AVS1997 Tuesday Afternoon

Sessions | Time Periods | Topics | Schedule Overview

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Session Tuesday, October 21, 1997
2:00 PM 3:00 PM 4:00 PM
AS-TuA
Practical Quantification in Auger Electron Spectroscopy
Quantitative AES: Auger Electron Lineshapes and Intensity for Metals and their Oxides.
Multivariate Image Processing Applications in Surface Analysis
Reference Films and Reference Surfaces for Electron Spectroscopy
Tests, Test Specimens and Instrument Performance
Studies of Neutral Particle Distribution in the Laser Desorbed Plumes for Rapid and Quantitative Surface Analysis
Correction of Surface Roughness Measurements in SPM Imaging
BI-TuA
Discrimination of Surface-bound DNA via AFM
Electronic Properties of "G-wire" DNA Investigated by Low Current Scanning Tunneling Microscopy
Monitoring Protein Surface Interactions by MALDI Mass Spectrometry.
Molecular Nanotechnology with 2D-Protein Crystals (S-layers) at Surfaces and Interfaces
Order and Orientation of Proteins Bound to Self Assembeled Monolayers as Determined by NEXAFS
Ordered Protein Assembly at Biomaterial Surfaces.
Adsorption and Electron Transfer of Cytochrome C at Graphite-Water Interface Studied by In Situ Tapping Mode AFM.
Adsorption and Electron Induced Dissociation of Glycine on Graphite
EM-TuA
High Performance Selectively Oxidized Vertical Cavity Laser Arrays
Electromechanical Tuning of Lasing Wavelength of Vertical Cavity Lasers
Surface Reconstructions on Wurtzite GaN Studied Using STM
Enhanced Schottky Barrier on InGaAs for High Performance Photodetector Application
Study of SiO2/GaAs Interface formed by UV Oxidation of Si on GaAs
Causes of Surface States on Sulfide Passivated III-V Surfaces
Deposition of Passivating GaS films on GaAs(100)-(1x1), (2x4), and (4x6) Surfaces using a Directional Exposure of ((t-Bu)GaS)4*
Interaction of S with the GaAs(100) Surface and the Formation of Sulfide Thin Films
Determination of 2-D Pair Correlations and Pair Interactions of In Atoms in Molecular Beam Epitaxially Grown InGaAs Alloys
EM+
Formation of Periodic Step and Terrace Structure on Si(100) Surface during Annealing in Hydrogen Diluted with Inert Gas
Imaging and Dissociation of D-S Bond on Si(111)-7x7 with Low Temperature STM
A Scanning Tunneling Microscopy Investigation of H-Atom-Etched Br-Terminated Silicon Surfaces
"Molecular" Chemistry of Hydrogen-Terminated Silicon Surfaces
Characterization of Silicon Oxide Etching in HF Vapor Process
Low-Pressure UV-Chlorine Chemical Vapor Cleaning: Ni Removal from Si(100)
The Mechanism of Copper Removal in Ultraviolet Excited Chlorine
Study on Surface Symmetry and Electronic States Change in Laser-Induced Surface Reaction of the Si(111)/Cl2 System Using Second-Harmonic Generation
The Use of Reactive Ion Sputtering to Produce Clean Germanium Surfaces in a Carbon Rich Environment - An Ion Scattering Study
MI+
General Approach to the Epitaxial Growth of Epitaxial Rare-Earth Transition Metal Thin Films and Heterostructures
Microstructure of MBE-grown FePt (110)-oriented Films.
Large Perpendicular Magnetic Anisotropy in Co3Pt Chemically-Ordered Alloy Films
GMR Behavior of Granular Fe Implanted Ag Thin Films
Terahertz Spin Precession and Coherence in Magnetic Quantum Structures
Linear and Nonlinear Magneto-Optical Properties of Regular Arrays of Magnetic Nanodots
Fabrication and Domain Imaging of Iron Magnetic Nanowire Arrays
Room-Temperature Dipole-Ferromagnetism in Linear-Self-Assembling Mesoscopic Fe Particle Arrays.
MS-TuA
Creating and Addressing the National Technology Roadmap for Semiconductors
The Industrial Consortium Approach to Precompetitive Semiconductor Research at Universities
University-Industry Partnerships in Competitive Manufacturing Technologies
Government Sponsorship of Advanced Semiconductor Manufacturing Research
NS-TuA
Atom Species Identification in STM with Time-of-Flight Technique
Detecting Electron Interference Fringes on a Quantum Wedge
Development and Application of a Dual-Probe Scanning Tunneling Microscope for Nanoscale Investigations of Materials
Femtosecond Laser Induced Imaging in Scanning Tunneling Microscopy
A Combined AFM/STM/FIM System in UHV
Holographic Imaging of Macromolecules
Independent Detection of Lateral and Vertical Forces with a Novel Dual-axial Piezoresistive AFM Cantilever
Scanning Joule Expansion Microscopy at Nanometer Scales
Construction of an Ultrahigh Vacuum, Low Temperature Atomic Force Microscope
Experimental Test of Scanned Probe Tip Reconstruction
PS1-TuA
Recent Advances in Light-Emitting Diode Technology
Response Surface Study of Inductively Coupled Plasma (ICP) Etching of GaAs/AlGaAs in BCl3/Cl2
The Application of High Density Plasma Sources for Optoelectronic Device Fabrication
High Resolution, Low Damage Patterning of AlGaN/GaN Heterostructures on SiC and Sapphire Substrates by Low Energy Electron Enhanced Etching (LE4) in a DC Plasma
High-Rate Etching of Ga-Containing Compounds for High-Brightness LEDs using ECR-Etching and CCP-RIE
Surface Chemistry and Damage in the High Density Plasma Etching of III-V Materials
In-Situ Photoreflectance Studies of Dry Etch Damage and Passivation of GaAs in a Chlorine/Ar Electron Cyclotron Resonance Generated Plasma
Proposal for an Etching Mechanism of InP in CH4-H2 Mixtures Based on Plasma Diagnostics and Surface Analysis
Surface ModificationN of n-GaAs by Hydrogen and Methane/Hydrogen RF Plasmas
PS2-TuA
Plasma Source Ion Implantation -- A Confluence of Materials Science and Plasma Science
FTIR Study of Pulsed versus Continuous Wave Plasma Deposition of Amorphous, Hydrogenated Silicon Carbide (a-Si1-xCx:H) from Silane/Methane Mixtures.
