AVS1999 Tuesday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Tuesday, October 26, 1999
8:20 AM 9:20 AM 10:20 AM 11:20 AM
AS-TuM
Characterization of Shallow Junctions Using Secondary Ion Mass Spectrometry
Quantitative Determination of Oxide Layer Thickness and Nitrogen Profiles for Si Gate Oxides
Cesium Depth Profiling of Ultra-Shallow Implants
Characterization of Ultra-thin (2-3nm) Oxide Films using Low Energy Cs Ion Beams
SIMS and XPS Correlation Study of Nitrided Gate Oxide
Characterization of the Diffusion Properties of Metallic Elements Implanted into Silicon by SIMS
Focused Ion Beam Micromachining of Thin Film Copper
Surface Analysis and Depth Profiles of Self-healing Copper Aluminum Alloys*
Quasi Atomistic Depth Resolution with Auger Depth Profiling for Oxide / Metal Structure
BI-TuM
Functionality of a Model Protein at Nanostructured Surfaces
Hierarchical Ordering of Proteins at Interfaces with a Nanoscale Surface Topography
Protein Adsorption on Solid Surfaces : From Static to Dynamic Properties
Protein Adsorption Kinetics: Particle Model and Optical Experiment
Probing Immobilized Protein Peptide Architectures
New Platform Technology for the Investigation of Initial Interaction of Adsorption and Cross Linking of Strong Adhesives at Solid Surfaces
Molecular Orientation Distributions in Submonolayer Films Corresponding to Quasi-Reversible Electron Transfer Behavior
Surface Orientation of Peptides with α-helix and β-sheet Secondary Structures on Fluorocarbon Substrates
A Multi-Parameter QCM Technique for Investigations of Protein and Surface Interactions
Probing the Oxidation of Amine Modified Surfaces by MALDI Mass Spectrometry
EM-TuM
Structural Transition Layers at the Interface of SiO2/Si(100) Fabricated by Ozone
Infrared Spectroscopy as a Probe of Semiconductor/Dielectric Interfaces: Growth and Structure of SiO2 on Si
Real Time Observation on Si(001) Surface Oxidation by Scanning Tunneling Microscopy
Scanning Tunneling Microscopy Study of Surface Morphology of Si(111) after Synchrotron Radiation Stimulated Desorption of SiO2
How Important are Second Nearest Neighbor Effects in Silicon 2p Photoemission Spectroscopy of Si/SiO2 Interfaces?
FTIR Studies of the Nitridation of Si(100)-(2x1) and Oxidized Silicon
Silicon Passivation Chemistry for MEMS Technology
STM Studies of the Site-specific Reactivity of Isopropanol in Aqueous Silicon Etching: Controlling Morphology with Surface Chemistry
Removal of Native Oxide Employing Heated NH3/NF3 Mixture
FP-TuM
Comparative Study of Field Emission from Microcrystalline Graphite, Nanostructured Graphitic Films, and Nanotubes
Demonstration of Low Work Function Cu-Li Alloy Coatings for Edge Field Emission Devices*
Progress and Performance of FEAs using Zirconium Carbide Field Emitters
High-Speed Assembly of Flexible Film LCDs: Materials and Process Development
Growth of ITO and SiNx Films on Polymeric Substrates For Flexible Displays
Transparent and Conductive Ultra-barrier Coatings for Flexible Plastic Displays
Fabrication of OLED Devices on Flexible, Ultra-barrier Plastic Substrates
Photoisomerization and Photo-induced Alignment of Azobenzene Containing Dyes and Polymers in Ultrathin Films Fabricated by the Alternate Polyelectrolyte Deposition (APD): Application for LC Displays
Plastic Liquid Crystal Displays from Conducting Polymer
MI+
Perpendicular Patterned Media: Fabrication and Demonstration of Data Storage
Ion Beam Patterning of Magnetic Recording Media With a Stencil Mask
Ion Induced Magnetization Reorientation in Co/Pt Multilayers for Patterned Media
