Characterization of Shallow Junctions Using Secondary Ion Mass Spectrometry

Quantitative Determination of Oxide Layer Thickness and Nitrogen Profiles for Si Gate Oxides

Cesium Depth Profiling of Ultra-Shallow Implants

Characterization of Ultra-thin (2-3nm) Oxide Films using Low Energy Cs Ion Beams

SIMS and XPS Correlation Study of Nitrided Gate Oxide

Characterization of the Diffusion Properties of Metallic Elements Implanted into Silicon by SIMS

Focused Ion Beam Micromachining of Thin Film Copper

Surface Analysis and Depth Profiles of Self-healing Copper Aluminum Alloys*

Quasi Atomistic Depth Resolution with Auger Depth Profiling for Oxide / Metal Structure

Functionality of a Model Protein at Nanostructured Surfaces

Hierarchical Ordering of Proteins at Interfaces with a Nanoscale Surface Topography

Protein Adsorption on Solid Surfaces : From Static to Dynamic Properties

Protein Adsorption Kinetics: Particle Model and Optical Experiment

Probing Immobilized Protein Peptide Architectures

New Platform Technology for the Investigation of Initial Interaction of Adsorption and Cross Linking of Strong Adhesives at Solid Surfaces

Molecular Orientation Distributions in Submonolayer Films Corresponding to Quasi-Reversible Electron Transfer Behavior

Surface Orientation of Peptides with α-helix and β-sheet Secondary Structures on Fluorocarbon Substrates

A Multi-Parameter QCM Technique for Investigations of Protein and Surface Interactions

Probing the Oxidation of Amine Modified Surfaces by MALDI Mass Spectrometry

Structural Transition Layers at the Interface of SiO₂/Si(100) Fabricated by Ozone

Infrared Spectroscopy as a Probe of Semiconductor/Dielectric Interfaces: Growth and Structure of SiO₂ on Si

Real Time Observation on Si(001) Surface Oxidation by Scanning Tunneling Microscopy

Scanning Tunneling Microscopy Study of Surface Morphology of Si(111) after Synchrotron Radiation Stimulated Desorption of SiO₂

How Important are Second Nearest Neighbor Effects in Silicon 2p Photoemission Spectroscopy of Si/SiO₂ Interfaces?

FTIR Studies of the Nitridation of Si(100)-(2x1) and Oxidized Silicon

Silicon Passivation Chemistry for MEMS Technology

STM Studies of the Site-specific Reactivity of Isopropanol in Aqueous Silicon Etching: Controlling Morphology with Surface Chemistry

Removal of Native Oxide Employing Heated NH₃/NF₃ Mixture

Comparative Study of Field Emission from Microcrystalline Graphite, Nanostructured Graphitic Films, and Nanotubes

Demonstration of Low Work Function Cu-Li Alloy Coatings for Edge Field Emission Devices^*

Progress and Performance of FEAs using Zirconium Carbide Field Emitters

High-Speed Assembly of Flexible Film LCDs: Materials and Process Development

Growth of ITO and SiN_x Films on Polymeric Substrates For Flexible Displays

Transparent and Conductive Ultra-barrier Coatings for Flexible Plastic Displays

Fabrication of OLED Devices on Flexible, Ultra-barrier Plastic Substrates

Photoisomerization and Photo-induced Alignment of Azobenzene Containing Dyes and Polymers in Ultrathin Films Fabricated by the Alternate Polyelectrolyte Deposition (APD): Application for LC Displays

Plastic Liquid Crystal Displays from Conducting Polymer

Perpendicular Patterned Media: Fabrication and Demonstration of Data Storage

Ion Beam Patterning of Magnetic Recording Media With a Stencil Mask

Ion Induced Magnetization Reorientation in Co/Pt Multilayers for Patterned Media

Texture and Strain in Cr/NiAl Films Grown on Glass Substrates

Ultrafast Magnetization Dynamics in Magnetic Thin Films

Temperature Dependent Characterization of Thermal Stability of Longitudinal Magnetic Recording Media

