Thiol Monolayers
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Modification of Metal Oxide Surfaces for Biosensor and Biomaterial Applications Based on Assembled, Functionalized Poly(L-lysine)-g-poly(ethylene glycol)
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Design and Characterization of Specific Biorecognition Interfaces using Derivatized Poly(L-lysine)-grafted-poly(ethylene glycol) Monolayers
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Analysis of Protein Absorption on PEG-covered Silica Surfaces by ATR-FTIR
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Combining Polymer Chemistry and Photolithography to Manipulate Gene Expression and Protein Synthesis
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Investigation of Protein Interactions with Poly (Ethylene Glycol) Modified Liposomes
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| DI+ |
Materials Considerations for High-K Gate Dielectrics for Scaled CMOS
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New High k Thin Films with Improved Physical and Electrical Properties
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Chemical and Microstructural Separation of Homogeneous Plasma Deposited (ZrO2)x(SiO2)(1-x) films (x ≤ 0.5) into SiO2 and ZrO2 Phases after Rapid Thermal Annealing in Ar at 900°C
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A Study of ZrO2 and Zr-silicate Thin Film for Gate Oxide Applications
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Ultra-thin Zirconium Oxide Films Deposited by Rapid Thermal CVD for MOSFET Applications
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High-quality Ultrathin Fluorinated Silicon Nitride Gate Dielectric Films Prepared by Plasma Enhanced Chemical Vapor Deposition Employing NH3 and SiF4
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Elimination of Carbon Impurities in the Metalorganic Chemical Vapor Deposition (MOCVD) of Titanium Dioxide on Silicon
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Microscopic Understanding of the Interface for the Heteroepitaxy of Crystalline Oxides on Silicon
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Formation of Ultrathin Yttrium Silicate by Thermal Oxidation of Yttrium on Silicon
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| MI+ |
Spin-dependent Behavior in Magnetic / Semiconductor Heterostructures
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MBE Growth of Ni2MnIn/InAs (001) Heterostructure
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Investigation of the Microstructural Dependence of Magnetic Properties for MnSb/Bi Multilayers Grown on Sapphire
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Ferromagnetic Fe/Ag-GaAs Waveguide Structures for Wideband Microwave Notch Filter Devices
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Non-Volatile Reprogrammable Logic Elements using a Hybrid RTD-GMR Circuit1
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Magnetization-Controlled Resonant Tunneling in Magnetic Heterostructures
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| MM-WeA |
Surface Micromachining - Process Modeling
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Application of Magnetic Neutral Loop Discharge Plasma in Deep Silica Etching
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Application of Deep Silicon Etching and Wafer Bonding in the MicroManufacturing of Turbochargers and Micro Gas Turbine Engines
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MEMS Fabrication Technology Applied to Large Area X-ray Image-sensor Arrays
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Switching of Interfacial Energies in Polymeric Coatings
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A Novel Anti-Stiction Method Using the Harmonic Excitation on the Microstructure
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Control of Residual Stress in Thick Sputtered Metal Films
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SiC Surface Micromachining Process Development and Device Characterization
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Micro- and Nanotube Fabrication using Deposited Porous Silicon
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| MS-WeA |
Integration Challenges for Copper Metallization with Low-k Dielectrics
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Adventure of the first 300mm Pilot Line
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Cluster Formation on Copper Evaporated Onto Dow Cyclotene 3022
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FSG Film Characterization and Process Development for Copper/Damascene Technology
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300mm Manufacturing Meterology Needs
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| NS+ |
Selective-Area Chemical Vapor Deposition Using AFM-Patterned Silicon Nitride Growth Mask
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Fabrication of Nanoscale Templates by Chemical Lithography
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National Nanotechnology Initiative: Overview
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Electronic Conductivity and Thermoelectric Measurements of Bismuth Nanoline Structures
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Quantum-wire Arrays Fabricated by a High-pressure High-temperature Injection Process
