AVS1999 Tuesday Morning
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
| Session | Tuesday, October 26, 1999 | ||||||||||
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| 8:20 AM | 9:20 AM | 10:20 AM | 11:20 AM | ||||||||
| AS-TuM |
Characterization of Shallow Junctions Using Secondary Ion Mass Spectrometry
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Quantitative Determination of Oxide Layer Thickness and Nitrogen Profiles for Si Gate Oxides
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Cesium Depth Profiling of Ultra-Shallow Implants
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Characterization of Ultra-thin (2-3nm) Oxide Films using Low Energy Cs Ion Beams
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SIMS and XPS Correlation Study of Nitrided Gate Oxide
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Characterization of the Diffusion Properties of Metallic Elements Implanted into Silicon by SIMS
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Focused Ion Beam Micromachining of Thin Film Copper
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Surface Analysis and Depth Profiles of Self-healing Copper Aluminum Alloys*
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Quasi Atomistic Depth Resolution with Auger Depth Profiling for Oxide / Metal Structure
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| BI-TuM |
Functionality of a Model Protein at Nanostructured Surfaces
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Hierarchical Ordering of Proteins at Interfaces with a Nanoscale Surface Topography
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Protein Adsorption on Solid Surfaces : From Static to Dynamic Properties
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Protein Adsorption Kinetics: Particle Model and Optical Experiment
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Probing Immobilized Protein Peptide Architectures
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New Platform Technology for the Investigation of Initial Interaction of Adsorption and Cross Linking of Strong Adhesives at Solid Surfaces
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Molecular Orientation Distributions in Submonolayer Films Corresponding to Quasi-Reversible Electron Transfer Behavior
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Surface Orientation of Peptides with α-helix and β-sheet Secondary Structures on Fluorocarbon Substrates
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A Multi-Parameter QCM Technique for Investigations of Protein and Surface Interactions
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Probing the Oxidation of Amine Modified Surfaces by MALDI Mass Spectrometry
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| EM-TuM |
Structural Transition Layers at the Interface of SiO2/Si(100) Fabricated by Ozone
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Infrared Spectroscopy as a Probe of Semiconductor/Dielectric Interfaces: Growth and Structure of SiO2 on Si
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Real Time Observation on Si(001) Surface Oxidation by Scanning Tunneling Microscopy
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Scanning Tunneling Microscopy Study of Surface Morphology of Si(111) after Synchrotron Radiation Stimulated Desorption of SiO2
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How Important are Second Nearest Neighbor Effects in Silicon 2p Photoemission Spectroscopy of Si/SiO2 Interfaces?
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FTIR Studies of the Nitridation of Si(100)-(2x1) and Oxidized Silicon
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Silicon Passivation Chemistry for MEMS Technology
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STM Studies of the Site-specific Reactivity of Isopropanol in Aqueous Silicon Etching: Controlling Morphology with Surface Chemistry
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Removal of Native Oxide Employing Heated NH3/NF3 Mixture
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| FP-TuM |
Comparative Study of Field Emission from Microcrystalline Graphite, Nanostructured Graphitic Films, and Nanotubes
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Demonstration of Low Work Function Cu-Li Alloy Coatings for Edge Field Emission Devices*
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Progress and Performance of FEAs using Zirconium Carbide Field Emitters
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High-Speed Assembly of Flexible Film LCDs: Materials and Process Development
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Growth of ITO and SiNx Films on Polymeric Substrates For Flexible Displays
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Transparent and Conductive Ultra-barrier Coatings for Flexible Plastic Displays
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Fabrication of OLED Devices on Flexible, Ultra-barrier Plastic Substrates
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Photoisomerization and Photo-induced Alignment of Azobenzene Containing Dyes and Polymers in Ultrathin Films Fabricated by the Alternate Polyelectrolyte Deposition (APD): Application for LC Displays
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Plastic Liquid Crystal Displays from Conducting Polymer
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| MI+ |
Perpendicular Patterned Media: Fabrication and Demonstration of Data Storage
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Ion Beam Patterning of Magnetic Recording Media With a Stencil Mask
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Ion Induced Magnetization Reorientation in Co/Pt Multilayers for Patterned Media
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Texture and Strain in Cr/NiAl Films Grown on Glass Substrates