High Resolution FE-Auger Electron Spectroscopy: Applications in Magnetic Recording, Heads and Media

Characterization of Co/CN_x Granular Media Prepared by Nanolamination

Characterization of Hard Disk Drives by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)

Proposal of New Paradigm LSI Structures and Their Manufacturing

The IC Interconnect Millenium Transitions; Al to Cu, SiO₂ to Low-K

Cooperative University Research for Critical Front End IC Processes

Industrial-Academic-Government Partnerships; A Successful Example

Cooperative Research on Environmentally Benign Semiconductor Manufacturing

EquiPSim: Hands-On Training in Semiconductor Equipment and Process Behavior

A Progress Report on the Road to Quantitative Nanotribology

Contact Properties of Oxide Surfaces: Long Range Forces and Adhesion

Metallic Adhesion and Tunneling at the Atomic Scale

Interphase Nanomechanical Properties in a Model Epoxy-Silane-Glass Composite as Revealed by Interfacial Force Microscopy

Nanoindentation Mechanism and Surface Recovery in an Ionic Crystal Surface, MgO(100)

The Formation and Evolution of Pileup in Nanoscale Contacts

Measuring and Imaging Contact Stiffness Quantitatively at the Nanoscale using Force Modulation

SFM Studies of Environmentally Assisted Detachment of Strongly Adhering Particles¹

Single Molecule Engineering: Synthesis of Individual Biphenyl Molecules on Cu (111) with STM Tip

Scanning Tunneling Microscopy of Conjugated Oligomers on Si(100)

Initial Growth of 3,4,9,10-perylenetetracarboxylic-dianhydride (PTCDA) on Au(111): A Scanning Tunneling Microscopy Study

Isolating, Imaging, and Electrically Characterizing Individual Organic Molecules on the Si(100) Surface with the Scanning Tunneling Microscope

Molecular Wires and Molecular Junctions: Tunneling, Injection and Transport

Self-assembled Molecular Electronics: Is the Interface Conducting?

Scanning Potentiometry Studies of Charge Transport in Sexithiophene-based FETs using Conducting Probe Atomic Force Microscopy (CP-AFM)

Electronic Properties of Organic Semiconductor Interfaces

Photoemission Characterization of Al/Alq₃ and Al/LiF/Alq₃ Interfaces

Charge Injection vs. Chemical State of Electrode Surfaces in Metal/Alq₃/Metal Structures

Investigation of the Electronic Structure of Organic Schottky Contacts with Photoemission Spectroscopy: Discrimination Between Interface Dipole, HOMO Offset, Band Bending and Charging Related Spectral Shifts

Examination of Band Bending at Organic Semiconductor / Metal Interfaces Studied by Kelvin Probe Method

Schottky Energy Barriers and Charge Injection at Metal/Organic Interfaces

Interfacial Electronic Structures between p-Sexiphenyl and Metals Studied by Electron Spectroscopies

A Photoemission Investigation of Interfaces of poly(2, 5-diheptyl-1,4-phenylene-alt-2,5-thienylene) with an oligomer (p-sexiphenyl) and a Metal - Calcium

A Photoelectron Study of Chemically Treated Indium Tin Oxide Surface and Its Reactivity with Phenyl-Diamine

Probing Surface Layers during Inductively Coupled Plasma Etching using Laser-Thermal Desorption and Other Optical Techniques

Microscopic Uniformity in Oxide Etch during Overetch Time in Polysilicon Gate Etching

Vacuum Beam Studies of Photoresist Etching Kinetics

The Relationship of Etch Reaction and Reactive Species Flux in C₄F₈/Ar/O₂ Plasma for SiO₂ Selective Etching Over Si₃N₄

Anisotropic Etching of Polymer Films by High Energy (~ 100s of eV) Oxygen Atom Neutral Beams