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Transport Study of Single Bismuth Nanowire Fabricated by Silver and Silicon Nanowire Shadowmask
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Conductance Anisotropy in a Mesoscopic Array of Atomic Wires: Ga/Si(112)1
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Time Evolution of Ag Nanowires Grown on Ag/GaAs(110) Surfaces
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Ion Implanted Contacts to Nanostructures and Metallic Monolayers on Clean Surfaces
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| OF-WeA |
Rates of Interfacial Electron Transfer Across Well-Defined Model Interfaces
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Charge Transfer in Alkanethiol Self-Assembled Monolayers on Au Surfaces
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Low Energy Electron Microscopy Studies of the Growth of Thin Pentacene Films
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Self-assembled Monolayers on Silicon Surfaces via Si-O Linkages
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Friction Force Microscopy Study on Photodegradation of Organosilane Self-assembled Monolayers Irradiated with a Vacuum Ultraviolet Light at 172 nm
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Generation of Reactive Intermediates on Platinum by Photolysis of Pyridyl-α-Diazocarbonyl Self Assembled Monolayers
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X-Ray Induced Changes in Thiol-SAMs on Gold
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Surface Stress of Self-Assembled Alkanethiols on Gold-Coated Cantilevers
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Self-assembled Monolayers of 6-Phenyl-n-Hexanethiol and 6-(p-Vinylphenyl)-n-Hexanethiol on Au: An Investigation of Structure, Stability and Reactivity
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| PS1+ |
Supervision of Plasma Processes using Multiway Principal Component Analysis
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Sensors and Control in Plasma Processing
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Run-to-Run and Real Time Process Control of Plasma Processes using an Inductive Antenna with Microsecond Resolution
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Improved Utility of Microwave Energy for Semiconductor Plasma Processing through RF System Stability Analysis and Enhancement
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Modeling and Real-time Control of RF Diode Sputtering for GMR Thin Film Deposition
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Productivity Solutions for Eliminating Within-Wafer and Wafer-to-Wafer Variability in a Silicon Etch Process through Plasma and Surface Diagnostics
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Source Optimization for Magnetron Sputter-Deposition of NbTiN Tuning Elements for SIS THz Detectors
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Multiwavelength In-Situ Ellipsometry for Optical Coatings Fabrication: Optimal Control Strategies and Results
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Low Open Area Endpoint Detection of Plasma Etching Processes - Limitations and Signal to Noise Characterization
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| PS2-WeA |
Undercut and Bowing Characterisation in High Aspect Ratio Trenches of Poly-Si Etched in an ICP Reactor using Cryogenic SF6/O2 Chemistry Process
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Origin of Sidewall Deposition during Cl2/O2 Etching of Sub Micron Features in Inductively Coupled Plasma Reactors
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Profile Simulation of Poly-Silicon Gate Features Etched with Cl2/HBr/O2 Plasmas
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Feature Profile Evolution during Pulsed Plasma Etching: Effects of Redeposition of Time-Dependent Etch Products
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A Model for Si Etching in an Inductively Coupled SF6/C4F8 Discharge
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An Integrated Model for Oxide Etch using Fluorocarbon Plasmas
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Modeling of Trench Filling During Ionized Metal Physical Vapor Deposition1
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Process Characterization for Tapered Contact Etch
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Understanding the Evolution of Trench Profiles in the Via-First Dual Damascene Integration Scheme
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Microtrenching, Etching and Sidewall Passivation in Contact Holes and Edge Regions
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| SC+ |
Si-Ge Heterostructures
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Critical Behavior of Epitaxial Si1-xGex/Si(001) Islands
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Growth of Coherent Three-dimensional Si Islands on Ge(111)
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Adatom Assisted Stabilization of Ad-dimers on Ge(001)
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C Incorporation during the Growth Of Ge1-yCy/Ge(001) from Hyperthermal Beams
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Growth and Characterization of Metastable Ge1-xCx Thin Films on Si(100) Substrate.