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Ultrafast Magnetization Dynamics in Magnetic Thin Films
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Temperature Dependent Characterization of Thermal Stability of Longitudinal Magnetic Recording Media
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High Resolution FE-Auger Electron Spectroscopy: Applications in Magnetic Recording, Heads and Media
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Characterization of Co/CNx Granular Media Prepared by Nanolamination
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Characterization of Hard Disk Drives by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)
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| MS-TuM |
Proposal of New Paradigm LSI Structures and Their Manufacturing
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The IC Interconnect Millenium Transitions; Al to Cu, SiO2 to Low-K
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Cooperative University Research for Critical Front End IC Processes
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Industrial-Academic-Government Partnerships; A Successful Example
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Cooperative Research on Environmentally Benign Semiconductor Manufacturing
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EquiPSim: Hands-On Training in Semiconductor Equipment and Process Behavior
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| NS1-TuM |
A Progress Report on the Road to Quantitative Nanotribology
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Contact Properties of Oxide Surfaces: Long Range Forces and Adhesion
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Metallic Adhesion and Tunneling at the Atomic Scale
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Interphase Nanomechanical Properties in a Model Epoxy-Silane-Glass Composite as Revealed by Interfacial Force Microscopy
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Nanoindentation Mechanism and Surface Recovery in an Ionic Crystal Surface, MgO(100)
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The Formation and Evolution of Pileup in Nanoscale Contacts
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Measuring and Imaging Contact Stiffness Quantitatively at the Nanoscale using Force Modulation
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SFM Studies of Environmentally Assisted Detachment of Strongly Adhering Particles1
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| NS2-TuM |
Single Molecule Engineering: Synthesis of Individual Biphenyl Molecules on Cu (111) with STM Tip
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Scanning Tunneling Microscopy of Conjugated Oligomers on Si(100)
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Initial Growth of 3,4,9,10-perylenetetracarboxylic-dianhydride (PTCDA) on Au(111): A Scanning Tunneling Microscopy Study
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Isolating, Imaging, and Electrically Characterizing Individual Organic Molecules on the Si(100) Surface with the Scanning Tunneling Microscope
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Molecular Wires and Molecular Junctions: Tunneling, Injection and Transport
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Self-assembled Molecular Electronics: Is the Interface Conducting?
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Scanning Potentiometry Studies of Charge Transport in Sexithiophene-based FETs using Conducting Probe Atomic Force Microscopy (CP-AFM)
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| OE+ |
Electronic Properties of Organic Semiconductor Interfaces
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Photoemission Characterization of Al/Alq3 and Al/LiF/Alq3 Interfaces
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Charge Injection vs. Chemical State of Electrode Surfaces in Metal/Alq3/Metal Structures
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Investigation of the Electronic Structure of Organic Schottky Contacts with Photoemission Spectroscopy: Discrimination Between Interface Dipole, HOMO Offset, Band Bending and Charging Related Spectral Shifts
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Examination of Band Bending at Organic Semiconductor / Metal Interfaces Studied by Kelvin Probe Method
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Schottky Energy Barriers and Charge Injection at Metal/Organic Interfaces
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Interfacial Electronic Structures between p-Sexiphenyl and Metals Studied by Electron Spectroscopies
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A Photoemission Investigation of Interfaces of poly(2, 5-diheptyl-1,4-phenylene-alt-2,5-thienylene) with an oligomer (p-sexiphenyl) and a Metal - Calcium
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A Photoelectron Study of Chemically Treated Indium Tin Oxide Surface and Its Reactivity with Phenyl-Diamine
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| PS-TuM |
Probing Surface Layers during Inductively Coupled Plasma Etching using Laser-Thermal Desorption and Other Optical Techniques
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Microscopic Uniformity in Oxide Etch during Overetch Time in Polysilicon Gate Etching
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Vacuum Beam Studies of Photoresist Etching Kinetics
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The Relationship of Etch Reaction and Reactive Species Flux in C4F8/Ar/O2 Plasma for SiO2 Selective Etching Over Si3N4
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Anisotropic Etching of Polymer Films by High Energy (~ 100s of eV) Oxygen Atom Neutral Beams
