AVS1998 Monday Afternoon

Sessions | Time Periods | Topics | Schedule Overview

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Session Monday, November 2, 1998
2:00 PM 3:00 PM 4:00 PM
Aqueous Leachability of Single Crystal and Polycrystalline Calcium Titanate
XPS Investigations of the Chemistries of Soils
Problems in Surface Characterization of Oxides and Insulators
ESCA Depth Profiling of Insulating Thin Film Structures
Quantification of Nitrogen in Silicon Oxynitride Thin Films by XPS
XPS Characterization of Nitrogen Profile and Chemical States in Ultrathin Silicon Oxynitrides
Ultra Shallow Depth Profiling by ESCA and SIMS
Valence Band X-ray Photoelectron Spectroscopic Studies to Distinguish Between Oxidized Aluminum Species
Influence of Mg on the Oxide Formation on Al1
Cell Solid-Surface Interactions Under Flow
Leukocyte Adhesion on Self-Assembled Thiol Monolayers under Flow
Smart Polymers for Bacterial Release
Characterization of Biorecognition Surfaces
Neuronal Networks as the Basis for Computational Systems
Growth of Central Nervous System Cells on Microfabricated Pillars
Directed Neuron Attachment and Growth by Micrometer-Scale Chemical Patterning of Glass Substrates
Characterization of Cellular Interfacial Forces with AFM
Pathways Toward Chemically Assembled Electronic Nanocomputers
Room Temperature Silicon Single Electron Memory and Switch and Nanoimprint Lithography
Terabit Integration: New Ideas, Need for New Materials
Oxide-Confined Vertical Cavity Surface Emitting Lasers using Quantum Well and Quantum Dot Active Regions
Polysilicon Sealed Vacuum Cavities for MEMS
Wafer Level Vacuum Packaging for MEMS
A Dual Sensor Vacuum Gauge: Advanced Micromachined Thin Film Pirani Sensor Combined with a Piezoresistive Sensor
The Knudsen Compressor as a Micro and Macroscale Vacuum Pump Without Moving Parts or Fluids
Novel Microvalve with Low Leakage
Green House Effect and LSI Process Technology
Ultra-Low-Temperature Growth of High-Integrity Silicon Oxide and Nitride Films by High-Density Plasma with Low Bombardment Energy
Low-Temperature Large-Grain As-Deposited Poly-Si Formation by Microwave-Excited PECVD Using SiH4/Xe
Balanced Electron Drift Magnerton Plasma Source for Uniform SiO2 Etching
Influence of Wafer Back Surface Finish on Dry Etching Characteristics
Precise Control of Gas Ratio in Process Chamber
Clean Aluminum Oxide Formation on Surface of Aluminum Cylinder in an Ultraclean Gas Sampling System
Gradational Lead Screw Pump Development
Etching and Cleaning of Silicon Wafers using HF Vapor Process in the Non-Condensed Etching Regime
Scanning Tunneling Microscopy Studies of Atomic-Scale Structure In Semiconductor Heterostructures
Growth Asymmetry in InGaAsP/InAsP Superlattices Studied by Scanning Tunneling Microscopy
Microstructure of Mixed-Anion Interfaces Examined with XSTM1
X-STM Study of InAs/In1-xGaxSb/InAs/AlSb Laser Structures1
Kinetics of Anion Cross Incorporation in Type-II Heterostructures Characterized with XSTM1
Low Temperature Cross-Sectional Scanning Tunneling Microscope-Induced Luminescence of GaN
Cross Sectional STM Study on MBE-grown Si/Ge(111) Interface
Scanning Tunneling Microscopy Characterization of the Depletion Zone of a Si Lateral pn Junction
Organic Thin Film Transistors
Fast Electronic Transport in Organic Molecular Solids?