Texture and Strain in Cr/NiAl Films Grown on Glass Substrates
Ultrafast Magnetization Dynamics in Magnetic Thin Films
Temperature Dependent Characterization of Thermal Stability of Longitudinal Magnetic Recording Media
High Resolution FE-Auger Electron Spectroscopy: Applications in Magnetic Recording, Heads and Media
Characterization of Co/CNx Granular Media Prepared by Nanolamination
Characterization of Hard Disk Drives by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)
MS-TuM
Proposal of New Paradigm LSI Structures and Their Manufacturing
The IC Interconnect Millenium Transitions; Al to Cu, SiO2 to Low-K
Cooperative University Research for Critical Front End IC Processes
Industrial-Academic-Government Partnerships; A Successful Example
Cooperative Research on Environmentally Benign Semiconductor Manufacturing
EquiPSim: Hands-On Training in Semiconductor Equipment and Process Behavior
NS1-TuM
A Progress Report on the Road to Quantitative Nanotribology
Contact Properties of Oxide Surfaces: Long Range Forces and Adhesion
Metallic Adhesion and Tunneling at the Atomic Scale
Interphase Nanomechanical Properties in a Model Epoxy-Silane-Glass Composite as Revealed by Interfacial Force Microscopy
Nanoindentation Mechanism and Surface Recovery in an Ionic Crystal Surface, MgO(100)
The Formation and Evolution of Pileup in Nanoscale Contacts
Measuring and Imaging Contact Stiffness Quantitatively at the Nanoscale using Force Modulation
SFM Studies of Environmentally Assisted Detachment of Strongly Adhering Particles1
NS2-TuM
Single Molecule Engineering: Synthesis of Individual Biphenyl Molecules on Cu (111) with STM Tip
Scanning Tunneling Microscopy of Conjugated Oligomers on Si(100)
Initial Growth of 3,4,9,10-perylenetetracarboxylic-dianhydride (PTCDA) on Au(111): A Scanning Tunneling Microscopy Study
Isolating, Imaging, and Electrically Characterizing Individual Organic Molecules on the Si(100) Surface with the Scanning Tunneling Microscope
Molecular Wires and Molecular Junctions: Tunneling, Injection and Transport
Self-assembled Molecular Electronics: Is the Interface Conducting?
Scanning Potentiometry Studies of Charge Transport in Sexithiophene-based FETs using Conducting Probe Atomic Force Microscopy (CP-AFM)
OE+
Electronic Properties of Organic Semiconductor Interfaces
Photoemission Characterization of Al/Alq3 and Al/LiF/Alq3 Interfaces
Charge Injection vs. Chemical State of Electrode Surfaces in Metal/Alq3/Metal Structures
Investigation of the Electronic Structure of Organic Schottky Contacts with Photoemission Spectroscopy: Discrimination Between Interface Dipole, HOMO Offset, Band Bending and Charging Related Spectral Shifts
Examination of Band Bending at Organic Semiconductor / Metal Interfaces Studied by Kelvin Probe Method
Schottky Energy Barriers and Charge Injection at Metal/Organic Interfaces
Interfacial Electronic Structures between p-Sexiphenyl and Metals Studied by Electron Spectroscopies
A Photoemission Investigation of Interfaces of poly(2, 5-diheptyl-1,4-phenylene-alt-2,5-thienylene) with an oligomer (p-sexiphenyl) and a Metal - Calcium
A Photoelectron Study of Chemically Treated Indium Tin Oxide Surface and Its Reactivity with Phenyl-Diamine
PS-TuM
Probing Surface Layers during Inductively Coupled Plasma Etching using Laser-Thermal Desorption and Other Optical Techniques
Microscopic Uniformity in Oxide Etch during Overetch Time in Polysilicon Gate Etching
Vacuum Beam Studies of Photoresist Etching Kinetics
The Relationship of Etch Reaction and Reactive Species Flux in C4F8/Ar/O2 Plasma for SiO2 Selective Etching Over Si3N4