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Electrical and Optical Properties of Silicon : Germanium Alloys prepared by DC Magnetron Sputtering
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Preparation and Characterization of Highly Li-doped a-Se Alloy Films for Thermal Neutron Detectors
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Instability in Atomic Step Morphology during the Sublimation of Si(111)
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| SS1+ |
Metal/Metal-Oxide Interactions and Structures in Bulk Truncated and Thin Film Systems --The Theoretical View
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Ultrathin Fe Oxides on Cu(001): a Search for Half-Metallic Films
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Low Temperature Microcalorimetric Heats of Adsorption and Sticking Probabilities of Metals on Oxide Surfaces
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Electronic Structure of Grain Boundaries in TiO2 from Ab-Initio Calculations
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Surface Defects on MgO Thin Films: Formation, Detection, Electronic and Chemical Properties
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Metallic Electronic States on SrTiO3 (110) Surface -- An In Situ Conduction Measurement
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First-Principles Calculations on Al2O3/TiC Growth and Interface
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Self-Diffusion in Ceria
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Defect Characterization on MgO(100) Using Adsorption of Small Molecules
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| SS2+ |
The Role of Two-dimensional Compressibility in Physisorption, Competitive Adsorption and Dynamic Displacement
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Molecular Adsorption and Growth of n-butane Adlayers on Pt(111)
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Optical Effects of Monolayer and Multilayer Adsorption: Formic Acid and Methanol on Cu(100)
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Precursor-mediated Dissociation and Trapping Desorption of Oxygen on Cu(001)-2√2x√2-O
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The Effect of Deposition Pressure on Adsorbate Structure and Coverage: Oxygen on W(110)1
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STM Investigation of Benzene Adsorption on Ag(110)
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Scanning Tunneling Microscopy and Spectroscopy of Metal Tetraphenylporphyrins on Au(111)
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Theory of Oxygen Adsorption on Ag(111): A DFT-GGA Investigation
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Adsorption of Propylene on Clean and Oxygen Covered Au(111) and Au(100)
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| SS3-WeA |
Adsorbate Structure Determination on Surfaces using Normal-Incidence X-ray Standing Waves
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Oriented Quantum Dots By Buffer Layer Growth Process
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Direct Observations of Ordered Domain Structures and their Dynamics : Pb on Cu(111)1
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Normal Incidence X-ray Standing Wave and Medium-energy Ion Scattering Investigation of the Structure of Ultra-thin Films on Cu(111)
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Low Energy Dynamics for S/Cu
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Does Adsorbed Oxygen Change the Electron Density in Cu?
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Soft X-ray Photoelectron Spectroscopy Studies of Faceting and Alloying for Ultra Thin Films of Ruthenium on W(111) and W(211)
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Oxygen Induced Faceting of Ir(210)
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Evolution of Ni(110) Surface with Low Energy Ion Sputtering
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| TF+ |
Monitoring of Thin Film Metallization by Metastable He Atom Scattering
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Ultraviolet Absorption Spectroscopy of Polytetrafluoroethylene Deposition by Pyrolytic CVD
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Near-edge Valence Band Structure of Amorphous Hydrogenated SiC Thin Films by a Combined use of Auger and Photoemission Processes
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Growth of Oxygen-rich Films on Ru(0001)
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In-situ Characterization of Thin Film Growth
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Characterization of the Phase Evolution of Boron Nitride Thin Films using Real Time Multichannel Ellipsometry from 1.5 to 6.5 eV
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Deposition of Hard Amorphous Hydrogenated Carbon Films from Hyperthermal Hydrocarbon Radicals, Studied by In Situ Real Time Infrared Spectroscopy
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In-Situ Monitoring of Adsorption and Film Growth Using Infrared Reflection Absorption Spectroscopy
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Investigation of the Subsonic Beam behaviour of an Expanding Thermal Plasma used to Deposit Silicondioxide like Films
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| VT-WeA |
A Test Problem for the Holweck Pump
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Significance of Bulk Flow Velocity for Turbopump Design
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A Quantitative Test of Slip-Flow Theory using the Spinning Rotor Gauge
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Power Dissipation in Gaede Stages of Turbomolecular-drag Pumps in Viscous High-pressure Regime
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Modelling Micro-Channel Flows with DSMC and a Particle Continuum Method
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Flow of Moderately Rarefied Gases Through Short Circular Tubes
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A Method for Calculation of Gas Flow in the Whole Pressure Regime Through Ducts of Any Length
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Conic Peak/Dimple Roughness Model for Explaining the Reduction of Flow Rate through Passages with Rough Walls
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Free Jets in Vacuum Technologies
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