Soluble and Processable Oligothiophenes and Analogues as Semiconductors for Thin Film Transistors
Field Effect Conductance of 1-6 Monolayer Thick Crystals of Organic Semiconductors
Charge Injection and Transport in Organic Films
Localized Growth and Electrical Characterization of Polypyrrole on Temperature Programmed Microhotplates
Scaling of PFC Abatement Using Plasma Burn-Boxes1
Point-of-Use Plasma Abatement of PFCs in a High Density Inductively Coupled Plasma
Plasma Etching Using PFC Replacement Chemicals
Challenges in Plasma Etching and Patterning for Fabrication of New Systems and Devices
PECVD and Dry Etching on Large Glass Substrates for Flat Panel Displays
Use of a One Atmosphere Uniform Glow Discharge Plasma (OAUGDP) to Kill a Broad Spectrum of Microorganisms1
High Pressure Plasmas as an Anti-Terrorist Technology
Density Measurements of Cfx in a GEC Reference Cell by Infrared Absorption
Un-Collided Beam Mass Spectrometric Measurements in C2F6 and CHF3 Dielectric Etch Discharges
Modeling High-Density Plasma Etching of Aluminum and Photoresist1
Studies of Ion Bombardment in Plasma Cleaning and Etching Gases
Diode Laser Measurements of CFx and CO Radicals in an Inductively Coupled GEC Reference Cell
Cavity Ring Down Spectroscopy on an expanding Ar/C2H2 Plasma
VUV-Visible Emission Spectroscopy Investigation of Frequency Effects in Low Pressure Plasmas
Plasma Sheath Electric Field Strengths Above a Grooved Electrode in a Parallel-Plate Radio Frequency Discharge
Ultrahigh Frequency vs. Inductively-Coupled Chlorine Plasmas: Comparisons of Cl and Cl2 Concentrations and Electron Temperatures Measured by Trace Rare Gases Optical Emission Spectroscopy
Spectroscopic Measurements in an Inductively Coupled RF Discharge in Hydrogen1
Momentum Resolved ESDIAD, A New Technique, Probing the Low Frequency Motion of Adsorbed Molecules on Single Crystal Surfaces1
UV Spectroscopy of CO and Benzene on Pt(110)
Calorimetric Measurements of Metal Adsorption and Adhesion Energies on Clean, Single-Crystalline Surfaces
Multispectral Image Classifications of Si(001) Surface Electronic Structure
A Simple Nulling Technique for Measuring Complex-Valued Nonlinear-Optical Susceptibilities of Interfaces
Characterization of Near-Field Probes for Enhanced Raman Spectroscopy
Element Specific Real-Space Imaging Surface Crystallography
An Axial Resonant Force Probe for Atomic Force Microscopy
Super Transmission and Resolution Energy Analyzer and Mass-Analyzer System (STREAMS)
Adsorption and Mass Transfer Processes on Stepped Metal Surfaces
Visualization of Heterogeneously Catalytic Processes
Studies of Oxygen Species on a Heated Silver Membrane
Promotion through Gas Phase Induced Surface Segregation: Methanol Synthesis from CO, CO2 and H2 over Ni/Cu(100)
Carbon-Sulfur Bond Activation in Adsorbed Methylthiolate on Ni(100) with Gas Phase Atomic Hydrogen at 120 K
Propylene Oxidation on the Pt (111) Surface over an Extended Range of Coverages
The Catalytic Chemistry of Small Hydrocarbons on Palladium: Cyclization, and Hydrogenation
Dehydrogenation of Ethylbenzene Studied on Single Crystalline Iron Oxide Model Catalyst Films
Chemisorption on and Modification of Molybdenum Carbide Surfaces
Computer Simulation Modeling of Sculptured Thin Films
Characterization of TiN/CNx Multilayers Deposited by DC Magnetron Sputtering
Characterization of Stress-Morphology Relationships in Sculptured Thin Films (STFs)
Mechanical Properties Measurements using Scanning Force Microscopy
Meso-Scale Contact Hardness, Friction, and Wear of Aluminum Oxynitride Films
Nanotribology of Single Crystal ZnO Surfaces: Relation of Atomic Level Friction to Macro Tribology of Thin Films
Surface Stress in Silicon Oxide Layer made by Plasma Oxidation with Applying Sample Bias
Stress Alignment in SiO2 Thin Films Deposited on Thin Chromium and Aluminum Film
Investigation of Induced Recrystallization and Stress in Close-Spaced Sublimation CdTe Thin Films
Low Temperature Growth of Protective Coatings in an ECR Plasma
Low Temperature Polycrystalline Silicon Resistors on Glass Substrates
Closed Loop Control of Reactive Sputtering of Oxide Thin Films
Unbalanced Magnetron Sputtered Composite Metal-DLC Coatings
Overview of Plasma Source Ion Implantation
Improvement of Tribological Properties of Pure Aluminium by Isotropic ECR Ion Implantation
Molecular Dynamics Study of Al PVD Processes
An XPS Study of the Effects of Chemical Pre-Cleaning of Aluminum Alloys on the Anti-Corrosion Properties of Plasma Deposited Films
Sessions | Time Periods | Topics | Schedule Overview