Anisotropic Etching of Polymer Films by High Energy (~ 100s of eV) Oxygen Atom Neutral Beams
X-ray Photoelectron Analysis of Sidewall Passivation Films formed during Sub 0.1 µm Silicon Gate Etch Processes
Kinetic Roughening of GaAs (001) During Plasma Chemical Etching
Measurements and Modeling of the Absolute Sputtering Yield of Nitrided and Non-nitrided Diffusion/Barrier Film Materials with Incident N+ and Ar+
SS1+
Reconstructions and Growth Kinetics of GaN Surfaces with and without Adlayers
Increase of Electrical Conductivity in p-GaN by Immersion in H2O2 Solution*
Structure of GaN(0001)-1*1: Holography Study of Mg Adsorption on GaN(0001) Surface
Angle Resolved Photoemission Studies of the Surface Electronic Structure of GaN(0001)
The Reaction of Oxygen with GaN(0001)
Deep Level Electronic States of Clean GaN (0001)(1x1) Surfaces Prepared by In Decapping
Characterization of MOCVD ZnO Buffer Layers for CIS Solar Cells
Photoelectron Diffraction of GaSe Bilayer Grown on Si(111)
An Example of a Compound Semiconductor Surface that Mimics Silicon: The InP (001) (2x1) Reconstruction
STM Studies of Sulfur Passivated InP(100)
SS2-TuM
The Microscopic Mechanism of Methanol Synthesis over the Zn-promoted Cu(111)
Vacuum and Electrochemical Characterization of a Model Pt(111) Catalyst Modified with Vapor-deposited Ru
Structurally Ordered Magnesium Vanadate Model Catalysts for Oxidative Dehydrogenation
The Atomic-scale Structure of MoS2 Nano-cluster Catalysts Studied by STM
Linking Surface Science and Catalysis
Flow Reactor Studies of Nanofabricated Model Catalysts; Activity and Reconstruction
Increasing the C-O Bond Anharmonicity of Methoxy on Cu(100) with Coadsorbates
Studies of the Oxidation Reactions of Methanol on a Heated Silver Membrane
Improved Catalytic Activity and Selectivity by Photon Irradiation
Direct Observation of Propylene Transformation Chemistry on and in the Pores of Silver Exchanged Faujasite Catalyst
TF-TuM
Coatings from Liquid and Supercritical Carbon Dioxide
Organic Films Prepared by Polymer Sputtering
Plasma Enhanced Atomic Layer Deposition of Ta for Diffusion Barrier Applications
Atomic Layer Deposition of Tungsten and Tungsten Nitride Using Sequential Surface Reactions
Relating Phase Content to Deposition Kinetics in Ultra-Thin Sputtered Tantalum Films
Atomic Layer Controlled Growth of SiO2 and Al2O3 on BN Particles Using Sequential Surface Chemistry
VM+
New Plasma Sources for Ionized PVD
Simulations and Experimental Measurements of a Hollow Cathode Magnetron Ionized Metal Plasma Deposition System
Low Temperature Polysilicon Deposition by Ionized Magnetron Sputtering
A Study of the Mechanical Behaviour of Plasma Deposited Silica Films on Polycarbonate and Steel
Carburizing of Tantalum by Radio-Frequency Plasma Assisted CVD
Electrical and Pressure Probe Measurements of a Hollow Cathode Magnetron Plasma
VT-TuM
Recommended Practice for Calibrating Vacuum Gauges of the Thermal Conductivity Type
The Use and Calibration of Spinning Rotor Gages at Non-Ambient Temperatures
Extension of the Spinning Rotor Gauge to Lower Pressure
Enhanced Bayard-Alpert Gauge with Accuracy and Stability Improved by Design and Construction
A Miniature Dual-Collector Ionization Gauge
A Compact Wide-Range Cold-Cathode Gauge
New Enhanced Performance Low Pressure Capacitance Manometer
A Review of Thermal Transpiration Corrections in Capacitance Diaphragm Gauges
Partial Pressure Analyzers in the Relativistic Heavy Ion Collider
The Modern and Flexible Upstream Controller
Sessions | Time Periods | Topics | Schedule Overview