X-ray Photoelectron Analysis of Sidewall Passivation Films formed during Sub 0.1 µm Silicon Gate Etch Processes

Kinetic Roughening of GaAs (001) During Plasma Chemical Etching

Measurements and Modeling of the Absolute Sputtering Yield of Nitrided and Non-nitrided Diffusion/Barrier Film Materials with Incident N+ and Ar+

Reconstructions and Growth Kinetics of GaN Surfaces with and without Adlayers

Increase of Electrical Conductivity in p-GaN by Immersion in H₂O₂ Solution*

Structure of GaN(0001)-1*1: Holography Study of Mg Adsorption on GaN(0001) Surface

Angle Resolved Photoemission Studies of the Surface Electronic Structure of GaN(0001)

The Reaction of Oxygen with GaN(0001)

Deep Level Electronic States of Clean GaN (0001)(1x1) Surfaces Prepared by In Decapping

Characterization of MOCVD ZnO Buffer Layers for CIS Solar Cells

Photoelectron Diffraction of GaSe Bilayer Grown on Si(111)

An Example of a Compound Semiconductor Surface that Mimics Silicon: The InP (001) (2x1) Reconstruction

STM Studies of Sulfur Passivated InP(100)

The Microscopic Mechanism of Methanol Synthesis over the Zn-promoted Cu(111)

Vacuum and Electrochemical Characterization of a Model Pt(111) Catalyst Modified with Vapor-deposited Ru

Structurally Ordered Magnesium Vanadate Model Catalysts for Oxidative Dehydrogenation

The Atomic-scale Structure of MoS₂ Nano-cluster Catalysts Studied by STM

Linking Surface Science and Catalysis

Flow Reactor Studies of Nanofabricated Model Catalysts; Activity and Reconstruction

Increasing the C-O Bond Anharmonicity of Methoxy on Cu(100) with Coadsorbates

Studies of the Oxidation Reactions of Methanol on a Heated Silver Membrane

Improved Catalytic Activity and Selectivity by Photon Irradiation

Direct Observation of Propylene Transformation Chemistry on and in the Pores of Silver Exchanged Faujasite Catalyst

Coatings from Liquid and Supercritical Carbon Dioxide

Organic Films Prepared by Polymer Sputtering

Plasma Enhanced Atomic Layer Deposition of Ta for Diffusion Barrier Applications

Atomic Layer Deposition of Tungsten and Tungsten Nitride Using Sequential Surface Reactions

Relating Phase Content to Deposition Kinetics in Ultra-Thin Sputtered Tantalum Films

Atomic Layer Controlled Growth of SiO₂ and Al₂O₃ on BN Particles Using Sequential Surface Chemistry

New Plasma Sources for Ionized PVD

Simulations and Experimental Measurements of a Hollow Cathode Magnetron Ionized Metal Plasma Deposition System

Low Temperature Polysilicon Deposition by Ionized Magnetron Sputtering

A Study of the Mechanical Behaviour of Plasma Deposited Silica Films on Polycarbonate and Steel

Carburizing of Tantalum by Radio-Frequency Plasma Assisted CVD

Electrical and Pressure Probe Measurements of a Hollow Cathode Magnetron Plasma

Recommended Practice for Calibrating Vacuum Gauges of the Thermal Conductivity Type

The Use and Calibration of Spinning Rotor Gages at Non-Ambient Temperatures

Extension of the Spinning Rotor Gauge to Lower Pressure

Enhanced Bayard-Alpert Gauge with Accuracy and Stability Improved by Design and Construction

A Miniature Dual-Collector Ionization Gauge

A Compact Wide-Range Cold-Cathode Gauge

New Enhanced Performance Low Pressure Capacitance Manometer

A Review of Thermal Transpiration Corrections in Capacitance Diaphragm Gauges

Partial Pressure Analyzers in the Relativistic Heavy Ion Collider

The Modern and Flexible Upstream Controller