Pulsed-Power Discharges for Materials Processing
Reduction of Charging Damage in Pulsed Plasma Etching: Negative Ions vs. Electrons
Characterization of Pulse-modulated Inductively Coupled Plasmas in Argon and Chlorine
Time-Resolved Investigations of Pulsed Microwave Excited Plasma
Solving "Topographic Dependent Charging" by a Pulsed Plasma
Suppression of Notching by Lowering the RF Bias Frequency in ECR Plasma Source with Divergent Magnetic Field
SS-TuA
Photodesorption and Photodissociation of O2 on Stepped Pt Surfaces
Non-Thermal Photodesorption Induced by Infrared Radiation
Nonlinear Spectroscopy and Chemical Dynamics of Surfaces.
Thermal Desorption Kinetics of Methyl Radicals
Fragmentation, Desorption and Surface Reactions during Photolysis of Disilane Adsorbed on a Model Silicon Surface
Surface Morpholoies of Br-etched Ge/Si(001)
Chemical Selectivity in the Abstractive Chemisorption of IBr/Si(111)-7x7
Low Temperature Photochemical Attachment of Perfluoroalkyl Groups to C(110): A Multiple Internal Reflection Infrared Spectroscopic (MIRIRS) Investigation.
New Apparatus with Double Supersonic Molecular-Beams for Crystal Growth
SS3+
Kinetics of Step Attachment in Growth Studied by LEEM
Step Faceting at the (001) Surface of B-doped Si
Hot STM Studies of Heavily Boron-Doped Si(001).
Atomic Configuration of Segregated B on Si(001) Surface
Twinned Epitaxial Layers Formed on Si(111)√3x√3-B
Influence of Hydrogen on Initial Si /Al Thin Film Structure and Morphology
Existence of Magic/Critical Thicknesses for Ultrathin Al Overlayers on Si(001)
In-situ Observation of Gas-Source Molecular Beam Epitaxy of Silicon and Germanium on Si(001)
TF-TuA
Low Temperature Chemical Vapor Deposition of Binary Nitrides for Emerging Computer Chip Metallization
Fast Optimization of Titanium Nitride Barriers.
Nucleation of DMAH-Sourced CVD Aluminum on PVD and CVD TiNx and PVD Ti-W
Texture and Surface Morphology Improvement of Al by Two-Stage CVD and its Integration in an Al Plug-Interconnect Scheme for sub 0.25 micron Metallization.
An Experimental Study of the Effects of Substrate Temperature Ramping on CVD-Al Film Properties
Growth and Coalescence of Al Nuclei during CVD and PVD
Aluminum CVD from Dimethylaluminumhydride-Dimethylethylamine (DMAH-DMEA): Relationship between Growth Mechanism and Film Morphology.
Integrated CVD-PVD Metallization on High-Vacuum Cluster Tools.
Submicron Contacts for Electrical Characterisation of Semiconducting WS2 Thin Films.
TF+
Amorphous Hydrogenated Carbon Nitride Films Deposited via an Expanding Thermal Plasma at High Growth Rates
Effect of Substrate Biasing on the Properties and Stuctures of Hydrogen-free Amorphous Carbon Thin Films by Rf Magnetron Sputtering
Growth of CNx Multilayers by Unbalanced Dual Cathode Reactive Magnetron Sputtering from C and B4C Targets
Synthesis and Characterization of CNx/TiB2 Multilayers
Properties and Microstructure of DLC/DLC:Me Multilayers Prepared by Cathodic Arc Deposition
A Study of the Chemical Structure of Carbon Nitride Thin Films
Synthesis and Mechanical Properties of Ultra-Thin Carbon Nitride Films
VT+
Cold Cathode Field Emitter Array on a Quadrupole Mass Spectrometer: the Route to Miniaturization
Silicon Field Emitter Cathodes - Fabrication, Performance and Applications
Emission-Induced Changes in Si FEA I-V Characteristics
Getters and Gettering in Plasma Display Panels
Surface Chemical Reactions Stimulated by an Electron Beam on Flat Panel Display Cathodoluminescent Phosphors
Investigation of Electron Induced Damaging of Molecular Overlayers by Imaging TOF-SIMS
High-Resolution Electron Energy Loss Spectroscopy Studies of Electron Beam Effects on Trimethylsilane Adsorbed on Si(100) Surfaces.
Factors Influencing the Reduction of Hexavalent Chromium during X-Ray Photoelectron Spectroscopy
Sessions | Time Periods | Topics | Schedule Overview