AVS2000 Plasma Science and Technology Sessions

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Session Code Start Session Name
PS-MoM Monday, October 2, 2000 8:20 AM Plasma-Surface Interactions I
PS1-MoA Monday, October 2, 2000 2:00 PM Emerging Plasma Applications
PS2-MoA Monday, October 2, 2000 2:00 PM Plasma Etching of Conductors
PS-TuM Tuesday, October 3, 2000 8:20 AM Modeling of Plasma Processes
PS2-TuA Tuesday, October 3, 2000 2:00 PM Plasma Diagnostics I
PS-TuP Tuesday, October 3, 2000 5:30 PM Poster Session
PS+MS-WeM Wednesday, October 4, 2000 8:20 AM Plasma-Induced Damage
PS-WeP Wednesday, October 4, 2000 11:00 AM Poster Session
PS1+MS-WeA Wednesday, October 4, 2000 2:00 PM Sensors and Control in Plasma Processing
PS2-WeA Wednesday, October 4, 2000 2:00 PM Feature Evolution
PS1+TF+SE-ThM Thursday, October 5, 2000 8:20 AM Fundamentals of Plasma Enhanced Chemical Vapor Deposition
PS2-ThM Thursday, October 5, 2000 8:20 AM Plasma Diagnostics II
PS1-ThA Thursday, October 5, 2000 2:00 PM Plasma-Surface Interactions II
PS2-ThA Thursday, October 5, 2000 2:00 PM Dielectrics I
PS-FrM Friday, October 6, 2000 8:20 AM Dielectrics II
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