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X-ray Photoelectron Analysis of Sidewall Passivation Films formed during Sub 0.1 µm Silicon Gate Etch Processes
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Kinetic Roughening of GaAs (001) During Plasma Chemical Etching
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Measurements and Modeling of the Absolute Sputtering Yield of Nitrided and Non-nitrided Diffusion/Barrier Film Materials with Incident N+ and Ar+
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| SS1+ |
Reconstructions and Growth Kinetics of GaN Surfaces with and without Adlayers
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Increase of Electrical Conductivity in p-GaN by Immersion in H2O2 Solution*
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Structure of GaN(0001)-1*1: Holography Study of Mg Adsorption on GaN(0001) Surface
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Angle Resolved Photoemission Studies of the Surface Electronic Structure of GaN(0001)
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The Reaction of Oxygen with GaN(0001)
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Deep Level Electronic States of Clean GaN (0001)(1x1) Surfaces Prepared by In Decapping
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Characterization of MOCVD ZnO Buffer Layers for CIS Solar Cells
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Photoelectron Diffraction of GaSe Bilayer Grown on Si(111)
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An Example of a Compound Semiconductor Surface that Mimics Silicon: The InP (001) (2x1) Reconstruction
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STM Studies of Sulfur Passivated InP(100)
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| SS2-TuM |
The Microscopic Mechanism of Methanol Synthesis over the Zn-promoted Cu(111)
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Vacuum and Electrochemical Characterization of a Model Pt(111) Catalyst Modified with Vapor-deposited Ru
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Structurally Ordered Magnesium Vanadate Model Catalysts for Oxidative Dehydrogenation
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The Atomic-scale Structure of MoS2 Nano-cluster Catalysts Studied by STM
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Linking Surface Science and Catalysis
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Flow Reactor Studies of Nanofabricated Model Catalysts; Activity and Reconstruction
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Increasing the C-O Bond Anharmonicity of Methoxy on Cu(100) with Coadsorbates
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Studies of the Oxidation Reactions of Methanol on a Heated Silver Membrane
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Improved Catalytic Activity and Selectivity by Photon Irradiation
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Direct Observation of Propylene Transformation Chemistry on and in the Pores of Silver Exchanged Faujasite Catalyst
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| TF-TuM |
Coatings from Liquid and Supercritical Carbon Dioxide
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Organic Films Prepared by Polymer Sputtering
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Plasma Enhanced Atomic Layer Deposition of Ta for Diffusion Barrier Applications
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Atomic Layer Deposition of Tungsten and Tungsten Nitride Using Sequential Surface Reactions
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Relating Phase Content to Deposition Kinetics in Ultra-Thin Sputtered Tantalum Films
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Atomic Layer Controlled Growth of SiO2 and Al2O3 on BN Particles Using Sequential Surface Chemistry
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| VM+ |
New Plasma Sources for Ionized PVD
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Simulations and Experimental Measurements of a Hollow Cathode Magnetron Ionized Metal Plasma Deposition System
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Low Temperature Polysilicon Deposition by Ionized Magnetron Sputtering
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A Study of the Mechanical Behaviour of Plasma Deposited Silica Films on Polycarbonate and Steel
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Carburizing of Tantalum by Radio-Frequency Plasma Assisted CVD
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Electrical and Pressure Probe Measurements of a Hollow Cathode Magnetron Plasma
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| VT-TuM |
Recommended Practice for Calibrating Vacuum Gauges of the Thermal Conductivity Type
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The Use and Calibration of Spinning Rotor Gages at Non-Ambient Temperatures
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Extension of the Spinning Rotor Gauge to Lower Pressure
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Enhanced Bayard-Alpert Gauge with Accuracy and Stability Improved by Design and Construction
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A Miniature Dual-Collector Ionization Gauge
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A Compact Wide-Range Cold-Cathode Gauge
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New Enhanced Performance Low Pressure Capacitance Manometer
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A Review of Thermal Transpiration Corrections in Capacitance Diaphragm Gauges
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Partial Pressure Analyzers in the Relativistic Heavy Ion Collider
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The Modern and Flexible Upstream Controller
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